本研究利用自行研發之即時演算法與人機介面，並藉由整合雙軸向精密位移線性平台與自行建立之多波長共焦干涉儀(Multi-wavelength Confocal Interferometer, MWCI)之光學架設建立一套多功能彩色共焦干涉系統(Multi-function Confocal Interferometric System, MFCCIS)，其中使用繞射式光學元件(Diffractive Optical Element, DOE)做為軸向色散元件，建立深度校正曲線，達到大範圍掃描之即時量測能力。
本研究所建立MFCCIS之光學架設是使用焦距為100mm且設計波長為550mm之DOE，且利用40X物鏡聚焦光場，進而將待測物之光譜訊號藉由光纖傳遞至微型單點式光譜儀，最後透過演算法進行光譜分析，即可獲得待測物之高度資訊。本研究亦探討了深度校正曲線之誤差來源，且藉由量測標準階高試片評估MFCCIS之量測精準度，最後利用彩色共焦厚度量測原理結合MFCCIS中的彩色干涉訊號，並針對超薄玻璃進行厚度量測。結果顯示本研究於標準階高試片之量測準確度為1.361%，而超薄玻璃之量測結果準確度為3.190%，由此證實MFCCIS具備高準確性與多功能量測能力。
關鍵字：多波長共焦干涉儀、多功能彩色共焦干涉系統、繞射式
光學元件、即時量測能力、厚度量測。

In this thesis, a multi-function chromatic confocal interferometric system (MFCCIS) was proposed by integrating a self-developed real time algorithm, a biaxial high precision linear stage and a self-developed multi-wavelength confocal interferometer (MWCI). A depth-wavelength calibration curve was established by adopting a diffractive optical element (DOE) as the dispersion element, so that the MFCCIS can be used to obtain real time surface profile by biaxial scanning.
In the experimental setup of MFCCIS, a DOE designed for the wavelength of 550nm with a focal length of 100mm was adopted and a 40X objective was used to condense light. The interference spectrum for height measurement was received by a single-point spectrometer after an optical fiber was used to transmit the spectrum signal. In addition, sources of error in depth-wavelength calibration curve was investigated. The precision of MFCCIS was verified by a measurement of a standard step height specimen. Besides, the theory of chromatic confocal thickness measurement was implemented to obtain the thickness of the ultra-thin glass plate by adopting the chromatic interference signal. The accuracy from height measurement of the standard step height specimen is 1.361%, and the accuracy of thickness measurement is 3.190% from the experiments of ultra-thin glass plates. Therefore, MFCCIS is applicable for multi-function measurement with high accuracy.
Keywords: Multi-wavelength Confocal Interferometer, Multi-function Chromatic Confocal Interferometric System, Diffractive Optical Element, Real-time Measurement, Thickness Measurements.

一、簡介......................1
1.1 研究背景..................1
1.2 研究動機與目標............2
二、文獻回顧..................4
三、實驗原理..................11
3.1 DOE理論..................11
3.1.1 繞射原理...............11
3.1.2 DOE原理................14
3.2 彩色共焦顯微理論..........20
3.2.1 聚焦形貌法原理..........20
3.2.2 彩色共焦原理............22
3.2.3 彩色共焦干涉原理........23
3.2.4 彩色共焦厚度量測原理.....26
四、 實驗架設與演算法.......28
4.1 量測系統架構..............28
4.2 即時量測演算法............31
五、實驗流程..................34
5.1 光路系統光路校準..........34
5.2 系統量測流程..............35
六、結果與討論................35
6.1 即時量測系統之發展與探討...37
6.2 三維形貌重建之結果與分析...38
6.2.1 深度校正曲線分析........38
6.2.2 標準試片之量測結果與討論.41
6.3 MFCCIS厚度量測............43
6.3.1 MFCCIS之有效NA值校正....44
七、結論與未來展望.............48
7.1 結論.....................48
7.2 未來展望..................50
八、參考文獻..................52

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