本研究之目的為提升電容式觸覺感測器之靈敏度(Sensitivity)，並透過對聚二甲基矽氧烷 (PDMS)主劑及固化劑之比例調變，進而造成楊氏係數及剛性之弱化而達到靈敏度之提升。
本研究發現當主劑及固化劑比例為25:1之元件，在正向力為1 N施力下有3.1465 pF之電容改變量，相對於比例為10:1之元件靈敏度有217.5%的提升；而在剪力為0°且施力1 N的作用下比例25:1製作之感測器有最少1.354 pF之電容改變量，相較於10:1比例製作之感測器有594.4% 之靈敏度提升。從結果可知藉由PDMS主劑比例之增加，可以為電容式觸覺感測器之靈敏度帶來極大的提升。

The main purpose of this study is to improve the sensitivity of the offset capacitive tactile sensor and enhance the performance of the sensor. In this study, we adjust the ratio of the main agent A and hardener agent B of polydimethylsiloxane (PDMS) to obtain lower elastic strength in terms of Young’s modulus, and in turn increase the sensitivity of the tactile sensor.
According to this research, we found that with the ratio of A/B, ratio of 25:1 comes with a capacitance change of 3.1465 pF under 1 N normal force. Its’ sensitivity is 2.17 times larger than the sensor produced with A/B of ratio 10:1. When the sensor with A/B ratio of 25:1 goes under 0° and 1 N shear force, it shows at least 1.354 pF capacitance change, the sensitivity is 5.94 times larger than that the A/B ratio of 10:1 sensor. According to this proposal, the sensitivity of the tactile sensor has significantly improved.

目錄
摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
表目錄 X
符號表 XI
第一章 緒論 1
1.1 前言 1
1.2 研究動機 3
1.3 文獻回顧 3
第二章 理論與設計 11
2.1 平行電容板之推導 11
2.1.1 單一介電材質之電容值推導 11
2.1.2 多介電材質之電容值推導 12
2.2 觸覺感測之設計 13
2.3 感測靈敏度 14
2.4 角度演算法 15
2.5 模擬分析 18
2.5.1 不同楊氏係數正向力模擬結果 18
2.5.2 剪力模擬結果 19
第三章 實作 34
3.1 元件製作說明 34
3.2 元件製程步驟 34
3.2.1 電極製作 36
3.2.2 PDMS支撐層結構製作 37
3.3 Dog-bone拉伸試片製作 39
3.4 實驗平台 40
第四章 研究結果與討論 52
4.1 Dog-bone拉伸試驗結果 52
4.2 正向力量測結果 52
4.3 剪力量測結果 53
第五章 結論與未來展望 69
5.1 結論 69
5.2 未來展望 70
參考文獻 71

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