本研究以奈米3D微影技術製作微光學元件，並以複合式透鏡為載體，驗證其可行性。
現今的微透鏡製造技術無法製造自由曲面透鏡與複合式透鏡，複合式透鏡的優勢為直接垂直整合多層鏡片，結合奈米3D微影技術能快速製作複雜3D微結構的優勢，有利於開發出最適合的複合式微透鏡。
奈米3D微影技術(Nano 3D Lithography, N3L)結合雙光子吸收(Two Photon Absorption, TPA)與光致聚合技術(Photon Polymerization)，其加工方式是將飛秒雷射聚焦於光敏感材料內部，使其焦點發生雙光子吸收效應，進而使材料聚合固化，加工精度可至次微米等級，並且可加工任意形狀的3D微結構。
本研究將針對微透鏡與複合式微透鏡進行製作，透過切層軟體與路徑規劃的的優化，建立微透鏡的奈米3D微影平台製程資料庫與加工模組，也針對高深寬比的結構進行製程開發，並以殼層法大量節省透鏡加工時間。

In this study, micro optical components were fabricated by Nano 3D Lithography(N3L) and the compound lens were be used as a potential vehicle to verify the feasibility of our system.
Current microlens manufacturing technology cannot produce free-form lens and compound lens. The advantage of compound lens is that it directly integrates multi-layer lenses vertically, and the advantage of N3L is fabrication of complex 3D microstructures, which is beneficial to the compound lens development.
In this study, we will focus on the fabrication of microlens and compound lens. Through the optimization of the slicing and path planning program, we create a fabrication database and module of micro optical component for N3L. Moreover, we developed high aspect ratio process and save fabrication time by using shell method for N3L as well.

摘要 1
Abstract 2
圖目錄 5
表目錄 9
第一章 緒論 10
1.1 前言 10
1.2 文獻回顧 14
1.2.1 奈米3D微影系統 14
1.2.2 微透鏡製造技術 33
1.3 研究動機 38
1.4 論文架構 39
第二章 研究方法 40
2.1 雙光子聚合 40
2.1.1 雙光子吸收 40
2.1.2 光致聚合 40
2.2 奈米3D微影系統 43
2.2.1 整體系統架構 43
2.2.2 壓電式加工與位移平台 43
2.2.3 光學系統 45
2.2.4 人機介面與加工流程 46
2.3 臨界點乾燥機(Critical Point Dryer, CPD) 48
第三章 鷹眼相機之複合式透鏡 50
第四章 實驗規劃 55
4.1 試片製備 55
4.2 單透鏡 55
4.2.1 切層軟體與路徑規劃模組優化 55
4.2.2 透鏡之材料製程參數 55
4.2.3 以UV-Shell縮短加工時間 55
4.3 複合式透鏡 56
4.3.1 高深寬比透鏡之製程開發 56
4.3.2 光學機構支架設計 56
第五章 實驗成果 57
5.1 SU-8試片製備 57
5.1.1 基板清潔 57
5.1.2 材料塗佈 57
5.1.3 軟烤 57
5.2 單透鏡製做 59
5.2.1 非球面透鏡路徑規劃模組 59
5.2.2 單透鏡之表面粗糙度 67
5.2.3 以UV- Shell法縮短加工時間 68
5.3 複合式透鏡 68
5.3.1 光學機構支架設計 68
5.3.2 高深寬比透鏡製程開發 70
第六章 結論與未來規劃 73
參考文獻 74

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