本研究提出以四向驅動微機電(microelectromechanical system, MEMS)結合彈性體，逐步增加彈性體之等向應變。在十字基礎配置中，十字形聚二甲基矽氧烷（polydimethylsiloxane, PDMS）放置在對稱設計之MEMS上方，其等向性應變比例（degree of isotropy, DOI）僅有40.96％。本研究中，藉由將施加力之位置從中心向外移，提高其形變之自由性，因此DOI增大36.48％。此外，通過填補幾何上不連續之PDMS（額外提高7.20％）或消除直角形狀之回饋約束（額外提高7.52％），可實現DOI之不斷擴展。最終，以八向驅動MEMS結合三個不同解決方案，使作動區域達到100％之DOI，可支援需要等向性應變調變。除了機械分析外，亦藉由表面電漿子共振(surface plasmon resonance, SPR)之濾色結果，驗證DOI與色純度之間之正相關變化趨勢。此外，為了擴大應用範圍，將本研究亦評估透過增強MEMS結構所提供之致動力，進一步提高彈性體上之應變，提升兩倍之等向性應變。

This research reports results that incrementally enlarge isotropically distributed strains in an elastomer, which was integrated in a four-actuator microelectromechanical system (MEMS) as a hybrid configuration. Based on the fundamental configuration, in which a cross shape polydimethylsiloxane (PDMS) was placed above the symmetrically designed MEMS with a limited 40.96% degree of isotropy (DOI), retreating the location of the applied forces outwards from the center helped on inducing free-form PDMS deformation and enlarging the DOI by 36.48%. Continuously expanding the DOI was realized by either connecting the geometrically discontinued PDMS (for additional 7.20% improvement) or removing constraints from its right-angled shape (for additional 7.52% improvement). Finally, an integrated configuration that contained the three solutions with an eight-actuator MEMS exhibited a 100% DOI in the active area, which supports various electromagnetic modulations that require isotropic strain operations. In addition to the mechanical analyses, color filtering based on surface plasmon resonance was examined to verify the improvements in terms of positive relationship between the DOI and color purity. An example of further enhancing the extent of the strain by enlarging the applied forces in the MEMS was given, which proved that a doubled linear and isotropic strain could be induced in the hybrid configuration compared with that generated by the existing configuration.

摘要 I
Abstract II
致謝 IV
目錄 V
圖目錄 VIII
表目錄 XI
符號表 XII
第一章 緒論 1
1.1、 前言 1
1.2、 彈性體調變應用 2
1.2.1、 微透鏡 2
1.2.2、 法布立–培若干涉儀 3
1.3、 彈性體等向形變 3
1.4、 研究動機 4
1.5、 文獻回顧 5
1.5.1、 電漿子濾色研究 5
1.5.2、 四向對稱靜電式微機電 6
1.5.3、 彈性體等向性比例 6
第二章 理論與方法 21
2.1、 微機電系統設置 21
2.1.1、 靜電式致動器 21
2.1.2、 梳狀靜電致動器 22
2.1.3、 十字基礎設計 23
2.1.4、 十字外移設計 24
2.1.5、 方形四向設計 24
2.1.6、 對角四向設計 25
2.1.7、 八向設計 25
2.2、 表面電漿子 26
2.3、 證明等向性應變之表面電漿子設計 27
第三章 模擬與設計 36
3.1、 微機電系統作動彈性體模擬 36
3.1.1、 -z方向形變對平面分析之影響 37
3.1.2、 十字基礎設計力學模擬 38
3.1.3、 十字外移設計力學模擬 39
3.1.4、 方形四向設計力學模擬 40
3.1.5、 對角四向設計力學模擬 42
3.1.6、 八向設計力學模擬 43
3.2、 各彈性體配置綜合分析 44
第四章 結果與討論 54
4.1、 光學分析方法介紹 54
4.1.1、 CIE 1931色彩空間 54
4.1.2、 光譜優劣分析(Q factor) 55
4.2、 各配置之電漿子奈米結構布點 56
4.3、 各配置之電漿子濾色分析 59
4.4、 微機電效能之提升 60
4.4.1、 致動力之增強 60
4.4.2、 結構剛性之降低 61
4.4.3、 綜合效能提升分析 62
第五章 結論與未來展望 77
5.1、 結論 77
5.2、 未來展望 78
參考文獻 80
附錄一 論文相似度比對結果 83
附錄二 著作列表 85
附錄三 獲獎紀錄 86

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