積體電路技術發展已進入成熟階段，以此為基礎發展出微機電系統技術(Micro-electromechanical Systems，MEMS )。不同於傳統的 IC 產業鏈，微機電系統技術因結構較複雜，包含化學、光學、機械功能，其設計、製造、封裝、測試，依產品應用不同而有所差異，因測試設備需模擬各種MEMS感測器使用環境，測試機台設備因較複雜，精度也要求較高，造成測試設備成本要比一般IC測試設備成本要高。
陀螺儀測試分類機因是測量角速度，是屬於慣性原理。對於測試慣性感測器機器設備需提供轉動，震動，翻轉等物理條件捕捉感測器的輸出信號，以檢測出產品好壞，測試之穩定性與持續精度以確保測試品質是一項重要指標。
本研究開發了一種利用迴歸分析和田口方法解決上述問題的綜合方法。迴歸分析的目的是找到關鍵因子，並使用田口方法實驗設計以找出更好的最佳參數。因此，分析了每個對照實驗的S / N比和最佳水平，以達到最佳組合公式。實際產品驗證10批，驗證結果顯示震動雜訊測試項之(在量測其水平震動雜訊) 測試良率由原本的0.8-1.2%之間，下降到0.2%以下，已達客戶標準0.69%之內。

The development of integrated circuit technology is in mature stage, based on which Micro-electromechanical Systems (MEMS) technology. Different from the traditional IC supply chain, MEMS technology which includes chemical, optical, and mechanical functions is complicated in structure. Especially the design, manufacturing, packaging and testing vary in product applications. Since test equipment needs to simulate various MEMS sensor usage environments, test equipment is more complicated and requires higher precision, which results in higher test equipment costs than regular IC test equipment.
The gyroscope test sorter is a type of test equipment that measures the angular inertial velocity. Hence this machine needs to provide physical signals such as rotation, vibration, and flip to capture the output signal of the sensor and determine the yield of product. How to improve the testing stability and continuously accuracy of yield to assure test quality is an important mission.
This study developed an integrated method that utilized regression analysis and Tahuchi method to address the above issue. The purpose of regression analysis is to find the key factors, and the Taguchi method is used to design the experiment to figure better process parameters. Therefore, the S/N ratio and the best level of each control facto were analyzed to achieve the best combination formula. According to the testing results of 10 lots, the Noise (in measuring its horizontal vibration noise) of test yield declined from 0.8-1.2% to less than 0.2%, which has reached within 0.69% of the customer standard.

國立清華大學工業工程與工程管理研究所 I
摘要 I
ABSTRACT II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 VII
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 研究目的 3
1-4 論文架構 4
第二章 文獻回顧探討 6
2-1迴歸分析(Regression Analysis) 6
2-2田口方法（Taguchi Methods） 9
2-2-1直交表(Orthogonal array)探討 12
2-2-2田口方法與傳統實驗設計比較 13
第三章 研究方法 15
3-1 參數找出 16
3-1-1魚骨圖/因果矩陣圖 16
3-1-2線性迴歸分析 17
3-1-3最小平方法(The method of least square) 18
3-1-4判定係數(Coefficient of determination) 19
3-2 參數最佳化 20
3-2-1實驗直交表 20
3-2-2田口方法製程參數 22
3-2-3訊號與雜訊比(Signal to Noise Ratio, S/N) 23
第四章 個案分析 24
4-1測試流程 24
4-1-1前段測試流程 25
4-1-2 陀螺儀分類機介紹 26
4-1-3 機械動作流程 27
4-2現況問題描述 28
4-2-1震動雜訊測試參數介紹 (19120/28080) 29
4-2-2量測位置介紹 32
4-3實驗結果與分析 33
4-3-1 線性迴歸分析 35
4-3-2 田口分析 38
4-3-3 S/N比計算分析 40
4-3-3 S/N比重要排序及最佳配方 42
4-4 實驗數據驗證 44
第五章結論與建議 48
5-1 結論 48
5-2 研究限制 48
5-3 未來研究方向 49
參考文獻 50

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網路資源
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2. http://global.epson.com/products/handler viewed: 4/7/2019
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