低溫非平衡電漿在奈微米製造和生醫處理的應用受到極大關注。電漿密度是決定電漿特性及製程結果的一項重要參數，因此即時監測電漿密度是ㄧ個重要的技術。電漿吸收探針(Plasma absorption probe, PAP)是ㄧ種微波式電漿密度監測工具。原理是藉由餽入微波量測反射頻譜並找出共振頻率，根據共振頻率與電漿密度的關係計算對應的電漿密度。然而，傳統PAP在低密度電漿靈敏度較低可能發生共振頻率不易判斷的狀況，目前被提出的改善方法是增加天線長度，但是探針體積也會同時增加。因此本研究提出平頭式電漿吸收探針(Flat head plasma absorption probe, FHPAP)，在不增加玻璃管長度的條件下，將傳統PAP的單極天線改為圓盤型平頂天線以提升靈敏度。模擬結果顯示可量測的最小電漿密度約為1×〖10〗^9 cm-3。此外，針對不同需求，本研究在模擬計算中探討了另外兩種探針，分別為圓角化平頭電漿吸收探針(Rounded FHPAP)及混合型電漿吸收探針(Hybrid PAP)。
本研究包含模擬計算和實驗量測兩部分，模擬計算使用三維電磁模擬軟體HFSS建立模型，電漿在此視為一種介電質，其介電常數由電子密度、電磁波頻率、碰撞頻率所決定；實驗使用單埠向量網路分析儀量測氬氣電漿之電漿密度。研究結果顯示FHPAP的圓盤天線結構可使探針與電漿之間的耦合從耦合不足往臨界耦合移動，增加探針在低密度電漿之靈敏度。

Low temperature non-equilibrium plasma discharges are of great interests for applications ranging from micro/nano fabrication to bio/medical treatments. Plasma density is a key parameter that control the property of plasmas and the processing results, so plasma density diagnostics is a significant technology. Plasma absorption probe (PAP) is a kind of microwave based plasma diagnostics. The principle is that detecting resonant frequency from reflection spectrum and calculating the plasma density by the relation between resonant frequency and plasma density. However, PAP has low sensitivity in low density (< 1010 cm-3) plasma. One of the solutions is to lengthen the antenna, but it make the probe larger. In this study, a novel probe with a disk loaded antenna structure was developed to improve sensitivity without increasing the volume. Simulation result shows that minimum of measurable density is roughly 1×〖10〗^9 cm-3. Besides, Rounded FHPAP and Hybrid PAP were also studied.
The study includes simulations and experiments. A 3D electromagnetic simulation software (HFSS) is used to build the model. Plasma is treated as a dielectric with dielectric functions determined by plasma density, microwave frequency and collision frequency of electrons. Experiment was carried out by argon inductively coupled plasma and a one port network analyzer to sense plasma density. Research result shows show that sensitivity of PAP is governed by the coupling between the probe and plasma. The disk antenna structure makes coupling shift from undercoupling toward critical coupling. It improves sensitivity of the probe in low density plasma.

摘要 i
Abstract ii
目錄 iii
圖目錄 v
第一章 簡介 1
1.1 研究背景 1
1.2 研究目的 3
第二章 文獻回顧 4
2.1 微波干涉儀 4
2.2 傳輸線式微波干涉儀 7
2.3 微帶線式微波干涉儀 8
2.4 夾型共振器 14
2.5 電漿吸收探針 24
第三章 研究原理 34
3.1 電漿鞘層的基本原理 34
3.1.1 德拜長度 34
3.1.2 電漿鞘層與電漿前鞘層 35
3.2 電漿吸收探針基本原理 39
3.3 電漿參數 42
第四章 模擬方法與實驗設備 45
4.1 電磁模擬 45
4.2 電漿源及電漿量測實驗機台 49
4.3 電漿密度量測使用的設備 51
4.4 量測探針 54
第五章 結果與討論 57
5.1 平頭式電漿吸收探針模擬 57
5.1.1 平頭式電漿吸收探針於電漿環境之模擬結果 57
5.1.2 圓盤型天線之優點 69
5.1.3 圓角化平頭電漿吸收探針 71
5.1.4 混合型電漿吸收探針於電漿環境之模擬 76
5.2 FHPAP的設計與製作 82
5.3 CMT R54 及 Agilent E5071B量測結果比較 85
5.4 FHPAP實驗量測 87
5.4.1 電漿加熱所造成之FHPAP量測問題 87
5.4.2 FHPAP量測結果 90
第六章 結論 95
附錄A PAP模擬 96
附錄B Mesh設定 106
附錄C 介電質負載電漿吸收探針 107
C.1 介電質負載的影響 107
C.2 介電質環高度的影響 110
附錄D 氣體壓力對模擬計算結果的影響 112
參考文獻 117

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