近年來隨著自動駕駛車的興起，促使先進駕駛輔助系統(ADAS)蓬勃發展，而光達即是扮演自動駕駛車眼睛的角色，具有測量距離遠及高精度空間解析度的能力。本研究著重於開發製程整合微透鏡之光達掃描平台，使用半導體製程製作MEMS致動器與光學相位陣列(OPA)光電元件相互整合，達到空間三維掃描的能力。相較於一般光學微平台，通常在製作透鏡時有組裝上的問題，此篇在製程間製作二相位Fresnel lens於掃描平台上，具有繞射聚焦及光束調控的效果，並透過彈簧設計及頻率控制將MEMS掃描平台制動於共振頻上，放大位移量輸出，使雷射光掃描時能有較大的範圍。
目前設計之元件在驅動電壓15V下，在同平面能有大於±20μm的位移量，而雷射光有±6.84°(f=100μm)及±2.29°(f=500μm)的偏轉角度。

With the rise of autonomous and electric vehicles, advanced driver assistance system (ADAS) is thriving. LiDAR is playing the role of the eyes, with the ability to measure distance and high-precision spatial resolution. This research focuses on the development of integrated micro-lenses for optical microscopy, and uses the semiconductor process and optical phase array (OPA) optoelectronic components to achieve the capability of 3D space scanning. Compared with the general optical micro-platform, usually in the production of lenses have the assembly issues. This article makes the Fresnel lens, with the diffraction focus and beam steering effect, on the scanning platform during process. Through the spring design and frequency control, this study operates the MEMS scanning platform on the resonance frequency to enlarge the displacement output so that the laser scanning can have a larger range.
Currently devices can have a displacement greater than ± 20 μm in in-plane direction at a driving voltage of 15 V, while 1550nm laser light has a deflection angle of ± 6.84° (f=100 μm) and ± 2.29° (f=500 μm).

目錄
摘要 I
Abstract II
致謝 III
目錄 V
圖目錄 VIII
表目錄 XIII
第一章 緒論 1
1-1. 前言 1
1-2. 文獻回顧 5
1-2-1. 微致動器 6
1-2-2. 微光學元件 12
1-2-3. 光束調控微掃描平台 14
1-3. 研究動機 16
1-4. 全文架構 17
第二章 元件之設計與模擬 36
2-1. 元件設計分析 36
2-1-1. 梳狀電極致動器運作原理 37
2-1-2. 彈簧設計 39
2-1-3. 機械共振現象 42
2-1-4. Fresnel lens 44
2-2. 元件模擬分析 46
2-2-1. 靜態模擬 46
2-2-2. 動態模擬 47
2-2-3. 梳狀電極間靜電力及空氣阻尼模擬 48
第三章 元件製程流程與結果 61
3-1. 光罩設計 61
3-2. 製程流程步驟 63
3-3. 製程結果 66
第四章 元件量測結果與討論 80
4-1. 機械特性量測 80
4-1-1. 表面形貌量測 80
4-1-2. 結構共振頻率量測 81
4-1-3. 結構位移量量測 83
4-2. 光學特性量測 84
4-2-1. 聚焦能力測試 84
4-2-2. 光束調控能力測試 85
4-2-3. 光束偏轉角度量測 86
第五章 結論與未來工作 95
5-1. 結論 95
5-2. 未來工作 96
5-2-1. Fresnel lens 聚焦深度及透射光強度量測 96
5-2-2. 抗反射層(Anti-reflection layer) 98
5-2-3. 接合組裝 99
參考文獻 103

[1] https://en.wikipedia.org/wiki/Lidar
[2]http://www.wikiwand.com/ja/%E5%85%89%E6%B3%A2%E6%B8%AC%E8%B7%9D%E5%84%80
[3] https://www.xactsense.com/
[4] https://www.solomon.com.tw/
[5] https://waymo.com/
[6] https://www.tesla.com/zh_TW/models
[7] http://www.yole.fr/index.aspx
[8]http://delphi.com/media/featurestories/Details/Split%20Second%20Decisions
[9] http://www.velodynelidar.com/
[10] http://quanergy.com/
[11] https://leddartech.com/
[12] H. C. Nathanson, W. E. Newell, R. A. Wickstrom and J. R. Davis, "The resonant gate transistor," in IEEE Transactions on Electron Devices, vol. 14, no. 3, 1967, pp. 117-133.
[13] W. C. Tang, T. C. H. Nguyen and R. T. Howe, "Laterally driven polysilicon resonant microstructures," Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE, Salt Lake City, UT, 1989, pp. 53-59.
[14] R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek. "Comb-drive actuators for large displacements." Journal of Micromechanics and Microengineering, vol. 6, no. 3, 1996, pp.320-329.
[15] J. B. C. Engelen, M. A. Lantz, H. E. Rothuizen, L. Abelmann and M. C. Elwenspoek, "Improved performance of large stroke comb-drive actuators by using a stepped finger shape," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, CO, 2009, pp. 1762-1765.
[16] G. Zhou, and P. Dowd. "Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators." Journal of Micromechanics and Microengineering, vol. 13, no. 2, 2002, pp.178-183.
[17] J. D. Grade, H. Jerman and T. W. Kenny, "Design of large deflection electrostatic actuators," in Journal of Microelectromechanical Systems, vol. 12, no. 3, 2003, pp. 335-343.
[18] L. K. Lagorce, O. Brand and M. G. Allen, "Magnetic microactuators based on polymer magnets," in Journal of Microelectromechanical Systems, vol. 8, no. 1, 1999, pp. 2-9.
[19] M. Feldmann and S. Buttgenbach, "Novel Microrobots and Micromotors Using Lorentz Force Driven Linear Microactuators Based on Polymer Magnets," in IEEE Transactions on Magnetics, vol. 43, no. 10, 2007, pp. 3891-3895.
[20] A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague and R. Sprague, "Two-axis electromagnetic microscanner for high resolution displays," in Journal of Microelectromechanical Systems, vol. 15, no. 4, 2006, pp. 786-794.
[21] W. Riethmuller and W. Benecke, "Thermally excited silicon microactuators," in IEEE Transactions on Electron Devices, vol. 35, no. 6, 1988, pp. 758-763.
[22] H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. Laudon and E. G. Lovell, "Thermo-magnetic metal flexure actuators," Technical Digest IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1992, pp. 73-75.
[23] L. Que, J. S. Park and Y. B. Gianchandani, "Bent-beam electro-thermal actuators for high force applications," Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), Orlando, FL, USA, 1999, pp. 31-36.
[24] W. C. Chen, C. C. Chu, J. Hsieh, and W. Fang, “A Reliable Single-layer Out-of-plane Micromachined Thermal Actuator,” Sensors and Actuators A(Physical), vol.103, 2003, pp. 48-58.
[25] D. L. DeVoe and A. P. Pisano, "Modeling and optimal design of piezoelectric cantilever microactuators," in Journal of Microelectromechanical Systems, vol. 6, no. 3, 1997, pp. 266-270.
[26] A. Schroth, C. Lee, S. Matsumoto, M. Tanaka and R. Maeda, "Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners," Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176, Heidelberg, 1998, pp. 402-407.
[27] M. Tani, M. Akamatsu, Y. Yasuda and H. Toshiyoshi, "A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), Hyogo, 2007, pp. 699-702.
[28] K. Y. Hung, Tseng, F. G., & Chou, H. P., “Application of 3D gray mask for the fabrication of curved SU-8 structure,’ Microsystem technologies, vol.11, Issue4-5, 2005, pp. 365-369.
[29] S. Kwon and L. P. Lee, "Stacked two dimensional micro-lens scanner for micro confocal imaging array," Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), Las Vegas, NV, USA, 2002, pp. 483-486.
[30] S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, K. Chun, "Fabricaton of PDMS microlens for LIF detection," Digest of Papers Microprocesses and Nanotechnology 2005, 2005, pp. 206-207.
[31] S. Sinzinger, and J. Jahns, Microoptics, 2 ed.:Wiley-VCH, 2003
[32] http://www.fuff.org/interference/
[33] Y. Zhang, H. An, D. Zhang, G. Cui, and X. Ruan, “Diffraction theory of high numerical aperture subwavelength circular binary phase Fresnel zone plate,” Optics express, Vol. 22, Issue 22, 2014, pp. 27425-27436.
[34] E. A. Watson; L. J. Barnes, "Optical design considerations for agile beam steering" Laser beam propagation and control, Vol. 2120, 1994, pp.186-193.
[35]A. Tuantranont, V. M. Bright, J. Zhang, W. Zhang, J. A. Neff, Y. C. Lee, “Optical beam steering using MEMS-controllable microlens array,” Sensors and Actuators A: Physical, Vol. 91, Issue 3, 2001, pp. 363-372.
[36] H. Karin, et al. "MEMS-based VCSEL beam steering using replicated polymer diffractive lens." Sensors and Actuators A: Physical , Vol.142, Issue 1 , 2008, pp. 336-345.
[37] J. B. Chou, N. Quack and M. C. Wu, "Integrated VCSEL-Microlens Scanner With Large Scan Range," in Journal of Microelectromechanical Systems, vol. 23, no. 6, 2014, pp. 1471-1476.
[38] http://www.modalshop.com/calibration.asp?ID=200
[39] W. T. Thomson, Theory of vibration with applications, 4th ed., Englewood Cliffs, NJ:Prentice Hall, 1993.
[40] Kasap, Safa O., Optoelectronics & Photonics: Principles & Practices: International Edition. Pearson Higher Ed, 2013.
[41] https://refractiveindex.info/
[42] M. D. Groner, J. W. Elam, F. H. Fabreguette and S. M. George, “Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates,” Thin Solid Films, Vol.413, Issue 1, 2002, pp. 186-197.
[43] Y. H. Cho, A. P. Pisano and R. T. Howe, "Viscous damping model for laterally oscillating microstructures," in Journal of Microelectromechanical Systems, vol. 3, no. 2, 1994, pp. 81-87.
[44] 李俊宏, “微結構液動耦合效應之研究,” 國立清華大學博士論文, 2010.
[45] A. A. Trusov, A. R. Schofield and A. M. Shkel, "Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, CO, 2009, pp. 660-663.
[46] 何承豫 , “CMOS-MEMS陀螺儀的設計與實現,” 國立清華大學碩士論文, 2016.
[47] 李豐宇, “利用全解耦合音叉式結構設計實現具有低正交誤差及低加速度靈敏度的微機電振動式陀螺儀,” 國立清華大學博士論文, 2016.
[48] 李思源, “固態熱致動可調變微透鏡之研究,” 國立清華大學博士論文, 2009.
[49] 林素貞, “開發增加位移之雙軸致動模組及其應用於光學影像穩定系統,” 國立清華大學碩士論文, 2013.
[50] 楊智翔, “新型CMOS MEMS微光學定位、聚焦平台之設計與製造,” 國立清華大學碩士論文, 2008.
[51] 施瑄芳, “SOI晶片整合面型微加工技士於微光學平台之研究,” 國立清華大學碩士論文, 2003.