近年來隨著半導體技術的發展，處理器的運算速度有了大幅度的提升，人們對過去無法處理的龐大資訊開始有極大的興趣，任何我們生活所及事物，從健康、交通、再到購物習慣等，都可以分類成一筆筆的資料，不僅如此，在這樣的氛圍下這個概念被延伸到許多面向，工業的智慧化也因此而生，例如只要能隨時蒐集加工時的資訊，就可以掌握加工品質，而本研究將著力於應用在工具機振動感測之加速度計的設計與製作，有別於以往應用於消費電子的加速度計，工業用加速度計需要有高頻寬、高解析度的特性；在此，本研究將以SOI電容式加速度計來實現所需之規格，而電容式相較於其他形式的感測方式，具有功耗較低、對直流訊號有反應等特點。電容式加速度計的性能與其讀取電路有很大的關聯性，由於輸出運動訊號微弱，因此如何減少雜訊、增加靈敏度為設計的準則，本研究以連續時間式讀取電路得到應用於兩種不同頻率之加速度感測器，分別為共振頻5 kHz，靈敏度為245 mV/g，解析度為475.7 μg/√Hz，以及共振頻15 kHz，靈敏度為30.4 mV/g，解析度為2.06 mg/√Hz之性能表現，並完成完整的理論計算分析。

With the advancement of semiconductor technology in past decades, the computing power has been greatly improved. Therefore, the use of abundant information from our living environment becomes feasible. Anything we experience, such as health, traffic, shopping habits, etc. could be “raw data” which potentially can be transformed into “beneficial information”. Furthermore, collection and implementation of the data has been developed into different fields, such as intelligence industry. For example, if the information of machining process could be collected in timely manner, one can estimate or even enhance the machining quality. Different from commercial accelerometers, industrial grade accelerometers need to feature wide bandwidth and high resolution. In this work, an SOI capacitive accelerometer has been developed with low power consumption as well as with functionality in low frequency range. The performance of capacitive accelerometers is significantly affected by readout circuit design due to their very weak output of motion signal from MEMS transducers. As a result, how to reduce noise and increase sensitivity is of paramount importance. In this work, the self-developed accelerometer reaches resonance frequency 5 kHz, sensitivity of 245 mV/g and resolution of 475.7 μg/√Hz, while for different frequency, there is also a self-developed accelerometer with resonance frequency of 15 kHz, sensitivity of 30.4 mV/g, and resolution of 2.06 mg/√Hz. Furthermore, the system-level theoretical analysis is also been conducted.

摘要 i
目錄 iv
圖目錄 vi
表目錄 x
第一章 前言 1
1-1研究動機與背景 1
1-2文獻回顧 4
1-2-1微機電加速度計製程考量與設計 4
1-2-2電容式加速度計讀取電路 10
第二章 電容式加速度計設計 14
2-1 電容式加速度計操作原理 14
2-2 電容式加速度計設計考量 16
2-3 元件結構設計與模擬 17
第三章 電容式加速度計讀取電路設計 23
3-1 讀取電路架構 23
3-1-1連續時間式讀取電路 23
3-1-2離散時間式讀取電路 27
3-2 讀取電路設計模擬與非理想效應分析 29
第四章 電容式加速度計製程步驟與結果 35
4-1 元件之製程流程 35
4-2製程瓶頸與解決方法 40
4-2-1硬擋層之選擇 40
4-2-2蝕刻之負載效應 46
4-2-3沾黏現象 46
第五章 元件之量測與討論 50
5-1 加速度計量測 50
5-1-1量測架設 50
5-1-2 讀取電路量測結果 51
5-1-3 電容式加速度計結構電容非對稱性量測 56
5-1-4 電容式加速度計與讀取電路量測結果與分析 57
5-2 電容式加速度計系統雜訊分析 62
第六章 結論與未來工作 69
參考資料 72

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