雷射干涉重力波偵測站(Laser Interferometer Gravitational Wave Observatory, LIGO)以大型麥克森干涉儀進行重力波偵測，由於遙遠的距離當重力波傳遞到地球時訊號十分地微弱，因此應盡可能降低雜訊以提高系統偵測的靈敏度。目前大型麥克森干涉儀總體雜訊最低處大約落在100Hz，而在此頻率的主要雜訊來源為Coating Brownian noise。Coating Brownian noise是來自高反射鏡薄膜內部的熱擾動，根據Fluctuation-dissipation theorem薄膜熱擾動雜訊與機械損耗成正比，故實驗中量測薄膜機械損耗並以退火方式降低機械損耗，尋找熱擾動雜訊較低的光學薄膜。
本論文第一部分研究由TiO2/SiO2堆疊的奈米多層膜室溫機械損耗，根據文獻此結構等效為高反射鏡中的高折射係數層，並且奈米多層膜層數愈多其單層TiO2厚度愈薄、薄膜結晶溫度越高。因此選擇以IBS鍍製設計結構中結晶溫度最高的19層奈米多層膜，並量測其室溫機械損耗與退火275oC的室溫機械損耗。此19層奈米多層膜退火275oC後大約在100Hz的機械損耗從1.16×10-3降低至1.28×10-4，顯示退火能有效降低19層奈米多層膜的機械損耗。
第二部份中以降低溫度方式減少熱擾動雜訊，在低溫環境下進行機械損耗量測，研究19層奈米多層膜低溫機械損耗趨勢。結果中19層奈米多層膜約在80K處的機械損耗較計算的機械損耗理論值低，顯示透過薄膜厚度減薄能夠抑制SiO2薄膜的機械損耗峰。19層奈米多層膜的低溫機械損耗亦可透過退火降低，677Hz的20K機械損耗從4.24×10-4降低至2.69×10-4，具有作為低損耗反射鏡材料的研究價值。

The Laser Interferometer Gravitational Wave Observatory (LIGO) detect gravitational waves with large and precise Michelson interferometers. The gravitational wave signals from faraway stars are extremely weak so that it's necessary to reduce noise of the interferometer. The most sensitive observed frequency range of the interferometer is around 100Hz, and the sensitivity is majorly limited by coating Brownian noise of high reflective mirrors. According to the fluctuation-dissipation theorem, coating Brownian noise is proportional to mechanical loss of coating materials. Thus, the mechanical loss of coating materials is measured to evaluate coating Brownian noise, and it will be reduced by annealing.
The first part of this thesis shows that the mechanical loss investigation of nano-layer structure consisting of alternating thin TiO2 and SiO2 films at room temperature. Several prototypes are designed, featuring a different number of TiO2/SiO2 layer pairs, and different thicknesses, but the same nominal refractive index. In several prototypes, the 19-layer structure is composed of thinnest TiO2/SiO2 layer, and exhibits highest threshold temperatures for crystallization onset. Therefore, the 19-layer is deposited by ion beam sputter and is annealed at 275oC for 24 hours. After annealing, the mechanical loss of the 19-layer at room temperature is effectively reduced from 1.16×10-3 to 1.28×10-4 around 100Hz.
In the other part, coating Brownian noise is reduced in cryogenic. Cryogenic loss of the 19-layer structure is also investigated. In the results, measured losses are lower than the calculated loss from the individual TiO2/SiO2 layer. The cryogenic peak of SiO2 seems to be “covered out”, and the loss of the 19-layer is very close to that of the TiO2. After annealing, the cryogenic mechanical loss of the 19-layer is also reduced from 4.24×10-4 to 2.69×10-4 around 677Hz at 20 K. These result shows that annealing decreases mechanical loss of the 19-layer both at room temperature and cryogenic.

目錄
Abstract I
摘要 II
誌謝 III
目錄 IV
圖目錄 VII
表目錄 X
第一章、導論 1
1.1 前言 1
1.2 研究動機 3
第二章、薄膜鍍製流程及薄膜特性分析 6
2.1 奈米多層膜介紹與薄膜鍍製流程 6
2.1-1 奈米多層膜簡介 6
2.1-2 矽懸臂製作流程與共振模態 7
2.1-3 薄膜鍍製簡介 9
2.1-4 19層奈米多層薄膜退火流程與結晶分析 10
2.1-5 19層奈米多層膜厚度量測 11
2.2 單層二氧化鈦及二氧化矽薄膜成份量測與應力量測 13
2.2-1 單層二氧化鈦及二氧化矽薄膜成份量測 13
2.2-2 單層二氧化鈦及二氧化矽薄膜應力量測 14
第三章、奈米多層膜之室溫機械損耗與退火影響 16
3.1 機械損耗理論 16
3.2 室溫機械損耗量測系統介紹 20
3.3 矽懸臂基板之室溫機械損耗 22
3.3-1 二氧化鈦薄膜之室溫機械損耗 24
3.3-2 二氧化矽薄膜之室溫機械損耗 26
3.4 奈米多層膜之室溫機械損耗 28
3.4-1 19層奈米多層膜之室溫機械損耗量測結果 28
3.4-2 19層奈米多層膜之機械損耗量測值與以單層薄膜機械損耗計算之理論值 30
3.4-3 退火275oC的19層奈米多層膜室溫機械損耗 33
第四章、奈米多層膜之低溫機械損耗與退火影響 35
4.1 低溫量測系統介紹 35
4.2 低溫量測流程 37
4.3 夾持影響分析與低溫矽懸臂基板機械損耗量測結果 39
4.4 單層薄膜之低溫機械損耗 41
4.4-1 二氧化鈦薄膜之低溫機械損耗 41
4.4-2 二氧化矽薄膜之低溫機械損耗 43
4.4-3 退火600oC二氧化矽薄膜之低溫機械損耗 45
4.4-4 氧化物低溫機械損耗峰分析 47
4.5 奈米多層膜之低溫機械損耗 50
4.5-1 未退火19層奈米多層膜之低溫機械損耗 50
4.5-2 單層薄膜低溫機械損耗量計算之19層奈米多層膜低溫機械損耗理論值 52
4.5-3 退火275oC 19層奈米多層膜之低溫機械損耗 54
第五章、結論與未來展望 57
5.1 結論 57
5.2 未來展望 58
附錄 59
附錄A、舊夾持方式二氧化矽之低溫機械損耗 59
附錄B、低溫機械損耗峰值分析 59
附錄C、19-layer TEM量測各層厚度 61
附錄D、各種矽懸臂試片之室溫機械損耗統整表格 62
參考文獻 65

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