本研究旨在探討固體結構在微流體裝置中，應用誘導聲流效應於微流道的熱傳分析。實驗使用的微流道以PDMS材質製作，固體結構位於流道兩側壁面，而加熱器放置於流道底部。整體實驗裝置透過ANSYS模擬與實驗相互比對，於相同加熱條件下，調整實驗架設而成功將前人實驗的熱損估算從89 %降至44 %。本研究以壓電片來驅動固體結構而產生誘導聲流效應，選用固體結構將能改善使用氣泡於誘導聲流效應時氣泡容易膨脹的問題。實驗時將直徑3.2 m的螢光粒子與去離子水配成工作流體，搭配可視化、微粒子影像測速法可量測出微流道內之流線圖與全域性速度場；以Rubpy螢光溫度感測塗料與去離子水配成0.07 %的工作流體，搭配TSP溫度量測技術進行微流道之溫度場與熱傳分析。實驗量測包括單邊單結構在有/無主流的誘導聲流效應和交錯式結構之速度場與溫度場分析。單結構有主流下，不同結構與流道的長度比(0.2和0.4)有不同的影響結果：長度比0.2的單結構於雷諾數4時，誘導聲流效應的影響範圍為結構下游約100 micrometer；而長度比0.4的單結構在雷諾數2、4和6時，其誘導聲流效應的影響範圍則分別140、192和75 micrometer。長度比0.2的交錯式結構於雷諾數2、4和6時，皆有越往下游處誘導聲流效應越明顯的趨勢；長度比0.4的交錯式結構則無往下游處誘導聲流效應有延續且放大的趨勢，此現象與可視化的流線圖相互呼應。
本研究最後討論誘導聲流效應於不同結構長度比(0.2和0.4)在不同雷諾數(Re=2、4和6)時的熱傳分析。在定熱通量0.2 W/mm2的加熱條件下，比較有/無誘導聲流效應下流體實際帶走的熱量增益。不論是長度比0.2或0.4的結構長度，在誘導聲流效應下皆能提高流道入出口溫差。透過TSP量測出的液溫等溫線圖，可以發現在誘導聲流效應下整體等溫線會往上游平移，且隨著交錯式結構的設計，越往下游等溫線提前發生的情況越明顯。最後發現長度比0.2的結構長度在雷諾數4時有最大的熱傳增益，推測為在此雷諾數下能更有效地使誘導聲流效應透過交錯式結構而延續且放大，整體熱傳增益達22.53 %。觀察此條件下沿著軸向不同截面的有/無誘導聲流效應的液體溫度，可以發現越往下游流體溫度差別越大，與速度場之越往下游誘導聲流效應越明顯相符。

This study aims to investigate acoustic streaming effect on heat transfer enhancement in microchannel flow by using staggered structures. The microchannel devices were made of PDMS material, with staggered structures were positioned on the side wall of microchannel. Microheaters were fabricated by using MEMS technology and placed at the bottom of the microchannel to provide constant heat flux thermal boundary condition. After investigation of heat loss in the microchannel experiment with ANSYS simulation and experiment, the experimental arrangement was adjusted by expanding the PDMS bulk and the heat loss was successfully reduced from 89 % to 44 %. In this study, the structures were positioned at the side wall and they were driven by piezoelectric actuators to introduce acoustic streaming. The using of the solid structures would resolve the problem of acoustic straming with air bubbles, which could be easily expanded during the acoustic streaming. For the velocity experiments and flow visualization, red fluorescent particles of 3.2 micrometer diameter were seeded into deionized water to be used as tracker particles. The velocity profiles inside the microchannel devices were successfully obtained by Micro-Particle-Image-Velocimetry (Micro-PIV) technique. For the temperature field experiment, luminescence sensor of Rubpy was dissolved in DI water as working fluid for temperature measurements. The temperature field and heat transfer analysis were successfully obtained by Temperature Sensitive Paint (TSP) technique. In this study, the velocity profiles and temperature fields have been successfully acquired with single structure and staggered structures with different aspect ratios (a=0.2 and a=0.4) of structure length and channel width as well as different Reynolds number (Re) conditions. From the experimental results of velocity profiles, it can be seen that microchannel flow with staggered structures of a=0.2 can show the effect of acoustic streaming and it can be propogated downstram at Re number of 2, 4 and 6. However, the results of microchannel flow with staggered structures of a=0.4 is different and the effect has been suppressed due to the narrow pathway for the main flow.
Comparing the heat transfer enhancement with acoustic streaming under the constant heat flux (0.2 W/mm2) thermal boundary condition, both microchannel devices with staggered structure designs of a=0.2 and a=0.4 could increase the fluid temperature at microchannel outlet. It could be seen that the staggered structures of a=0.2 has the highest heat transfer enhancement at Re number of 4, with the enthalpy increament up to 22.53 %. It could be found that there were greater temperature differences along downstream with the effect of acoustic streaming, which was similar to the observation of velocity experiments.

摘要 I
Abstract III
誌謝 V
目錄 VII
圖目錄 X
表目錄 XIX
第一章、 緒論 1
1.1 研究動機 1
1.2 文獻回顧 3
1.3 研究目的 24
1.4 論文架構 25
第二章、 實驗原理 26
2.1 Micro-PIV量測原理 26
2.2 TSP螢光溫度感測塗料 29
2.3 微流道熱傳分析 32
第三章、 實驗方法 35
3.1 微流道製作 35
3.2 微型加熱器製作 40
3.3 Micro-PIV系統介紹 43
3.4 流場可視化系統 54
3.5 溫度量測系統 56
3.6 TSP校正曲線 58
3.7 壓電片振動頻率及振幅 60
3.8 誤差分析 60
第四章、 微流道速度與溫度場量測之驗證 63
4.1 直管速度場驗證 63
4.2 直管液體溫度場驗證 66
第五章、 溫度量測系統之熱損分析 69
5.1 ANSYS模擬實驗架設之溫度場 69
5.2 以TSP量測實驗架設之熱損 77
第六章、 單邊結構誘導聲流效應 80
6.1 無主流之U、V速度場與渦度場分析 80
6.2 無主流之固體結構與氣泡誘導聲流效應比較 82
6.3 有主流之固體結構FV可視化與Micro-PIV速度量測 86
第七章、 交錯式結構誘導聲流效應流場與熱傳分析 98
7.1 交錯式結構誘導聲流效應之速度場 98
7.2 交錯式結構誘導聲流效應之溫度場與熱傳增益 114
7.3 交錯式結構誘導聲流效應之熱傳增益 130
第八章、 結論與未來工作 134
8.1 結論 134
8.2 未來建議工作 136
參考文獻 138

[1] R.K. Shah, “Laminar flow forced convection heat transfer and flow friction in straight and curved ducts-A summary of analytical solutions,” Dep. Mech. Eng. Stanford Univ., 1971.
[2] G.L. Morini, “Single-phase convective heat transfer in microchannels: A review of experimental results,” Int. J. Therm. Sci., vol. 43, no. 7, pp. 631–651, 2004.
[3] M.K. Moharana, G. Agarwal, and S. Khandekar, “Axial conduction in single-phase simultaneously developing flow in a rectangular mini-channel array,” Int. J. Therm. Sci., vol. 50, no. 6, pp. 1001–1012, 2011.
[4] P.S. Lee, S.V. Garimella, and D. Liu, “Investigation of heat transfer in rectangular microchannels,” Int. J. Heat Mass Transf., vol. 48, no. 9, pp. 1688–1704, 2005.
[5] S.S. Hsieh andC.Y .Lin, “Convective heat transfer in liquid microchannels with hydrophobic and hydrophilic surfaces,” Int. J. Heat Mass Transf., vol. 52, no. 1–2, pp. 260–270, 2009.
[6] R.J. Adrian, “Particle-Imaging Techniques for Experimental Fluid Mechanics,” Annu. Rev. Fluid Mech., vol. 23, no. 1, pp. 261–304, 1991.
[7] C.D. Meinhart, A.K. Prasad, and R.J. Adrian, “A parallel digital processor system for particle image velocimetry,” Meas. Sci. Technol., vol. 4, no. 5, pp. 619–626, 1993.
[8] J.G. Santiago, S.T. Wereley, C.D. Meinhart, D.J. Beebe, and R.J. Adrian, “A particle image velocimetry system for microfluidics,” Exp. Fluids, vol. 25, no. 4, pp. 316–319, 1998.
[9] C.D. Meinhart, S.T. Wereley, and J.G. Santiago, “PIV measurements of a microchannel flow,” Exp. Fluids, vol. 27, no. 5, pp. 414–419, 1999.
[10] M. Raffel, Particle image velocimetry. Springer, 2007.
[11] C.D. Meinhart, S.Wereley, and M. Gray, “Volume illumination for two-dimensional particle image velocimetry,” Meas. Sci. Technol., vol. 11, no. 6, pp. 809–814, 2000.
[12] T. Liu, Pressure -and Temperature -Sensitive Paints. Springer, 2005.
[13] J. Crafton, N. Lachendro, M. Guille, J.P. Sullivan, and J.D. Jordan, “Application of Temperature and Pressure Sensitive Paint to an Obliquely Impinging Jet,” AIAA Pap. no. AIAA-99-0387, pp. 1–13, 1999.
[14] R. Samy, T. Glawdel, and C.L. Ren, “Method for microfluidic whole-chip temperature measurement using thin-film poly(dimethylsiloxane)/Rhodamine B,” Anal. Chem., vol. 80, no. 2, pp. 369–375, 2008.
[15] 林智仁, “微粒子影像測速法及溫度螢光感測技術應用於微流體90度彎管之流場與熱傳分析,” 清華大學動力機械工程學系碩士論文, vol. 101033509, 2014.
[16] M.E. Steinke and S.G. Kandlikar, “Single-Phase Heat Transfer Enhancement Techniques in Microchannel and Minichannel Flows,” ASME 2nd Int. Conf. Microchannels Minichannels, no. January, pp. 141–148, 2004.
[17] R.H. Liu, J. Yang, M.Z. Pindera, M. Athavale, and P. Grodzinski, “Bubble-induced acoustic micromixing,” Lab Chip, vol. 2, no. 3, p. 151, 2002.
[18] P. Tho, R. Manasseh, and A. Ioo, Cavitation microstreaming patterns in single and multiple bubble systems, vol. 576. 2007.
[19] A. Nilsson, F. Petersson, H. Jönsson, and T. Laurell, “Acoustic control of suspended particles in micro fluidic chips,” Lab Chip, vol. 4, no. 2, pp. 131–135, 2004.
[20] D. Ahmed, X. Mao, B.K. Juluri, and T.J. Huang, “A fast microfluidic mixer based on acoustically driven sidewall-trapped microbubbles,” Microfluid. Nanofluidics, vol. 7, no. 5, pp. 727–731, 2009.
[21] D. Ahmed et al., “Acousto fluidic chemical waveform generator and switch,” Anal. Chem., vol. 86, pp. 11803–11810, 2014.
[22] 鄭意憲, “以微粒子影像測速法與溫度螢光感測塗料量測技術探討氣泡誘導聲流之流場及熱傳分析,” 清華大學動力機械工程學系碩士論文, 2016.
[23] 陳鋒儒, “碩士論文 以實驗方法探討微流道交錯式薄膜氣泡腔體誘導聲流 之流場與熱傳增益 Experiment study on flow field and heat transfer analysis,” 清華大學動力機械工程學系碩士論文, 2017.
[24] P.H. Huang et al., “An acoustofluidic micromixer based on oscillating sidewall sharp-edges,” Lab Chip, vol. 13, no. 19, p. 3847, 2013.
[25] P.H. Huang et al., “A reliable and programmable acoustofluidic pump powered by oscillating sharp-edge structures,” Lab Chip, vol. 14, no. 22, pp. 4319–4323, 2014.
[26] A. Ozcelik et al., “Acoustofluidic Rotational Manipulation of Cells and Organisms Using Oscillating Solid Structures,” Small, vol. 12, no. 37, pp. 5120–5125, 2016.
[27] Microchem, “SU-8 2000 Permanent Epoxy Negative Photoresist,” Process. Guidel., 2015.
[28] M. Rossi , R. Segura, C. Cierpka, andC.J. Kähler, “On the effect of particle image intensity and image preprocessing on the depth of correlation in micro-PIV,” Exp. Fluids, vol. 52, no. 4, pp. 1063–1075, 2012.
[29] S.T. Wereley, “A correlation-based central difference image correlation (CDIC) method and application in a four-roll mill flow PIV measurement,” Exp. Fluids, 2003.
[30] 黃柏翰, “溫度螢光感測技術與粒子影像速度量測技術應用於兩相區段流熱傳分析,” 清華大學動力機械工程學系碩士論文, 2013.
[31] R. Lima, S. Wada, K.I. Tsubota, and T. Yamaguchi, “Confocal micro-PIV measurements of three-dimensional profiles of cell suspension flow in a square microchannel,” Meas. Sci. Technol., vol. 17, no. 4, pp. 797–808, 2006.
[32] R.K. Shah and A.L. London, “Laminar Flow Forced Convection Heat Transfer and Flow Friction in Straight and Curved Ducts - A Summary of Analytical Solutions,” Laminar Flow Forced Convect. Heat Transf. Flow Frict. Straight Curved Ducts, vol. 1, no. 1, p. 311, 1972.
[33] C. Pan and J. Lee, “漸深流道氣泡幫浦之效率提升研究,” 工程與系統科學研究所碩士論文, 2017.
[34] 李仕揚, “nPIV/nPIT 微渠道壁面速度及溫度量測與熱傳分析,” 國立中山大學機械與機電工程學系碩士論文, 2016.
[35] Intel Corporation. Retrive July 17, 2018 from https://ark.intel.com/zh-tw/products/137979/Intel-Core-i7-8559U-Processor-8M-Cache-up-to-4_50-GHz