奈米3D微影技術，是改善雙光子聚合技術而成的一項立體微影技術，聚焦光點可小至奈米等級到大至微米等級，而且可經由放大聚焦光點來減少結構在製程中的曝光路徑來大幅縮短製程時間。
正光阻是一種特殊的光敏感材料，在特定波長的光照下高分子鏈會裂解，使得高分子鏈分解成小分子，這些小分子在特殊的顯影液環境中會溶解，從而被去除，留下未曝光部位的光阻。
羧甲基纖維素（英文：Carboxy-methyl Cellulose，簡稱CMC）是一種常用的食品添加劑，很容易溶解在水中，不溶於有機溶劑，溶解後會變成有粘性的液體，不過粘性會因為溫度的上升而下降。利用這個溶解特性用作分離層，達到結構與基板分離的目的。
本論文採用CMC薄膜分離技術，先在玻璃基板上懸塗CMC糖分子層，在懸塗光阻層，進行曝光結構製作。之後顯影洗去CMC薄膜層，使結構從玻璃基板上完整脫落。進行後續研究與應用。

Nano 3D lithography technology is a stereo lithography technology that improves the two-photon polymerization technology. The focused spot can be as small as nanometer to as large as micron. Significantly reduce process time by amplifying the focused spot to reduce the exposure path of the structure during the process.
Positive photoresist is a special light-sensitive material. Under certain light, the polymer chain will be cracked, and the polymer chain will be decomposed into small molecules. These small molecules will be dissolved in a special developer environment, and thus removed, positive photoresist. There are a wide range of important applications in the fabrication of semiconductors.
Carboxy-methyl Cellulose, (CMC for short) is a commonly used food additive, it is easily dissolved in water，but they are insoluble in organic solvents. It dissolves into a viscous liquid, but the viscosity drops as the temperature rises. Use this dissolution property as a separation layer to achieve separation of structure from substrate.
In this thesis, the CMC film separation technology was used to suspend the CMC sugar molecular layer on the glass substrate, and the suspension structure was coated on the photoresist layer. Thereafter, the CMC film layer is removed by development to completely detach the structure from the glass substrate. Carry out follow-up research and application.

目錄
摘要 i
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.2.1目前TPP技術發展與應用 2
1.2.2光阻特性與應用 3
1.2.3 CMC薄膜分離技術 5
1.3 研究動機與目的 6
1.4 論文架構 6
第二章 研究方法 8
2.1 奈米3D微影系統 8
2.2 光阻材料 9
2.3 試片準備 10
2.4 實驗設備 12
第三章 基礎特性實驗 13
3.1 實驗流程 13
3.2 CMC薄膜分離實驗 15
3.2.1 CMC薄膜層製作 15
3.2.2 CMC薄膜分離初步測試 16
3.3 曝光參數實驗 16
3.3.1 光點對焦面的尋找與確定 16
3.3.2 軟烤步驟對對焦面光點的影響 18
3.3.3 曝後烤步驟對結構顯影的影響 19
3.3.4 平面參數實驗—線寬參數以及offsetY參數的確定 19
第四章 結構加工實驗 22
4.1 目標結構之設計與參數確定 22
4.2 結構初步製作 23
4.3 結構製作之改進方法—殼層法 27
第五章 實驗結果與未來計畫 31
5.1 實驗結果及分析 31
5.2 目前缺陷以及未來工作 31
5.2.1目前缺陷 31
5.2.2 未來工作 31
第六章 參考文獻 32

[1] Pret, Alessandro Vaglio, et al. "2D and 3D photoresist line roughness characterization." Microelectronic Engineering 110 (2013): 100-107.
[2] Kurihara, M., et al. "3D laser lithography combined with Parylene coating for the rapid fabrication of 3D microstructures." Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. IEEE, 2012.
[3] Cumpston, B.H., et al., Two photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature, 1999. 398: p. 51-54
[4] Borisov, R.A., et al., Fabrication of three-dimensional periodic microstructures by means of two-photon polymerization. Appl. Phys., 1998. 67: p. 765-767.
[5] Sun, H.B., S. Matsuo, and H. Misawa, Three-dimensional photonic crystal structures achieved with two-photonabsorption photopolymerization of resin. Appl. Phys. Lett., 1999. 74: p. 786-788.
[6] Obata, Kotaro, and Boris N. Chichkov. "Advanced Femtosecond Laser Micro/Nanostructuring using Phase Modulation Technique." International Journal of Optomechatronics 7.4 (2013): 296-303.
[7] Ovsianikov, Aleksandr, and Boris N. Chichkov. "Two-Photon Polymerization–High Resolution 3D Laser Technology and Its Applications." Nanoelectronics and Photonics. Springer New York, 2008. 427-446.
[8] Raimondi, Manuela T., et al. "Two-photon laser polymerization: from fundamentals to biomedical application in tissue engineering and regenerative medicine." J Appl Biomater Biomech 10.1 (2012): 55-65.
[9] Schlie, Sabrina, et al. "Three-dimensional cell growth on structures fabricated from ORMOCER® by two-photon polymerization technique." Journal of Biomaterials Applications 22.3 (2007): 275-287.
[10] Gissibl, Timo, et al. "Two-photon direct laser writing of ultracompact multi-lens objectives." Nature Photonics 10.8 (2016): 554-560.
[11] Najam, Muhammad Tallal Bin, Khalid Mahmood Arif, and Yong-Gu Lee. "Novel method for laser focal point positioning on the cover slip for TPP-based microfabrication and detection of the cured structure under optical microscope." Applied Physics B 111.1 (2013): 141-147.
[12] Koroleva, Anastasia, et al. "Fabrication of fibrin scaffolds with controlled microscale architecture by a two-photon polymerization–micromolding technique." Biofabrication 4.1 (2012): 015001.
[13] Infuehr, Robert, et al. "Functional polymers by two-photon 3D lithography." Applied Surface Science 254.4 (2007): 836-840.