為了在性能與壽命上有更好的表現，液靜壓軸承在超精密加工設備上經常扮演舉足輕重的角色。液靜壓軸承的工作原理為透過外部加壓使軸承面之間產生一層油膜，以避免軸承滑動面零件的直接接觸。此機構亦使液靜壓軸承具有下列特性：高剛性、低磨耗、低滑滯效應（stick-slip）、高阻尼、較長之使用壽命等。而液靜壓軸承中的重要零件－節流器，在整套系統中則扮演關鍵角色。許多文獻提到，薄膜式節流器能夠使液靜壓軸承達到高剛性的性能表現。然而，薄膜式節流器的結構與設計參數也相對其他節流器複雜許多。
根據本實驗室先前的研究成果顯示，薄膜節流器可由兩項設計參數進行設計，分別為：無因次薄膜剛性（Dimensionless membrane stiffness, K_r^*）與軸承系統的設計節流比（Design restriction ratio, λ），當K_r^*=1.33與λ=0.25時，軸承剛性在某段工作區間下趨近無限大，此組最佳解可適用於單向墊與對向墊之軸承設計。
本研究將此概念應用於實際案例，將一組液靜壓線性滑軌作為分析對象，該組滑軌由一組搭配薄膜式節流器之上墊，與四組搭配毛細管節流器之下墊所組成。本文之研究目的在於利用數值方法分析該滑軌之性能表現，並透過實驗與模擬結果互相對照。

To pursue superior performance for quality and durability, hydrostatic bearings were frequently adopted in ultra-precision machining machine. With the mechanism of fluid-film lubrication, hydrostatic bearing has plenty of advantages such as low friction, high stiffness, no stick-slip effect, high damping capacity, long operation life, etc. Many studies reported that membrane-type restrictor might enable bearing systems to have great performance. However, the mechanism and design parameters of membrane restrictor are much more complicated than other restrictors.
Based on our previous study, high bearing stiffness may be attainable as two design parameters of membrane restrictor are properly determined. These two parameters are the dimensionless stiffness of membrane (K_r^*) and design restriction ratio of bearing system (λ). Theoretically, the bearing can operate with high stiffness when K_r^* equals 1.33 and λ equals 0.25. The optimum result is applicable for both single-pad and opposed-pad bearings.
In this study, it is of interest to manufacture a hydrostatic module, which is a hydrostatic linear guideway with a membrane restrictor for the upper pad and capillary restrictors for the lower pads. The purpose of this research is to analyze the performance of this device using numerical methods and to verify the simulation results through experiments.

摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 XI
表目錄 XII
符號索引 XII
第一章 序論 1
第二章 文獻回顧 8
2.1 液靜壓軸承工作原理 8
2.2 壓力調節機制 11
2.2.1 毛細管節流器 12
2.2.2 孔口節流器 12
2.2.3 滑閥式節流器 13
2.2.4 自補償式節流 14
2.3 薄膜式節流器 17
2.3.1 薄膜式節流器工作原理 17
2.3.2 節流器與軸承性能 17
2.3.3 薄膜式節流器的相關研究 19
2.4 結語 24
第三章 研究方法與理論模型 25
3.1 研究步驟 25
3.2 油墊參數推導 26
3.2.1 納維-斯托克方程式 26
3.2.2 圓形油墊 29
3.2.3 矩形油墊 31
3.3 節流器理論參數 34
3.3.1 毛細管節流器 34
3.3.2 薄膜式節流器 36
3.4 模組化液靜壓滑軌性能分析 43
3.4.1 使用毛細管節流器 44
3.4.2 使用薄膜式節流器 48
第四章 性能模擬 50
4.1 油墊參數計算 50
4.2 薄膜節流器參數模擬 51
4.2.1 λ 51
4.2.2 Kr* 52
4.3 液靜壓模組性能模擬 59
4.3.1 使用毛細管節流器 59
4.3.2 使用薄膜式節流器 71
4.3.3 模擬結果比較 74
第五章 驗證實驗 76
5.1 加工成品與實驗儀器 76
5.2 下油墊毛細管節流器流阻量測 82
5.2.1 實驗架設 82
5.2.2 實驗結果 83
5.3 膜厚量測 86
5.3.1 量測方法 86
5.3.2 實驗架設 88
5.3.3 實驗結果 89
5.4 上油墊薄膜式節流器流阻量測 90
5.4.1 節流間隙量測 90
5.4.2 實驗架設 91
5.4.3 實驗結果 94
5.5 液靜壓模組負載實驗 98
5.5.1 實驗架設 98
5.5.2 實驗結果 99
5.5.3 油墊流阻修正 104
第六章 結論與未來工作 113
6.1 結論 113
6.2 未來工作 114
參考文獻 115

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