本實驗以濕式製程化學鈍化方式取代真空製程的原子層沉積ALD方式。本實驗分兩部分化學溶液，第一部分以高純度氫氧化鋁和45%氫氧化鈉水溶液混合後進行攪拌使氫氧化鋁溶解飽和後，形成含有四羥基合鋁酸根(AlO4-)和鈉離子(Na+)水溶液。為了避免金屬鈉離子汙染晶片，使用陽離子交換樹脂將鈉離子轉換成氫離子於溶液中以去除鈉離子。此結果與不使用陽離子交換樹脂來比較差異。在實驗中，是用滴管滴於平躺晶片背表面上進行塗佈均勻，在不同退火溫度下量測少子壽命提升的探討，並嘗試不同退火時間評估晶片性能，為了確定氧化層的存在，我們透過XPS去觀察。
第二部分以高純度氫氧化鋁和濃鹽酸混合成的水溶液，以滴管滴於雙面裸晶矽片，塗佈方式是使表面沾上鋁離子和氯離子。矽片表面的氯離子和水受加溫後變為氯氣而跑出大氣中，留下鋁離子再進行退火使鋁離子和氧根重新鍵結而產生氧化鋁，我們透過XPS去觀察氧-鋁元素。
本實驗後段電極元件製作的部分用網印方式印刷背面局部接觸電極，以在背部形成背表面場。我們用SEM觀察背部表面場的厚度，最後以不同燒結時間分析對矽晶太陽能電池性能的影響。

In this study,we seek a wet chemical method for depositing aluminum oxide on rear side of multicrystalline silicon solar cells. First,we dissolved aluminum hydroxide in an alkaline solution to form AlO4- ions and alkaline ions. Then the alkaline ion were removed by cation exchange resin,we then smeared the silicon wafers with such a solution,followed by an annealing process. Minority carrier lifetime was compared between the wafers sweared by solutions with and without alkaline ions removed.
In the second part of this study,we used hydrochloric acid to dissolve aluminum
hydroxide and smeared the multicrystalline silicon wafers with such a solution. The solution first contained aluminum ions and chlorine ions on the wafer,and became a film of aluminum oxide through an annealing process. The minority carrier lifetime was measured to find an optimal annealing temperature.

第一章 序論................................................1
1.1前言 ................................................1
1.2文獻回顧................................................1
第二章基本原理..............................................3
2.1半導體基礎物理...........................................3
2.1-1半導體材料與結構.......................................3
2.1-2固態量子力學導論.......................................4
2.1-3半導體的能帶理論與結構[10]..............................6
2.1-4光吸收、能態密度與載子分布..............................7
2.2太陽能電池基本原理........................................9
2.2-1太陽光譜...............................................9
2.2-2太陽能電池工作原理.....................................10
2.2-2生命期與表面復合效應[15]...............................13
2.2-3載子復合機制..........................................17
2.2-4太陽能電池照光特性[10].................................18
2.2-5太陽能電池參數介紹.....................................19
2.3量子效率................................................23
2.3-1外部量子效率(external quantum efficient,EQE)...........23
2.3-2內部量子效率(internal quantum efficient,IQE)...........24
2.4背表面場效應.............................................24
2.5濕式化學生長氧化鋁機制....................................25
第三章研究方法與製程步驟.....................................27
3.1實驗概述.................................................27
3.2實驗目的.................................................27
3.2-1 氫氧化鋁與氫氧化鈉混合.................................27
3.2-2 氫氧化鋁與鹽酸混合.....................................28
3.3元件製作流程..............................................29
3.4前置步驟..................................................30
3.5量測方式..................................................36
第四章 實驗數據與分析.........................................41
4.1少數載子生命週期量測.......................................41
4.1-1第一組溶液氫氧化鈉與氫氧化鋁使用陽離子交換樹脂.............42
4.1-2第二組溶液鹽酸與氫氧化鋁混和塗佈..........................49
4.2太陽能電池元件............................................54
4.2-1 SEM量測...............................................54
4.2-2 BSF觀測...............................................54
4.2-3元件I-V量測 .........................................57
第五章結論...................................................59
參考文獻 .................................................61

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