本研究之目的為透過改變介電層的結構設計以降低感測器之結構剛性，在不影響空間解析度的前提下，達成增加疊加型電容式觸覺感測器之感測靈敏度(Sensitivity)的成果。
本研究透過實驗證明，將彈性體介電層由實心結構更改為空心結構時，可以大幅度提升感測器的感測靈敏度。在正向施力為0.25 N時，空心結構之平均感測靈敏度為31.660 pF/N，為實心結構的597.4倍。而在剪力施力為1.5 N時，空心結構之平均感測靈敏度相較於實心結構在各個施力角度下也至少提升5.61倍的感測靈敏度。透過剪力角度公式分析，量測角度與施力角度之誤差在各方向下皆小於4°。
由研究之成果可知，透過更改介電層之結構以降低結構剛性，可大幅提升感測靈敏度，且可以保有原先設計之高空間解析度及角度量測功能。

The purpose of this study is to improve the sensitivity of stacked capacitive tactile sensors by changing the dielectric layer from solid to hollow to reduce the structural rigidity of the sensor. The result indicated that the sensitivity can be enhanced without affecting spatial resolution.
When the normal force is 0.25 N, the average sensitivity of the hollow structure is 31.660 pF/N, which is 597.4 times that of the solid structure, displaying great sensitivity enhancement. When the shear force is 1.5 N, the average sensitivity of the hollow structure is at least 5.61 times the sensitivity of the solid structure for all shear angles. Analyses also indicated that the error between the measurement angle and shear force application angle is less than 4°.

摘要 I
Abstract II
致謝 III
目錄 V
圖目錄 VIII
表目錄 XI
符號表 XII
第一章 緒論 1
1.1 前言 1
1.2 研究動機 2
1.3 文獻回顧 3
1.3.1 空間解析度要求 3
1.3.2 靈敏度提升 4
第二章 理論、元件設計與特性預測 16
2.1 平行板電容之推導 16
2.1.1 單一介電材料之電容值推導 16
2.1.2 多層介電材料之電容值推導 17
2.2 觸覺感測器之設計 18
2.2.1 實心疊加型觸覺感測器 18
2.2.2 空心疊加型觸覺感測器 19
2.3 感測靈敏度 19
2.4 角度演算法 21
2.5 模擬分析 22
2.5.1 正向力之模擬結果 23
2.5.2 剪力之模擬結果 24
第三章 實作 45
3.1 元件製作概述 45
3.1.1 電極製備 45
3.1.2 矽母模製作 46
3.1.3 PDMS介電層製作 48
3.1.4 對準貼合及翻模製程 50
3.2 量測儀器架構 51
3.2.1 施力系統 51
3.2.2 電訊號系統及量測軟體 51
第四章 研究結果分析 69
4.1 正向力量測結果 69
4.1.1 實心正向力量測結果 69
4.1.2 空心正向力量測結果 70
4.1.3 實心與空心之正向力量測結果比較 70
4.2 剪力量測結果 71
4.2.1 實心剪力量測結果 71
4.2.2 空心剪力量測結果 72
4.2.3 實心與空心之剪力量測結果比較 73
4.2.4 角度誤差之可能原因 75
第五章 結論與未來展望 90
5.1 結論 90
5.2 未來展望 91
參考文獻 92

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