隨著超精密機械產業的迅速發展與高解析度滑動平台的定位需求，許多精密工具機台採用液靜壓軸承作為線性傳動元件。和一般滾動軸承相比，液靜壓軸承提供較佳的動態剛性來抑制振動，亦避免軸承的滯滑及磨耗現象，而幾乎無移動解析度的限制更是符合本研究的目標所需。
本研究希望提升液靜壓滑動平台的定位解析度。為達成此目標，將透過系統架設與整合，完成整個液靜壓滑動平台系統的搭建，並針對液靜壓滑動平台進行測試。利用閉迴路控制來彌補線性系統的位置誤差，以期達到更佳的加工精度，進而實現精密定位控制的目的。
在本論文中，由於精密平台對安裝精度要求較高，將於平台架設期間，利用千分表針對滑軌與各部件之間的平行度進行量測。接著測試液靜壓滑動平台的移動性能，並調整控制參數，最後由實驗確認液靜壓滑動平台的定位性能表現。

With the rapid development of the ultra-precision machinery industry, the need of high-resolution sliding platforms is increased. Many high precision tool machines used the hydrostatic slide ways or hydrostatic bearing as transmission components. Compared with general rolling bearings, the hydrostatic bearings provide better dynamic stiffness to suppress vibration, and also avoid bearing stick slip and wear. It is of interest to set-up and test a high-resolution hydrostatic sliding platform and improve the positioning resolution of the hydrostatic sliding platform. In order to achieve this goal, a hydrostatic sliding platform system was designed and setup, and tests and experiments were carried out on the hydrostatic sliding platform.
In this paper, the design and test of the hydrostatic sliding platform were presented. Test adjustments are then performed to study the performance of the design. The experiments are then conducted to evaluate the performance of the platform. Conclusions are then made based on these results.

摘要i
Abstract ii
致謝iii
第一章緒論...................................................................................... 1
第二章文獻回顧............................................................................ 4
2.1 液靜壓軸承. . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 高解析度定位平台. . . . . . . . . . . . . . . . . . . . . . 10
第三章研究方法與步驟.............................................................. 15
3.1 液靜壓滑動平台的設計分析. . . . . . . . . . . . . . . . 17
3.2 控制系統選用. . . . . . . . . . . . . . . . . . . . . . . . 22
第四章液靜壓平台組裝與測試............................................... 27
4.1 液靜壓平台組裝與組裝測試. . . . . . . . . . . . . . . . 27
4.2 振動測試. . . . . . . . . . . . . . . . . . . . . . . . . . . 38
4.3 液靜壓平台定位精度測試. . . . . . . . . . . . . . . . . . 40
4.4 PI 參數調整. . . . . . . . . . . . . . . . . . . . . . . . . . 44
第五章實驗規畫與結果.............................................................. 52
5.1 實驗架設. . . . . . . . . . . . . . . . . . . . . . . . . . . 52
5.2 長行程移動測試. . . . . . . . . . . . . . . . . . . . . . . 54
5.3 進給速率特性分析. . . . . . . . . . . . . . . . . . . . . . 56
5.4 低進給速度性能量測. . . . . . . . . . . . . . . . . . . . 58
5.5 輸入路徑指令優化. . . . . . . . . . . . . . . . . . . . . . 60
5.6 步階量測. . . . . . . . . . . . . . . . . . . . . . . . . . . 64
第六章結論...................................................................................... 67
6.1 結論. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.2 未來展望. . . . . . . . . . . . . . . . . . . . . . . . . . . 68
參考文獻.............................................................................................. 70
附錄........................................................................................................ 74

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