太陽能電池是一種吸收光並轉換成電流的元件，光進入元件中的比例越高，代表能產生的電流就越多，為了達成這個目的，能有效降低反射率的表面結構是不可或缺的要素。
在本論文中，我們使用噴砂與濕式蝕刻的方式在單晶矽上製作不同的表面結構，並在做完表面粗糙化之後藉由掃描式電子顯微鏡及反射率的量測來分析試片的表面結構以及表面反射率，之後再製作成太陽能電池並測量元件轉換效率。由掃描式電子顯微鏡的結果發現，經過噴砂處理的試片表面散佈著形狀不規則孔徑大小在1~5μm的孔洞，且噴砂角度60度的效果比30度的佳，而經過濕蝕刻的試片表面則是隨機分佈著寬1~5μm、高1~3μm的金字塔結構。反射率的量測結果顯示噴砂及濕蝕刻兩種方法都能有效降低表面反射率。測量元件的轉換效率所得到的結果為對照組的轉換效率在8~9%之間，濕蝕刻組的轉換效率在9~10%之間，與對照組相比有獲得提升，但噴砂組的轉換效率則是都在5%以下，與對照組相比反而是下降。經噴砂處理的元件效率不如預期高的可能原因有兩個：一、由於噴砂在試片表面留下的不規則形狀孔洞導致旋塗時，前驅物無法均勻分布在在試片表面上，因而造成熱處理時擴散的不均勻，使得形成元件之二極體接面深度不穩定，以及二、噴砂會在試片的表面留下鍵結缺陷，這些缺陷可能會在表面形成陷阱中心(trap center)或是在電極與半導體接面處形成介面陷阱(interface state trap)，導致表面複合率提升而造成元件效率下降。

The solar cell is used to convert photo energy into current power. Increasing the amounts of absorbed photons may lead to forming more excitons that would yield high energy conversion efficiency. Hence, a surface texture with a superior photon adsorption rate is crucial to a solar cell to yield high efficiency.
In this thesis, sandblasting and wet etching are used to modify the surfaces of single crystalline silicon wafers, and then all samples are further fabricated into solar cells. After surface modification, the characteristics of the textured samples are analyzed by SEM observation and surface reflectance measurement. The energy conversion efficiency of the solar cell devices is obtained via Oriel class A and Keithley 2400. The SEM observation results show that the sandblast-textured surfaces are covered by irregular pit-holes with different sizes, while the wet etching-textured one are distributed with 1~5μm width and 1~3μm height pyramids. The results of reflectance measurement approve that both sandblasting and wet etching methods can effectively reduce the surface reflectance of the samples. The final device performances of the wet etching-textured ones yield 9~10% energy conversion efficiency, which is superior to that of controlled ones, i.e., 8~9%, as expected. However, that with sandblast-textured ones only show less 5% efficiency. The unexpected result may attribute to the generation of surface trap centers during the sandblaster process.

摘要 i
Abstract ii
目錄 iii
第1章 緒論 1
1.1 研究背景與動機 1
1.2 論文架構 6
第2章 相關理論基礎 7
2.1 太陽能電池簡介 7
2.2 太陽能電池的特性參數 9
2.2.1 短路電流 9
2.2.2 開路電壓 9
2.2.3 最大輸出功率 10
2.2.4 填充因子 10
2.2.5 能量轉換效率 10
2.2.6 量子效率 11
2.3 串聯電阻與並聯電阻 11
2.4 太陽能電池的效率 12
2.5 改善元件效率的方法 13
2.5.1 材料的選擇 13
2.5.2 吸收效率 13
2.5.3 減少反射 13
2.5.4 表面鈍化 15
2.6 大氣質量與標準光源 15
第3章 實驗 17
3.1 步驟與流程 17
3.2 表面粗糙化 19
3.2.1 噴砂 19
3.2.2 TMAH蝕刻 21
3.3 擴散 23
3.4 沉積電極 24
3.5 元件量測 25
3.5.1 太陽光模擬系統 25
3.5.2 二極體相關參數萃取 26
第4章 實驗結果 28
4.1 完成品元件照片 28
4.1.1 電極尺寸 28
4.1.2 試片編號規則 30
4.2 表面粗糙程度 30
4.3 反射率 33
4.4 外部量子效率 34
4.5 輸出特性 34
4.5.1 太陽光模擬系統 34
4.5.2 量測結果 35
4.5.3 輸出特性結果討論 59
第5章 結論 63
參考文獻 64

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