利用鋯鈦酸鉛壓電陶瓷薄膜製成之壓電微型致動器，將其應用於定位控制與驅動元件，此微型致動器於現今之微照明與掃描裝置系統中應用極為廣泛與普及。本研究為利用新型快速氣膠沉積法改善二維掃描器之製程方法。該設計採用氣膠沉積法將壓電陶瓷粉末沉積於不銹鋼基板上，此製程優勢在於可以實現廉價、簡單、快速，並且於室溫中即可製備高質量之壓電薄膜。本文所提及之致動器是利用氣膠沉積法將厚度為5μm之壓電薄膜沉積於厚度為100μm的不銹鋼基板上。此致動器之特色為其具有高穩定的線性振動和頻率響應，並且此壓電致動器之掃描裝置將應用於一次性內視鏡裝置系統之開發，因其優勢為高解析度與低成本。不僅如此，為了優化掃描儀的解析度與掃描之視野，利用ANSYS模擬找出最佳之共振頻率與掃描之偏轉角度。利用阻抗分析、共振頻率與結構模態分析，得到微型致動器之性能與特性，並且將模擬之數據與實驗之結果進行比對分析，最後於結論討論了此研究中發現的問題，並提出了改進方案，將其應用發揮最大化。

Piezo devices made of lead-zirconium-titanate (PZT) are utilized in driving mechanical devices for positioning control and vibration actuation and have found contemporary application in micro- illuminating and scanning devices. This paper presents a new rapid prototyped PZT actuator for 2D scanner applications. This design uses a novel method of directly depositing a thin PZT film on stainless steel by aerosol deposition (AD). The AD method enables inexpensive, simple, quick, room temperature fabrication of high-quality PZT films. The proposed actuator deposits a 5-μm thick PZT film onto a 100 μm thick stainless-steel substrate by using an AD method. The features of the actuators are a stable linear vibration and frequency response. The proposed PZT actuated scanning device would be attractive for the development of disposable endoscopic devices, as it would be both high-resolution and inexpensive to produce. To optimize the line resolution and field of view of the scanner, ANSYS simulations are performed to determine the optimal operating frequencies and deflection angles. Fabrication results, electrical impedance, and mechanical response of the actuator and optical performance of the tapered waveguide scanner are presented, and results are compared with experiment. Problems found in these preliminary studies are discussed, and resolutions and improvement are proposed.

Tables of Contents
摘要---------I
Abstract---------II
Acknowledgment---------III
List of Figure--------2
List of Table--------7
Chapter 1. Introduction-----8
1.1 Overview-------9
1.2 Motivation--------11
Chapter 2. Design and Working Principle--------14
2.1 Design Consideration---------16
2.2 Operating Principle-----------19
2.3 Scanner Mechanical Simulation--------21
Chapter 3. Device Fabrication and Characterization-------37
3.1 PZT Actuator Fabrication---------37
3.1.1 Aerosol Deposition--------37
3.1.2 Device Fabrication Flow--------40
3.1.3 Fabrication Process of Taper Fiber Etching-------44
3.1.4 Results and Discussion---------50
Chapter 4. Electromagnetic and Mechanical Characterization of PZT Scanner---------60
4.1 Electrical and Mechanical Performance--------60
Chapter 5. Conclusion---------85
Bibliography--------86
List of Abbreviations--------92
Appendix A: Piezoelectric Scanner Microfabrication Process Flow--------94
Appendix B: Fabrication of Waveguide: Fiber Etching Process Flow------100
Appendix C: PZT Actuator Frequency Response and Displacement Measurement------102

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