本論文主要探討介電濕潤(Electrowetting on dielectric, EWOD)晶片應用於微流體圖案化與液珠在不同電壓、電極寬度、電極間距三種參數變化下受到液體介電泳(Liquid dielectrophoresis, L-DEP)的拉伸長度。
本研究藉由平板式EWOD系統與開放式L-DEP系統成功對碳酸丙烯酯液體進行生成、移動、分離和定位，並將碳酸丙烯酯圖案化成不同英文字母，施加電壓範圍分別為140 Vpp/20kHz ~220 Vpp/20kHz與280 Vpp/20kHz，而且在開放式L-DEP系統中將同體積的液體在固定電壓下圖案化成所有的英文字母。由於字母結構不同，圖案化之液珠體積會有所變化，為了更精確控制液珠體積和達成液體介電泳之圖案化，而使用液體介電泳電極探討液珠受液體介電泳力之拉伸長度。
在液體介電泳實驗中，同樣使用碳酸丙烯酯液體當驅動液體，施加電壓為140 Vpp、160 Vpp、200 Vpp，頻率固定20kHz，起因於圖案化的電壓與頻率大多落在此範圍內。晶片分為電極寬度固定為0.1mm和總寬固定為1mm，各別有六組不同電極間距的變化。實驗結果發現兩點，第一點是拉伸長度會隨著電極寬度遞減而下降，第二點是拉伸長度不會隨電極間距增加而改變，當開啟雙電極時，長度會因電極間距增加而漸漸下降。
理論方面是以液珠的受力情形的觀點作分析，主要以電場產生的力、摩擦力與毛細力等等其餘阻力進行力平衡，並從上述實驗結果之觀點改良理論，為了驗證此理論改良結果，便設計三電極晶片進行實驗，並將結果與理論做比較，結果證明理論與三電極晶片實驗結果相符，故可藉此計算出不同電壓、電極寬度、電極間距下受液體介電泳力之液珠拉伸長度與液珠體積大小。
而藉由上述理論與實驗的結果，可得知液體拉伸的長度，鑑於電極寬度和上下板間距皆已知，故可精確得知液珠體積，由液體介電泳電極控制。實驗施加電壓為200 Vpp/20kHz，目前已完成對碳酸丙烯酯液體進行生成、移動、分離和定位，並實現液體介電泳之圖案化。

This study presents the application of electrowetting on dielectric (EWOD) chip to microfluidic patterning and the length of droplet stretched by liquid dielectrophoresis (L-DEP) under different parameters of voltage, electrode width and electrode spacing.
In this study, by using the parallel plate EWOD system and the open-plate L-DEP system the propylene carbonate liquid was successfully generated, moved, separated and positioned and was patterned into different English alphabets. The range of applied voltage is from 140 Vpp/20 kHz to 220 Vpp/20 kHz and 280 Vpp/20 kHz. Moreover, the same volume of liquid is patterned into all English alphabets at a fixed voltage in the open-plate L-DEP system. Due to the difference in alphabet structure, the volume of droplets to be patterned will change. The L-DEP electrode was applied to investigate the tensile length of the droplet subjected to L-DEP force in order to precisely control the volume of the droplet and achieve L-DEP microfluidics patterning.
The propylene carbonate liquid was also used as the driving liquid in the L-DEP experiment at 140 Vpp/20 kHz, 160 Vpp/20 kHz, 200 Vpp/20 kHz .Because of the voltage required to pattern mostly fall within this range.
The chip is divided into two part.One part is electrode width fixed to 0.1 mm and the other part is total width fixed at 1 mm.Each have a variation of six different electrode spacings. The experimental results showed that the stretching length will decrease as the electrode width decreases.And the stretching length does not change with the increase of the electrode spacing. When the two electrodes are turned on,the length decreases due to an increase in the electrode spacing.
Theoretically, it is analyzed from the viewpoint of the force of the droplet.The force generated by the electric field is balanced with the friction, the capillary force and other resistances. The theory is improved from the viewpoint of the experimental results.In order to verify the theoretical improvement results, a three-electrodes chip was designed for experiments. The results prove that the theory is consistent with the results of the experiment, so that the length of droplet stretched by L-DEP and the volume of droplet can be calculated.
From the results of the theory and experiment described above, the stretching length of the liquid can be known. And since the electrode width and the upper and lower plate spacing are known, the volume of the liquid can be accurately known and controlled by the L-DEP electrode. The applied voltage is 200 Vpp/20 kHz, and the generation, movement, separation and localization of the propylene carbonate liquid have been completed, and the patterning of liquid dielectrophoresis is realized.

中文摘要 2
ABSTRACT 4
目錄 6
圖目錄 9
表目錄 16
第一章 緒論 17
1.1 前言 17
1.2 研究目標 18
第二章 文獻回顧 19
2.1 介電濕潤現象與微液珠操控 19
2.2微流體圖案化之相關文獻 28
2.3液體介電泳之相關文獻 40
第三章 研究方法及系統架設 50
3.1 介電濕潤原理 50
3.2 共平面式介電濕潤系統 52
3.3 液體介電泳原理 53
3.4 開放式液體介電泳系統 55
3.5 介電濕潤力平衡 56
3.5.1 電場力 56
3.4.2 其餘阻力 58
3.6 介電濕潤晶片製程 60
3.7 介電濕潤晶片之NI PXI-6512系統架設及建立 73
3.8液體介電泳與微流體圖案化實驗製備與架構 75
第四章 微流體圖案化與液體介電泳之液珠拉伸實驗結果 79
4.1 平行板式陣列電極晶片之液珠定位 79
4.2 碳酸丙烯酯之微流體圖案化 80
4.3 開放式指叉狀陣列電極晶片之液珠定位 82
4.4 開放式指叉狀陣列電極晶片之微流體圖案化 83
4.5 液體介電泳雙電極晶片之液珠拉伸長度 91
4.6 雙電極晶片之實驗改良 94
4.7 液體介電泳實驗與理論之比較 97
4.8 液體介電泳陣列電極晶片之液珠定位 105
4.9 液體介電泳陣列電極晶片之微流體圖案化 106
第五章 結論 112
第六章 未來工作 114
6.1陣列式電極晶片之介電層改善 114
6.2 液體介電泳之微流體圖案化 114
參考文獻 116

[1] R. P. Feynman, "There's plenty of room at the bottom " Journal of microelectromechanical systems, vol. 1, pp. 60-66, 1992.
[2] R. Feynman, "Infinitesimal machinery," Journal of Microelectromechanical Systems, vol. 2, pp. 4-14, 1993.
[3] M. Vallet, B. Berge, and L. Vovelle, "Electrowetting of water and aqueous solutions on poly (ethylene terephthalate) insulating films," Polymer, vol. 37, pp. 2465-2470, 1996.
[4] M. G. Pollack, R. B. Fair, and A. D. Shenderov, "Electrowetting-based actuation of liquid droplets for microfluidic applications," Applied Physics Letters, vol. 77, pp. 1725-1726, 2000.
[5] S. K. Cho, H. Moon, J. Fowler, and C.-J. Kim, "Splitting a liquid droplet for electrowetting-based microfluidics," in Proceedings of 2001 ASME Inter Mech Eng Congress and Expo, November, 2001, pp. 11-16.
[6] S. K. Cho, H. Moon, and C.-J. Kim, "Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits," Journal of Microelectromechanical systems, vol. 12, pp. 70-80, 2003.
[7] J. Song, R. Evans, Y.-Y. Lin, B.-N. Hsu, and R. B. Fair, "A scaling model for electrowetting-on-dielectric microfluidic actuators," Microfluidics and Nanofluidics, vol. 7, pp. 75-89, 2009.
[8] N. Rajabi and A. Dolatabadi, "A novel electrode shape for electrowetting-based microfluidics," Colloids and Surfaces A: Physicochemical and Engineering Aspects, vol. 365, pp. 230-236, 2010.
[9] A. N. Banerjee, S. Qian, and S. W. Joo, "High-speed droplet actuation on single-plate electrode arrays," Journal of colloid and interface science, vol. 362, pp. 567-574, 2011.
[10] C. Patacsil, E. Enriquez, and R. A. Guerrero, "Electrowetting on dielectric (EWOD) of sessile microdroplets containing gold nanoparticles," Materials Today: Proceedings, vol. 5, pp. 11144-11152, 2018.
[11] C. Ohya and S. Konishi, "Droplet height control by electrowetting-on-dielectric for selective contact fusion of droplets on facing substrates," in 2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, pp. 1201-1204.
[12] Y.-C. Lin, K.-C. Chuang, T.-T. Wang, C.-P. Chiu, and S.-K. Fan, "Integrated digital and analog microfluidics by EWOD and LDEP," in 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2006, pp. 1414-1417.
[13] C.-P. Chiu, W.-J. Chen, and S.-K. Fan, "Enhanced droplet mixer by LDEP on spiral microelectrodes," in Nano/Micro Engineered and Molecular Systems, 2007. NEMS'07. 2nd IEEE International Conference on, 2007, pp. 951-954.
[14] R. Renaudot, V. Agache, Y. Fouillet, G. Laffite, E. Bisceglia, L. Jalabert, et al., "A programmable and reconfigurable microfluidic chip," Lab on a Chip, vol. 13, pp. 4517-4524, 2013.
[15] A. Banerjee, J. H. Noh, Y. Liu, P. D. Rack, and I. Papautsky, "Programmable electrowetting with channels and droplets," Micromachines, vol. 6, pp. 172-185, 2015.
[16] J. Noh, D. Yeom, C. Lim, H. Cha, J. Han, J. Kim, et al., "Scalability of roll-to-roll gravure-printed electrodes on plastic foils," IEEE Transactions on Electronics Packaging Manufacturing, vol. 33, pp. 275-283, 2010.
[17] J. Park, H. A. D. Nguyen, S. Park, J. Lee, B. Kim, and D. Lee, "Roll-to-roll gravure printed silver patterns to guarantee printability and functionality for mass production," Current Applied Physics, vol. 15, pp. 367-376, 2015.
[18] M. Bariya, Z. Shahpar, H. Park, J. Sun, Y. Jung, W. Gao, et al., "Roll-to-Roll Gravure Printed Electrochemical Sensors for Wearable and Medical Devices," ACS nano, vol. 12, pp. 6978-6987, 2018.
[19] R. A. Hayes and B. J. Feenstra, "Video-speed electronic paper based on electrowetting," Nature, vol. 425, p. 383, 2003.
[20] K. M. Charipar, N. A. Charipar, J. V. Bellemare, J. E. Peak, and A. Piqué, "Electrowetting displays utilizing bistable, multi-color pixels via laser processing," Journal of Display Technology, vol. 11, pp. 175-182, 2015.
[21] H. Zhang, Q. Yan, Q. Xu, C. Xiao, and X. Liang, "A sacrificial layer strategy for photolithography on highly hydrophobic surface and its application for electrowetting devices," Scientific reports, vol. 7, p. 3983, 2017.
[22] T. Jones, "Liquid dielectrophoresis on the microscale," Journal of Electrostatics, vol. 51, pp. 290-299, 2001.
[23] T. B. Jones, "On the relationship of dielectrophoresis and electrowetting," Langmuir, vol. 18, pp. 4437-4443, 2002.
[24] B. Wee, M. Kumemura, D. Collard, and H. Fujita, "Isolation of single dna molecule in a picolitre-sized droplet formed by liquid dielectrophoresis," in Proc. of the 12th Internation Conference on Miniaturized Systems for Life Sciences, 2008, pp. 12-16.
[25] C.-H. Chen, S.-L. Tsai, M.-K. Chen, and L.-S. Jang, "Effects of gap height, applied frequency, and fluid conductivity on minimum actuation voltage of electrowetting-on-dielectric and liquid dielectrophoresis," Sensors and Actuators B: Chemical, vol. 159, pp. 321-327, 2011.
[26] C.-H. Chen, S.-L. Tsai, and L.-S. Jang, "Droplet creation using liquid dielectrophoresis," Sensors and Actuators B: Chemical, vol. 142, pp. 369-376, 2009.
[27] G. McHale, C. Brown, M. Newton, G. Wells, and N. Sampara, "Dielectrowetting driven spreading of droplets," Physical review letters, vol. 107, p. 186101, 2011.
[28] K. N. Nampoothiri, V. Srinivasan, M. Bobji, and P. Sen, "Active thermal cooling using liquid dielectrophoresis," in Emerging Electronics (ICEE), 2016 3rd International Conference on, 2016, pp. 1-4.
[29] H. Geng, J. Feng, L. M. Stabryla, and S. K. Cho, "Droplet manipulations by dielectrowetting: Creating, transporting, splitting, and merging," in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017, pp. 113-116.
[30] D. Kim, Y. Park, D. Y. Lee, and S. K. Chung, "Dielectrowetting driven spatial light steering device for 3D optical applications," in Micro Electro Mechanical Systems (MEMS), 2018 IEEE, 2018, pp. 585-587.
[31] B. Berge, "Electrocapillarity and wetting of insulator films by water," Comptes Rendus De L Academie Des Sciences Serie Ii, vol. 317, pp. 157-163, 1993.
[32] A. Quinn, R. Sedev, and J. Ralston, "Contact angle saturation in electrowetting," The journal of physical chemistry B, vol. 109, pp. 6268-6275, 2005.
[33] C. G. Cooney, C.-Y. Chen, M. R. Emerling, A. Nadim, and J. D. Sterling, "Electrowetting droplet microfluidics on a single planar surface," Microfluidics and Nanofluidics, vol. 2, pp. 435-446, 2006.
[34] L. Landau and E. Lifshitz, "Electrodynamics of Continuous Media," pp. 64-69, 1960.
[35] J. Melcher, "A tutorial on induced electrohydrodynamic forces," ed: MIT, Cambridge, MA, 1968.
[36] A. Edwards, C. Brown, M. Newton, and G. McHale, "Dielectrowetting: The past, present and future," Current opinion in colloid & interface science, vol. 36, pp. 28-36, 2018.
[37] T. B. Jones, J. D. Fowler, Y. S. Chang, and C.-J. Kim, "Frequency-based relationship of electrowetting and dielectrophoretic liquid microactuation," Langmuir, vol. 19, pp. 7646-7651, 2003.
[38] K. Wang, T. Jones, and A. Raisanen, "Dynamic control of DEP actuation and droplet dispensing," Journal of Micromechanics and Microengineering, vol. 17, p. 76, 2006.