由於科技不斷的進步，隨著虛擬實境、機器人科學，以及其他工業測距應用的迅速發展，即時距離成像的應用及需求也日漸增加。利用距離成像系統偵測物體深度的方法共可分為三大類，干涉測量法、三角測量法，以及飛時測距。這三種方法適用的距離級距有所不同，其中飛時測距可應用的距離範圍最適合用於臉部辨識、指紋辨識的應用。
本論文提出一個相容於CMOS製程、應用於飛時測距、基於光閘的主動光感測器；該元件擁有四個光閘，並在兩側各有一個3T主動像素感測器以及傳輸閘調節光閘照光後所儲存之光電流的流向。為了達到更高的光電子傳輸速率以及良好的光電轉換效率，我們提出表面通道、場控電晶體以及改良式埋藏通道這三種結構，並調整光閘的數量及大小，以半導體製程與元件模擬軟體模擬其特性，來讓此元件能達到最佳的效能以及實際元件的光反應分析顯示出此元件有優異的近紅外光靈敏度；此全新飛時測距光感測器未來可望使用於自動辨識的應用。

In recent years, real-time range imaging technologies develop rapidly as a result of the high demand in robotics, virtual reality, and other industrial metrology applications. Depth detection of an objects in a range imaging system can be achieved based on interferometry, triangulation, or the time-of-flight (ToF) principle. Devices based on ToF principles for depth detection have been shown to best fit the requirements for facial and fingerprint recognition applications.
A near-infrared (NIR) sensor with buried channel photogate pixel with enhanced transit speed for time-of-flight (ToF) detecteion is investigated. Experimental samples with closely coupled photogates are implemented by standard CMOS process with active pixel sensors circuits for driving and fast accessing of captured data. In order to achieve high modulation rate close to GHz, photogate sensor with different type of channels are explored and investigate in this study. Through detail process and device simulation, the optimal performance level with balance between speed and sensitivities can be obtained. The quantum response analysis of the device shows that it has excellent near-infrared sensitivity. And this novel ToF sensor can be a good candidate in key input module for the automatic identification systems.

摘要 i
Abstract ii
致謝iii
內文目錄 iv
附圖目錄 vi
表格目錄 viii
第一章 序論 1
1.1 研究動機 2
1.2 章節簡介 3
第二章 飛時測距感測器技術回顧 5
2.1 飛時測距感測器之原理 5
2.2 飛時測距感測器之發展 6
2.3 小結 8
第三章 飛時測距感測器設計與模擬結果 17
3.1 飛時測距感測器之設計 17
3.1.1 表面通道飛時測距感測器之設計 18
3.1.2 場控電晶體飛時測距感測器之設計 19
3.1.3 改良式埋藏通道飛時測距感測器之設計 19
3.2 各式飛時測距感測器特性之比較 20
3.3 小結 20
第四章 TOF製程及量測結果與分析 31
4.2 TOF量測系統 32
4.3 單一像素之量測結果 33
4.3.1光反應特性 34
4.3.2暗訊號問題 34
4.4 量測結果討論 35
4.5 小結 36
第五章 結論與挑戰 55
參考文獻 58

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