本論文描述自旋與角解析光電子能譜(Spin- and Angle-Resolved Photoemission Spectroscopy, SARPES)實驗站之建立與設計性能測試，並以此系統量測近年來很受重視的過渡金屬二硫化合物(TMD)材料其中之一，二碲化鈀PdTe_2，完整量測在Γ ̅點附近PdTe_2內部的電子能帶以及拓樸表面態能帶之自旋結構，並以這些數據說明自旋量測的過程及多維度的數據處理與呈現方式。
實驗站架設於同步輻射中心TPS39A光束線，實驗系統以半球型分析儀加裝極低能量電子繞射(Very low energy electron diffraction, VLEED)電子自旋偵測器，量測電子能帶以及自旋結構為主，搭配薄膜長晶、表面晶體量測設備，建立一個多功能的實驗設備；未來實驗站將連接同步輻射中心的光束線，儀器可以擁有電子自旋解析、能量解析、角解析和元素解析的多重功能。
本實驗所量測的樣品為單晶PdTe_2，屬於二維過渡金屬二硫化合物。在近年來對此材料已有一些研究，這些研究證實此材料為第二類狄拉克半金屬，在1.7 K下具有超導特性，由於此材料內部塊材態的能帶反轉，使能帶上有三個分別在0.7 eV、1.1 eV、 1.7 eV自旋偏極化的表面態能帶，本次實驗藉由SARPES儀器完整量測此三個表面能帶之自旋結構，符合理論計算的結果。
在本次測量PdTe_2晶體的實驗中，我們最大化的利用目前系統的設備及環境，考慮儀器解析度、測量範圍、樣品生存時間下，量測結果足以解析表面的能帶自旋情況，並且在實驗數據的分析處理以及呈現上，有更進一步的認識。本次實驗對儀器參數的了解，對往後在使用SARPES系統上會有極大的幫助；目前實驗站的實驗系統，已經能夠完整量測自旋解析的電子能帶，本實驗站擁有台灣第一台的能帶電子自旋解析儀器，可以為材料物理之研究提供一個獨特的平台。

This thesis describes the design and the construction of the Spin- and Angle-Resolved Photoemission Spectroscopy(SARPES) Endstation for Taiwan Photon Source beamline 39A (TPS 39A) located National Synchrotron Radiation Center(NSRRC). The PdTe2 crystal we measured is one of the important class of new material called transition metal dichalcogenides(TMD). The PdTe2 is interesting due to the electronic band structure and the spin polarization of topological surface state at Γ ̅ point. Our experiment data of measuring the PdTe2 sample help to illustrate the analysis and the presentation of spin textures.
The main experimental instrument in TPS 39A Endstation is 200-mm-radius hemispherical analyzer. The analyzer called DA30 can measure 3D band structure without rotate the sample. The DA30 combines a Very low energy electron diffraction (VLEED) spin detector via transfer lens at the aperture near the 2D CCD detector. This is the first spin detector on the ARPES system in Taiwan to realize imaging of spin polarization band structure. The endstation also includes molecular beam epitaxy system low energy electron diffraction, etc. This equipment can prepare the sample and check the sample quality in ultrahigh vacuum.
The PdTe2 sample is one of 2D TMD material. For the past several years, several reports show the material is one of type-II Dirac semimetals and undergo superconductivity transition at 1.7 K. Because its band inversion property in the bulk material, there are three spin polarized surface band around the binding energy 0.7 eV、1.1 eV、 1.7 eV, respectively. In this study, we used the SARPES system directly measure the complete spin texture of the electronic band and the measurements are consistent with the theorical calculation.
In this experiment of measuring the PdTe2, we maximize the use of our current experiment environment and system device. Strike a balance between time for measurement and instrument resolution by choosing a suitable slit and aperture. We confirm the counts rate between ARPES, I0 and spin measure mode. The experiment data can distinguish the different spin polarized surface band. We get further understanding of SARPES system and the spin data analysis through this measurement. These valuable experiences can help that the future users quickly get familiar with SARPES system. TPS39A Endstation can already directly probe spin polarization electronic band and it provide a state-of-the-art technology for the research of material physics.

目錄 1
圖片目錄 3
第一章 簡介 6
1.1 動機 6
1.2 表面物理背景知識 7
1.2.1 晶格與倒晶格 7
1.2.2 材料表面與表面態 9
1.2.3 自旋軌道耦合 12
1.2.4 拓樸絕緣體 14
1.2.5 拓樸半金屬 16
1.3 PdTe2文獻回顧 17
第二章 實驗儀器和原理 21
2.1 系統概觀 21
2.2 超高真空系統 22
2.2.1 真空簡介 22
2.2.2 真空幫浦及氣壓計介紹 22
2.2.3 抽真空過程 27
2.2.4 殘餘氣體分析儀(Residual gas analysis) 28
2.3 薄膜長晶設備以及表面分析儀器 29
2.3.1 離子濺射槍(Sputter gun) 29
2.3.2 電子束蒸鍍槍(Electron beam evaporator) 30
2.3.3 膜厚儀(Thin-film thickness monitor) 30
2.3.4 低能量電子繞射(LEED) 31
2.3.5 歐傑電子能譜(Auger Electron Spectroscopy) 33
2.3.6 反射式高能量電子繞射(RHEED) 34
2.4 自旋暨角解析光電子能譜術(SARPES) 35
2.4.1 光電子能譜簡介 36
2.4.2 「三步驟模型」 38
2.4.3 ARPES儀器 41
2.4.4 電子自旋偵測器(Spin detector) 44
2.4.5 光源 49
第三章 SARPES實驗結果與討論 50
3.1 PdTe2樣品準備 50
3.2 SARPES量測結果與分析 52
3.2.1 ARPES量測PdTe2 52
3.2.2 SARPES測量及分析方法 54
3.2.3 PdTe2的自旋量測與分析 60
第四章 結論 66
參考資料 68

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