本論文探討並開發了藉由光電效應產生大彎曲角度的非機械光束偏轉器。所提出的系統在建造和操作過程中創新地使用現有的波導技術和微機電系統（MEMS）製造技術。我們透過改變光電介質中的折射率來造成光束偏轉；透過改變施加的電場大小，造成入射光束的傳播方向的改變。本論文提出了電光束偏轉器並總結了光電耦合器和稜鏡耦合器兩種方法的開發和結果。我們將討論掃描設備開發和建造的參數設計及掃瞄元件的基礎光學性能。掃描設備元件的成功開發將重新定義圖像顯示的最新技術，因為它將促成低成本及高分辨率光學顯示器與現有直徑小於5毫米的CMOS技術之整合。

The thesis describes the development of a non-mechanical optical beam deflector capable of creating a large bending angle using electro-optic effect. The proposed system makes innovative use of existing waveguide technology and microelectromechanical system (MEMS) fabrication techniques in construction and operation. In our approach, beam deflection is achieved by altering the index of refraction in an electro-optic medium; by changing the applied electric field, the propagation direction of incident light beams is altered. This report summarizes the development and results of two approaches, grating coupler and prism coupler, to our proposed electro-optical beam deflector. We will discuss the parametric design, fabrication and initial optical performance of the scanning devices. The successful development of the scanning device will redefine state-of-the-art for image display, as it will lead to low-cost high resolution optical display that can integrate with existing CMOS technology with overall dimension of less than 5x5 mm2.

摘要 I
Abstract II
Acknowledgments III
Table of Content IV
List of Tables VI
List of Figures VIII
Chapter 1. Introduction 1
Chapter 2. Beam Deflection Design 5
2.1. Electro-Optic Effect 5
2.2. Grating Coupler 6
2.3. Comb Grating Design 12
2.4. Deflection Angle as a Function of Grating Period and Applied Voltage 14
2.5. Slab Waveguide Design 15
2.6. Prism Coupler 16
Chapter 3. Deflector Fabrication 19
3.1.1 Wafer Cleaning 21
3.1.2. Electrode Deposition 21
3.1.3. PZT Waveguide 23
3.1.4. Electronic-Beam Lithography 29
3.1.5. Focus Ion Beam 51
3.2. Polydimethylsiloxane (PDMS) Prism 59
Chapter 4. Experiment Results and Discussion 64
4.1. Optical Experiment Setup 64
4.2. Polymer Prism and Grating Couplers 65
4.3. Light Coupling Using PZT Grating Coupler 67
4.3.1. Light Block 68
4.4. Light Propagation Inside PZT Waveguide 73
4.4. Coupling Test with PZT Electrode Grating 80
4.5. Prism Coupling on PZT Waveguide 86
4.6. Summary 88
Chapter 5. Future Work 89
Appendix 91
Lift Off with Ultrasonicator Process 91
Spin Coater 91
Scanning Electron Microscopy 92
Electron Beam Lithography System 93
Inductively Coupled Plasma (ICP) Process 95
Electron Beam Deposition (E-GUN) Process 95
Laser System 96
Contact Information 98
Reference 100

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