液靜壓軸承的原理是透過外部加壓，將高壓流體打入油腔中，使軸與軸承面之間隙產生一層薄流膜介質。並利用液體壓力來承受負載，使兩面間不會產生固體的直接接觸，因此不會有磨耗及滯滑效應的產生。液體具有良好阻尼特性，不易傳遞振動造成之誤差，能有效提升工具機的加工精度。
薄膜式節流器發展至今，已有五十餘年的歷史，1962年，Mohsin證明使用薄膜式節流器之軸承，其靜態剛性與動態剛性皆高於使用固定式節流器的軸承。然而薄膜式節流器結構較固定式節流器複雜，尺寸設計與薄膜選用對於節流器性能的影響皆很顯著。目前國內對於薄膜式節流器之設計製造仍無法完全掌握，造成節流器性能與預期差距甚大。因此在此研究中將建立薄膜式節流器的模擬系統，預測軸承的實際性能表現，並使用模擬結果修正液靜壓滑塊系統的設計參數，目標提升液靜壓滑塊的性能，最後進行滑塊性能的量測實驗與模擬結果進行比對，討論可能產生差異的原因。

The operating principle of hydrostatic bearing is to pressurize fluid into the oil recess, to create a thin film between the bearing and the shaft. The pressure is used to bear the load so that no direct contact of solids occurs between the two surfaces, so theoretically there is no wear and stick-slip effect. The liquid is not easy to transmit the error caused by vibration and can effectively improve the machining accuracy of the machine tool.
Membrane-type restrictor have been developed for more than 50 years. In 1962, Mohsin proved that bearings with membrane-type restrictor have higher static and dynamic stiffness than bearings with passive restrictor. Nonetheless, the structure of the membrane-type restrictor is more complicated than the passive restrictor, and the key point such as parameter design, the selection of the diaphragm have significant effects on the performance of the restrictor. At present, the design and manufacture of the membrane type restrictor is still have a large gap between the performance and the expected. Therefore, in this study a simulation system of the membrane-type restrictor will be established, the performance of the bearing will be predicted, and simulation of the performance of the hydrostatic bearing system will be corrected using the experiment results In the end, the measurement of the slider performance is compared with the simulation results, and the reasons for the differences may be discussed.

摘要
致謝
目錄
第一章 序論 .........................1
第二章 文獻回顧 .....................4
2.1 液靜壓軸承之研究 .................4
2.2 油腔壓力調節機制 .................8
2.3 薄膜式節流器之研究 ...............12
第三章 研究方法與步驟 ...............19
3.1 液靜壓油墊參數推導 ...............21
3.2 薄膜式節流器理論 .................33
3.3 模組化液靜壓滑軌性能分析 ..........41
第四章 軸承上油墊尺寸設計與性能模擬 ....45
4.1 滑塊上油墊節流器尺寸設計 ..........45
4.2 液靜壓滑塊性能模擬 ................52
第五章 液靜壓滑塊性能量測 .............57
5.1實驗架設與步驟 ....................57
5.2 液靜壓滑塊單向墊負載實驗 ..........62
5.3 液靜壓滑塊系統負載實驗 ............65
第六章 結論 ..........................69
6.1 結論 .............................69
6.2 未來展望 .........................70
6.2 參考文獻 .........................72
附錄 .................................78

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