本研究目的在於建立奈米碳管/氧化鋁雙層薄片的製程步驟，並針對其場發射性質研究討論；同時以奈米碳管/氧化鋁雙層薄片為基礎，改良手持式大氣電漿產器，提升場發式電漿產生系統的工業潛力。
本研究以熱裂解化學氣相沉積成長具有高準直性的奈米碳管陣列，並以氫氟酸掀離得到奈米碳管/氧化鋁雙層薄片。奈米碳管/氧化鋁雙層薄片除了擁有奈米碳管本身的優異性質外，還保持了奈米碳管陣列其高方向性、高準質性的特質。
奈米碳管/氧化鋁雙層薄片具有起始電場僅1.0 V/μm的優異場發射性質，本研究也提出藉由使陣列傾斜，再施以外加電場後以靜電力吸引傾斜尖端，進而減少屏蔽效應的作法，有效的使起始電場下降33.3 %，達到場發射性質提升。
手持式大氣電漿產生器改良部分，包含以本研究製備之奈米碳管/氧化鋁雙層薄片作為電漿產生器陰極，以改良電極材料；以及提出一個更小、更安全、且包含水冷系統的大氣電漿產生裝置雛型機，使大氣電漿產生系統更加完備。
本研究結果可期待於未來來看到更多基於奈米碳管/氧化鋁雙層薄片其陣列高準直特性的延伸應用；也可望於未來建立一套基於使準直陣列傾斜進而提升場發射特性的完整製程；場發式電漿產生系統也逐漸成形並朝商品化方向發展，可以期待未來於工業應用展露頭角。

The purpose of this study is to establish the process of the carbon nanotube/alumina double-layer sheet, and to discuss its field emission properties. Also, based on carbon nanotube/alumina double-layer sheet, the hand-held atmospheric plasma generator is improved to enhance industrial potential of field emission system.
Well-aligned carbon nanotube arrays were successfully grown by chemical vapor deposition, and obtained the carbon nanotube/alumina double-layer sheet by using hydrofluoric acid lift-off. Commendably, the double-layer sheet, with excellent properties of a carbon nanotube, maintained the well-alignment of the carbon nanotube array.
The turn-on field of carbon nanotube/alumina double-layer sheet is as low as 1.0 V/μm. A novel way was proposed to improve the field emission properties by flattening the array. During the field emission experiments, the carbon nanotubes would be pulled by electrostatic force. Therefore, there were some tips as the field emission sites which was generated on the sheet and pointed vertically to the anode to reduce the screening effect. The result show that the turn-on field drop by 33.3 % and improve the field emission property.
Finally, carbon nanotube/alumina double-layer sheet was used as cathode of the plasma generator to improve the electrode material. Also a new prototype atmospheric plasma generator was designed, which is smaller, safer and loaded with water cooling system, to make the process more stable.
In this study, it’s expected that more extended applications based on the well-aligned double-layer sheets can be seen in the future. The efficient process based on flattening carbon nanotube array and improving field emission property is also believed to be established in the future. The improvement of the field emission atmospheric plasma generating system is gradually complete and becomes an industrial product, which is expected to show its prominence in industrial applications in the future.

摘要 I
Abstract II
致謝 IV
目錄 VIII
圖目錄 XII
表目錄 XVII
第一章 緒論 1
1.1 前言 1
1.2 研究動機 1
第二章 文獻回顧 3
2.1 奈米碳管 3
2.1.1 奈米碳管簡介 3
2.1.2 奈米碳管結構與特性 4
2.1.3 奈米碳管製備方式 5
2.1.4 奈米碳管生長機制 10
2.1.5 高準直奈米碳管陣列 14
2.2 場發射效應 23
2.2.1 場發射效應簡介 23
2.2.2 場發射基礎理論 24
2.2.3 發射端尺寸效應 26
2.2.4 場發射遮蔽效應 30
2.3 電漿系統 37
2.3.1 電漿簡介 37
2.3.2 電漿產生理論 37
2.3.3 平衡電漿與非平衡電漿 39
2.3.4 電漿系統反應方程式 41
2.3.5 常壓電漿 42
第三章 研究方法 48
3.1 實驗設計 48
3.2 實驗製程步驟 49
3.2.1 奈米碳管陣列基板、中間層選用 49
3.2.2 催化劑沉積 49
3.2.3 成長奈米碳管陣列 50
3.2.4 製作奈米碳管/氧化鋁雙層薄片 51
3.2.5 奈米碳管/氧化鋁雙層薄片場發射量測 52
3.2.6 大氣電漿產生系統陰極材料改良 53
3.2.7 大氣電漿產生系統結構改良 54
3.3 實驗儀器與材料 58
3.3.1 矽基板 58
3.3.2 電子束蒸鍍及靶材 59
3.3.3 熱裂解化學氣相沉積系統 59
3.3.4 掃描式電子顯微鏡 60
3.3.5 拉曼光譜分析儀 61
3.3.6 場發射量測系統 63
3.3.7 射頻電源供應器 64
3.4 實驗氣體及藥品 65
第四章 研究結果與討論 66
4.1 奈米碳管陣列成長 66
4.1.1 中間層、催化金屬薄膜沉積 66
4.1.2 熱裂解化學氣相沉積 68
4.1.3 奈米碳管陣列比較 69
4.2 奈米碳管/氧化鋁雙層薄片製備 73
4.3 奈米碳管/氧化鋁雙層薄片場發射性量測 76
4.3.1 雙層薄片場發射性量測 76
4.3.2 場發射性質提升可能性之討論 77
4.4 手持式大氣電漿產生器改良 84
4.4.1 電漿產生器陰極材料改良 84
4.4.2 電漿產生器結構改良 89
第五章 結論與未來展望 94
5.1 結論 94
5.2 未來展望 95
參考文獻 97

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