失效模式與效應分析(failure mode and effects analysis, FMEA)是IATF16949技術規範要求的五大核心工具之一，是一種用來分析風險的方法，不僅是可以用於生產領域，也可以用在非生產領域。FMEA強調事前預防並非事後補救，是半導體產業普遍使用的風險管理工具。

本研究以半導體製造廠化學汽相層積機台(CVD)為例，說明如何運用專案管理五大流程--IPECC，即啟動(I)、規劃(P)、執行(E)、監視與控制(C)、結案(C)，來導入設備失效模式與效應分析(Machinery Failure Mode & Effect Analysis, MFMEA)。本研究以一架構來規劃整體活動，可確保在既定的成本下，按照擬定的進度和現有執行能力的限制來達成任務。

透過本研究的經驗發現，運用失效模式與效應分析作為設備風險管理工具，能夠有系統性的分析機台在使用中所造成的失效風險，亦能作為工廠知識管理工具。個案公司經導入MFMEA後，停機發生率年平均由1.45%下降至1.11%，而產品良率由98.77%提升至99.08%，在MFMEA持續活化下，效益會再持續的增長。

Failure Mode and Effect Analysis (FMEA) is one of five core tools required by IATF16949 technical specification and is a method used to analyze risks. It is not only applied to the field of production, but also used in the non-production field. FMEA emphasizes the beforehand preventing but not remedy after the event, which is a common risk management tool used in the semiconductor industry.
This study took the chemical vapor deposition (CVD) machine of a semiconductor manufacturing plant as an example to illustrate how to use five major processes in project management --IPECC, namely, initiating (I), planning (P), executing (E), controlling (C) and closing (C), so as to input the Machinery failure mode and effect analysis (MFMEA). This study planed the whole activity in order to ensure that the task was achieved according to the planned progress and the limitation of the existing execution capability under the established cost.
Through the experience of this study, it was found that FMEA used as a tool for equipment risk management can systematically analyze the failure risk caused by the machine in use, and can also be used as a tool for factory knowledge management. After the case company imported the MFMEA, the average rate of downtime decreased from 1.45% to 1.11% and the product yield increased from 98.77% to 99.08%. Under the continuous activation of MFMEA, the benefits would continue to rise.

摘要 ...............................................................I
Abstract...........................................................II
誌謝...............................................................III
目錄….............................................................IV
圖目錄.............................................................VI
表目錄.............................................................VII
第一章 緒論..........................................................1
1.1 研究背景.....................................................1
1.2 研究動機 ....................................................1
1.3 研究目的.....................................................2
1.4 研究架構 ....................................................2
第二章 文獻探討 .....................................................4
2.1 矽晶圓材料.......................................................4
2.1.1 磊晶生長設備...........................................5
2.1.2 薄膜沉積原理...........................................8
2.2 專案管理.................................................9
2.3 失效模式與效應分析.......................................11
2.2.1 歷史沿革..............................................11
2.2.2 文獻回顧..............................................12
第三章 MFMEA.......................................................15
3.1 MFMEA規劃階段...............................................16
3.2 MFMEA表單填寫...............................................18
3.3 風險等級....................................................19
3.4 維護與持續改善...............................................20
第四章 個案研究.....................................................25
4.1 個案背景....................................................25
4.2 問題分析....................................................26
4.3 運用專案管理手法導入MFMEA.....................................27
4.3.1 專案啟動..............................................27
4.3.2 專案規劃..............................................29
4.3.3 專案執行..............................................32
4.3.4 專案監控與查核.........................................39
4.3.5 專案結束..............................................39
4.3.6 MFMEA的活化...........................................39
4.4 個案效益評估................................................40
4.4.1 有形效益..............................................40
4.4.2 無形價值..............................................41
第五章 結論........................................................44
5.1 研究結論.......................................................44
5.2 未來研究.......................................................45
參考文獻............................................................47

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