本研究目標為探討充磁製程中的振動對於高精度磁性編碼器精度的影響，接著改善充磁製程的振動情形並提高位置精度。研究主要分為兩個部分， 第一部分為量測充磁瞬間的振動情形並找出振動來源，第二部分為如何改善振動情形，以及模擬振動和其他因素與位置精度的關係。

第一部分主要為量測振動實驗，首先使用都普勒測振儀與加速規等儀器，量測充磁頭在不同方向充磁瞬間的振動情形、比較單極充磁與連續充磁的差異，並找出振動產生是源自於充磁頭與磁性尺之間相吸的力。經由分析不同充磁電壓的充磁放電時間與充磁頭振動幅度的交互關係，找出改良治具設計方向以降低振動情形。

第二部分為實際改良不同的充磁的治具設計，並經由精度量測來比較改良前後的位置精度。改良充磁治具後振動幅度降低，單極的位置精度的跳動較為穩定與一致，且適用於使用高電壓較長放電時間的充磁，能提高未來大量生產的效率。為了找出振動如何影響磁場分佈，將磁場強度的數據進行FFT，可以分析出不同諧波的比例，例如二倍頻、三倍頻諧波。除了找出振動對位置精度的影響，也模擬了NS極距大小不一與不同倍頻會造成的誤差，以利未來研究如何精進製程與提升磁性編碼器的位置精度。

This study can be divided into two parts. The first part is to measure the vibration occurred during magnetization process and find the source of vibration. The second part focuses on how to reduce the vibration and investigate the relationship between vibration and position accuracy by numerical simulation.

The first part mainly measures the vibration occurred during magnetization process by experiments. The experiments start from use of the laser Doppler vibrometer and accelerometers to measure the vibration of the magnetizing head in both X and Z directions. It reveals that the source of vibration is the attraction between the magnetizing head and the magnetic scale. The higher the magnetization voltage is, the longer the discharge time is. Then, the interaction between the discharge time of the magnetization and the vibration amplitude of the magnetizing head is discovered.

The second part is to improve the design of magnetization fixtures and compare the position accuracy before and after the improvement. After the improvement of the magnetization fixture, the amplitude of vibration is reduced, and the position accuracy of each pole pitch is more stable and consistent. In order to find out the relation between the vibration and the magnetic field distribution, the magnetic field strength is analyzed by FFT. In addition to the influence of vibration, it also simulates the error of position accuracy caused by the difference between the pole pitch of the north pole and the south pole as well as the third harmonics.

Finally, the vibration of the magnetization process is reduced and the relationship between the vibration condition and the position accuracy of the magnetic encoder is found.

摘要 I
Abstract II
誌謝詞 III
目錄 IV
圖目錄 VII
表目錄 XI
第一章 緒論 1
1-1 前言 1
1-2 技術背景 3
1-2.1 磁性編碼器系統 3
1-2.2 磁性編碼器的製備 4
1-3 文獻回顧 10
1-4 研究動機 17
第二章 充磁與量測原理 18
2-1 磁化理論 18
2-1.1 磁性材料 18
2-1.2 安培定律 19
2-1.3 磁滯曲線 20
2-2 感測器原理 22
2-2.1 霍爾效應 22
2-2.2 異向性磁阻效應 24
第三章 量測充磁製程振動實驗 26
3-1 充磁製程設備 26
3-1.1 線性定位平台 26
3-1.2 充磁條件參數 27
3-2 量測振動設備 28
3-2.1 都普勒測振儀 28
3-2.2 加速規 30
3-3 單次振動實驗量測 31
3-3.1 實驗架設 31
3-3.2 實驗結果 32
3-4 連續充磁振動實驗量測 38
3-4.1 實驗結果 38
3-5 不同的電壓充磁的振動結果 40
第四章 改善振動設計 43
4-1 治具改良 43
4-2 改良後新型治具 44
4-2.1 兩種治具充磁振動情形 45
4-3 位置精度結果 47
4-3.1 單極位置精度 47
4-3.2 長行程位置精度 50
4-4 位置精度解析 51
第五章 結論與未來展望 60
5-1 結論 60
5-2 未來工作 61
參考文獻 62

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