穿透式電子顯微鏡為材料分析上具有最高空間解析度的顯微技術之一，同時擁有結晶取向觀測、成分分析等優勢，為帶動科技發展之重要技術，本實驗即利用此優勢，開發應用於電子顯微鏡系統中臨場流體光誘發分析技術。
目前研究結果顯示奈米氫氣泡極具儲氫應用之潛力，同時亦為世界公認未來理想的能源載體，故利用太陽能產生氫氣能源將是未來重要的發展方式之一，然而光觸媒材料的產氫轉換效率卻遲遲無法大幅提升，因此觀察光催化的微觀機制與反應過程便相當關鍵。為了能夠於奈米尺度下觀察反應機制，本研究針對臨場觀測之需求，開發一整合引光系統與流體系統之穿透式電子顯微鏡樣品載具，搭載微機電製程所製作之流體晶片，於樣品區導入紫外光並通入反應溶液（去離子水）之方式誘發光觸媒催化反應並產生氫氣，我們也計算電子劑量觀察電子束對於光觸媒催化反應之關係，同時驗證此引光流體整合系統之可行性。

Transmission electron microscope is one of the microscopic techniques with the highest spatial resolution in material analysis. It also has the advantages of crystal orientation observation and composition analysis. As an important technology to drive the development of science and technology, this experiment uses this advantage to develop an Light / Fluid integrated TEM holder for in-situ observation of TiO2 photocatalyst modified by platinum nanoparticles.
The research results show that nano hydrogen bubbles have great potential for hydrogen storage applications, and also be recognized as ideal energy carriers in the future. Therefore, using solar energy to generate hydrogen energy will be one of the important development methods. However, the hydrogen conversion efficiency of photocatalyst has not been greatly improved, so it is critical to observe the mechanism and reaction process of photocatalysis. In order to observe the reaction mechanism at the nanometer scale, this study developed a TEM holder and flow chip. The holder integrates the ultraviolet light irradiation system and the fluid system for the requirements of in-situ observation. The flow chips are made by micro-electromechanical system which has great precision on making micro scale devices. The photocatalyst catalyzed reaction and hydrogen generation were induced by introducing ultraviolet light into the sample region and filling in deionized water. We also calculate the electron dose rate during photocatalytic reaction. Finally, the TEM images also verified the feasibility of light / fluid integration system.

摘要 i
Abstract ii
致謝 iii
圖目錄 viii
表目錄 xi
第一章 緒論 1
1.1電子顯微鏡之發展與演進 1
1.2 研究動機與目的 3
第二章 文獻回顧 4
2.1 環境式電子顯微鏡 4
2.2 微型環境腔體元件 5
2.3 流體交換系統 7
2.4 新型臨場觀測技術開發 9
2.5 光觸媒簡介 10
2.5.1 本多-藤嶋效應 10
2.5.2 光觸媒材料特性與反應機制 11
2.5.3 利用光觸媒產氫 12
2.5.4 貴金屬負載與應用 14
第三章 載具開發與實驗方法 15
3.1 實驗儀器 15
3.2 引光流體微型環境系統晶片製程設計 20
3.2.1 引光流體晶片設計 20
3.2.2 黃光微影 22
3.2.3 引光流體晶片製作流程 25
3.3 引光流體系統載具設計 29
3.3.1 穿透式電子顯微鏡內部結構確認 29
3.3.2 引光流體樣品載具設計 30
3.4 引光流體臨場觀測實驗架構 36
3.4.1 樣品製備 36
3.4.2 引光流體系統架設 37
第四章 結果與討論 38
4.1 引光流體系統晶片品質確認 38
4.2 引光流體整合樣品載具之測試 39
4.2.1 真空測試： 39
4.2.2 光強度測試： 40
4.3 引光流體系統觀測結果 41
4.3.1 光觸媒樣品 41
4.3.2 二氧化鈦修飾白金之觀察 42
4.3.3 引光流體系統產氫觀測 48
第五章 結論 50
第六章 參考文獻 51

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