在過去的研究中，微波電漿輔助化學氣相沉積法生長之摻氮鑽石膜，若溫度和氣體比例落於一恰當區間內，能夠獲得高長寬比晶粒的鑽石結構。參照已報導的生長參數後，我們成功生長出具有該結構的鑽石薄膜，並對該材料進行了各種尺度的量測和研究。宏觀上，電性量測結果和生長時所用之電漿之發光光譜顯示，該鑽石膜具有絕緣-導體的雙層結構，而微觀上，以掃描電子顯微鏡所拍攝的鑽石膜截面圖像也發現了特定厚度下的結構變化，透射式電子顯微鏡則近一步確認了雙層結構的電性差異主要來自於石墨相的生成。顯微鏡的觀察還顯示，過往報導的針狀或奈米線結構，應該是二維奈米牆結構的邊界，是一種孿晶面折返邊界形成的面內生長加速效應之產物。我們深入的研究了兩個階段的生長模式，並探討孿晶面如何由局域生長，擴張至完全覆蓋表面。除此之外，還進行了氮氣、氫氣分別對晶粒生長影響的研究，透過比較微米和奈米尺度下的結構，發現兩種氣體對鑽石表面的穩定性以及生長的驅動力都存在顯著的調控能力。

It has been reported that, nitrogen doped diamond film made by microwave plasma enhanced chemical vapor deposition, within a certain range of temperature and gas composition, exhibits a special structure with high grain aspect ratio. Following the reported growth condition, we successfully grow diamond films with the specific morphology, and conduct tests under different scale. Macroscopically, electrical property tests and optical emission spectra of the plasma during the growth process reveal an insulator-conductor two-layer structure, and at micrometer scale, a structural transition at a certain depth is also found by scanning electron microscope cross-sectional view of the film. Transmission electron microscopy further confirms that the difference between the layers stems from the existence of graphite in the film. Microscope observation reveals that the nanowire structures reported before are the edges of the nanowall structure, which is the product of accelerated planar growth induced by twin plane re-entrant edge growth mechanism. Detailed structural studies of the two-stage growth are made, and how the discrete and localized twin plane growth diverges and covers the whole surface are discussed. In addition, the effects of nitrogen and hydrogen on diamond growth are studied by comparing samples made with different conditions under micro- and nanometer scale. The result indicates both gas species have significant control over surface stabilization and growth mechanism.

1. Introduction 1
1.1 Review of the Material 1
1.2 Aim of the Research 7
2. Experimental and Methods 14
2.1 Diamond Film Growth 14
2.2 Fabrication Equipment 15
2.3 Analyzing Tools and Theory 16
3. Bulk and Micrometer Scale Analysis 30
3.1 List of Growth Condition 30
3.2 Film Composition 30
3.3 Effect of Gas Species 36
4. Structure and Growth Mechanism of the Diamond Nanowall 44
4.1 General Observation 44
4.2 Stage One 46
4.3 Stage Two and Transition 49
4.4 Effect of Gas Species-Atomic Scale 55
5. Conclusion 72
Reference 75

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