表面聲波式surface acoustic wave (SAW) 氣體感測器為一種極具高靈敏度之氣體感測器，適用於低濃度之氣體偵測。本研究中表面聲波式氣體感測器以128°YX-LiNbO3為壓電材料以及Au為電極與感測區，將不同的高分子材料塗佈在感測區上，結合起振電路可得到中心頻率113-114MHz的表面聲波。利用不同高分子材料的特性，所吸附之揮發性有機化合物(Volatile Organic Compounds, VOCs)會有所不同，頻率飄移下降量也會有所差異。藉此聯用四個塗佈不同高分子之表面聲波式晶片同時進行量測，結合TD-GC-MS聯用系統比對奇異果成熟度及有機揮發物之種類與濃度的變化，進而觀察奇異果不同時期之氣味的變化並建立一個完整的數據資料庫。在TD-GC-MS量測結果可得知當奇異果開始成熟時，會伴隨著酯類的大量出現，而隨著熟成天數的增加醇類、酸類、烯類也會開始出現，而在過熟的階段，醇類及酯類的濃度皆會大量增加且種類數量有增加的現象。因此，在感測器之高分子的選用上，則以低極性之聚苯乙烯(PS)及含氟聚合物(CYTOP)來作為酯類之吸附材料；並利用聚乙烯醇(PVA)、聚乙烯醇縮丁醛(PVB) 及N-乙烯基吡咯烷酮(PNVP)作為醇類及酸類之吸附材料。在本研究中可以4-ports陣列式氣體感測器有效的判別奇異果熟成過程中的氣味改變，其中塗佈PVA薄膜之晶片在未熟到成熟時有2510赫茲的變化，成熟到過熟有4572赫茲的變化量，最適合用來偵測奇異果熟成度。未來將尋找專一性較高之高分子材料以提高實驗之分辨率，為首要研究目標。

Surface acoustic wave (SAW) gas sensor is a highly sensitive gas sensor which act high performance of low-concentration gas. In terms of SAW gas sensor, gold interdigital transducers and sensing area are deposited on the 128° YX- LiNbO3 wafer. With various polymer coating on sensing area and connecting to oscillator circuit, 113-114 MHz SAW can be obtained by the frequency counter. Due to the properties of different polymers, the frequency shift differs from the absorption of volatile organic compounds (VOCs). In this research, thermal desorption gas chromatography–mass spectrometry (TD-GC-MS) system has been used for analyzing kiwi fruit VOCs at differ stage. Comparing to the result between 4 port SAW gas sensor system and TD-GC-MS system, the database can be built up and distinguish the kiwi odor during ripeness. With the result of TD-GC-MS, esters are accompanied by kiwi ripeness. With kiwi ripening development, alcohol, alkene, acid concentration will increase. Furthermore, there are numerous alcohol and ester increase at over-ripened stage. As the result, polystyrene (PS) and fluoropolymer (CYTOP), polymers which play the role of sensing material are chosen to be major material to determine the ester development. Moreover, Polyvinyl alcohol (PVA), Poly-vinyl butyral (PVB) and N-vinylpyrrolidone (PNVP) are used to trap alcohol, alkene and acid during kiwifruit over-ripened period. In this research, 4-ports SAW gas sensor effectively discriminates the odor change during the kiwifruit ripening process. Device coated PVA film is most suitable for identifying kiwifruit freshness which has 2510 Hz change from un-ripened to ripened stage, and ripened to over-ripened stage with a change of 4572 Hz. In the future, finding out other polymer membrane to improve the selectivity of this system is the main purpose.

摘要 i
Abstract ii
圖目錄 v
表目錄 viii
1. 緒論 1
1.1前言 1
1.2研究動機 2
1.3論文架構 3
2. 文獻回顧 4
2.1氣體分析法 4
2.1.1 PTR-MS 4
2.1.2 FTIR 5
2.1.3 FID 6
2.1.4 GC-MS 7
2.2 利用GC-MS分析奇異果氣味之相關文獻 11
2.4氣體感測器種類 13
2.4.1半導體氣體感測器(Metal oxide semiconductor gas sensor) 13
2.4.2電化學氣體感測器(electrochemical gas sensor) 14
2.4.3光離子化偵測器 15
2.4.4 觸媒燃燒式氣體感測器(Catalytic combustion gas sensor) 15
2.4.5表面聲波氣體感測器 16
2.4.6各種電子鼻之比較 24
2.5利用電子鼻系統偵測奇異果成熟度之相關文獻 26
3. 實驗裝置與實驗設計 28
3.1 GC-MS 28
3.1.1 採樣管介紹與校正 (Conditioning) 29
3.1.2實驗參數設計 30
3.1.3樣品採樣 31
3.1.4數據分析 33
3.2表面聲波感測器量測系統與環境 35
3.2.1表面聲波感測晶片製備與設計 35
3.2.2振盪電路設計 43
3.2.3塗佈感測薄膜 46
3.2.4實驗所用之儀器與裝置 50
3.2.5感測腔體設計 53
3.2.6整體量測系統與環境 57
4. 實驗結果 59
4.1 TD-GC-MS背景雜訊檢測 59
4.2 TD-GC-MS檢測奇異果氣味 60
4.3表面聲波感測器穩定性測試 69
4.4濕度對表面聲波感測器之影響 72
4.5表面聲波感測器檢測奇異果新鮮度 77
5. 結論與未來展望 92
參考文獻 93

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