本論文主要研究藉由濺鍍製程製備金屬氧化物薄膜作為載子傳輸層應用於鈣鈦礦太陽能電池中。另外亦對無機鈣鈦礦太陽能電池中之主動層進行改良研究。
第一章節首先概述太陽能電池之發展與各世代太陽能電池之研究近況，並針對有機金屬混成鈣鈦礦與無機鈣鈦礦太陽能電池作簡介並回顧重要研究發表。
第二章節說明鈣鈦礦太陽能電池之工作原理、光電特性與元件結構，以及本論文元件之製備流程與量測方法。
第三章節研究氧化鎳作為電洞傳輸層於正結構鈣鈦礦太陽能電池之應用。首先探討濺鍍製程下之氧化鎳薄膜特性，並將濺鍍氧化鎳搭配溶液製程鈣鈦礦，條件優化後之元件效率表現最高達14.9%。而濺鍍氧化鎳搭配順序型真空蒸鍍製程鈣鈦礦之元件，因順序型真空蒸鍍法之反應條件對下層材料較敏感，條件未優化之最高效率表現達6.3%。另外將濺鍍氧化鎳、氧化鎳奈米顆粒、sol-gel製程氧化鎳搭配共蒸鍍無機鈣鈦礦，元件之效率表現皆低落，顯示共蒸鍍無機鈣鈦礦不適用於正結構元件，而於下一章節探討反結構元件。
第四章節以濺鍍法製備電子傳輸層應用於反結構鈣鈦礦太陽能電池中。其中濺鍍氧化鋅於共蒸鍍無機鈣鈦礦元件中，最高元件效率達12.2%，VOC達1.23 V。濺鍍IGZO於順序型真空蒸鍍鈣鈦礦元件中，元件效率達15.1%。
第五章節探討添加MAI、NH4I、NH4Br、HI、HBr等鹵化物於無機鈣鈦礦主動層中之薄膜特性與元件表現。

The thesis focuses on the topics of sputtered metal-oxides as carrier transporting layers in perovskite solar cells and the methods to improve the inorganic perovskite active layer.
The first chapter firstly tells the development of solar cells and the recent status quo of each generation solar cells. Then the organometallic and inorganic perovskite solar cells are introduced by reviewing the important literature.
The second chapter explicates the operation principle, photoelectric characteristics and device structures of perovskite solar cells. The device fabrication process and characteristics measurements are also described.
In the third chapter, NiOx as hole transporting layers in normal perovskite solar cells are studied. After tuning the characteristics of sputtered NiOx thin films, the devices with sputtered NiOx and solution processed perovskite exhibit the optimized power conversion efficiency (PCE) of 14.9%. The devices with sputtered NiOx and sequential vacuum deposited perovskite have the best PCE of only 6.3% because the reaction of sequential vacuum deposition is sensitive to the under layer. Besides, the devices fabricated with co-evaporated inorganic perovskite and sputtered NiOx, NiOx nanoparticles, or sol-gel processed NiOx all show low PCE, indicating that co-evaporated inorganic perovskite does not perform well with a p-i-n normal structure. Thus, the n-i-p inverted structure is utilized later and discussed in the next chapter.
The fourth chapter explores sputtered electron transporting layers (ETLs) for inverted perovskite solar cells. The devices with sputtered ZnO and co-evaporated inorganic perovskite show the optimized PCE of 12.2% and large open circuit voltage (VOC) of 1.23 V. The PCE of the devices with a sputtered IGZO ETL and a sequential vacuum deposited perovskite active layer achieves 15.1%.
The fifth chapter discusses how adding halides such as CH3NH3I, NH4I, NH4Br, HI, and HBr in the inorganic perovskite affects the characteristics of thin films and devices.

摘要 I
Abstract II
目錄 V
圖目錄 VIII
表目錄 XII
第1章 序論 1
1-1 前言 1
1-2 太陽能電池發展概述 3
1-3 有機金屬鈣鈦礦太陽能電池發展 8
1-4 無機鈣鈦礦太陽能電池發展 13
第2章 鈣鈦礦太陽能電池的工作原理與特性量測 15
2-1 太陽光頻譜 15
2-2 鈣鈦礦太陽能電池工作原理 17
2-3 鈣鈦礦太陽能電池光電特性 19
2-3.1 光電轉換效率 (power conversion efficiency, PCE) 19
2-3.2 開路電壓 (open circuit voltage, VOC) 20
2-3.3 短路電流密度 (short circuit current density, JSC) 20
2-3.4 外部量子效率 (external quantum efficiency, E.Q.E.) 20
2-3.5 填充因子 (fill factor, F.F.) 21
2-4 鈣鈦礦太陽能電池元件結構 22
2-4.1依元件型態分類 22
2-4.2 依載子傳輸方向分類 22
2-5 鈣鈦礦太陽能電池之製備與量測分析 23
2-5.1 有機材料之純化 23
2-5.2 元件製備 23
2-5.3 薄膜與元件量測 26
第3章 氧化鎳作為電洞傳輸層之正結構鈣鈦礦光伏元件 28
3-1 正結構元件之電洞傳輸層簡介 28
3-2 濺鍍氧化鎳薄膜之特性量測與分析 30
3-3 濺鍍氧化鎳作為電洞傳輸層之有機金屬鈣鈦礦光伏元件 39
3-3.1搭配溶液製程鈣鈦礦 40
3-3.2搭配順序型真空製程鈣鈦礦 46
3-4 氧化鎳作為電洞傳輸層之無機鈣鈦礦光伏元件 50
3-4.1 濺鍍氧化鎳 50
3-4.2 研磨氧化鎳奈米顆粒 53
3-4.3 Sol-Gel氧化鎳 56
3-5 結論 59
第4章 濺鍍電子傳輸層之反結構鈣鈦礦光伏元件 61
4-1 反結構元件之電子傳輸層簡介 61
4-2 濺鍍氧化鋅薄膜之特性量測與分析 63
4-3 濺鍍氧化鋅作為電子傳輸層之無機鈣鈦礦光伏元件 68
4-4 濺鍍IGZO搭配順序型真空製程鈣鈦礦光伏元件 77
4-5 結論 82
第5章 添加鹵化物於無機鈣鈦礦主動層之鈣鈦礦光伏元件 83
5-1 簡介 83
5-2 MAI 85
5-3 NH4I / NH4Br 87
5-3.1 NH4I 87
5-3.2 NH4Br 98
5-4 HI / HBr 104
5-5 結論 107
第6章 未來展望 108
參考文獻 109

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