在本論文中，我們研究了用於生物醫學應用的共振感測裝置。此元件設計操作於中紅外波長(10um即~30THz)，具有靈敏度高及高Q值。用於生物細胞結合於共振器的表面時，頻率會移動，使其可作為即時的、免標定的生物細胞偵測器。
為了製作具有高品質因素的設備作為折射率感測裝置，以提高這種生物傳感元件的解析度，我們提出了一種利用Fano共振之非對稱的光學共振結構設計，該元件由兩組鍍金之方塊組成，每組具有兩組不對方塊，這些方塊之間的間隙增強了元件的靈敏度。 根據模擬結果，我們的設計之品質因子可以高達到1546，而文獻中報導者的只有約80，靈敏度約為2500nm / RIU，比Lahiri、Basudev的工作高兩倍，而品質因素的估計值為383。論文中也報導實驗的初步進展。

In this work, a resonance-based sensing device for biomedical applications, is studied. The device is designed for operation at 10 um (~30 THz) is sensitive and with high Q. When the biological cells are attached to the surface of the resonator-based device, its resonance frequency will shift, making possible and calibration-free, speedy biological cell detection.
We focus on the design of devices with high-quality factor as a refractive index detector in order to improve the resolution of such biological sensing devices. In order to achieve this result, we propose an asymmetric optical resonance structure based on the Fano resonance. The principle of pattern on the device is composed of two groups of bars. Each group have two set of asymmetry bars. The gaps between bars are enhancing element to boost the sensitivities of the device. According to the simulation, our design can reach a quality factor as high as 1546, while previous designs only exhibited Q-factor of 80. The sensitivity is about 2500nm/RIU it is twice times bigger than that of Lahiri and Basudev. The figure of merit estimated to be as 383.

摘要 I
Abstract II
致謝 III
Table of Contents IV
List of Figure VII
List of Table XI
List of Abbreviations XII
Chapter 1 Introduction 1
1.1 Terahertz technology 1
1.1.1 Introduction to terahertz radiation 1
1.1.2 Terahertz time-domain spectroscopy 3
1.1.3 Fourier Transform Infrared Spectroscopy 4
1.2 The Background of Label Technique 5
1.3 Live cell imaging resonators 6
1.3.1 Confocal microscopy 6
1.3.2 Synchrotron based infrared microscopy 7
1.3.3 Surface plasmon resonance microscopy 9
1.4 Motivation and objectives 10
1.5 Organization of this thesis 10
Chapter 2 Theoretical models and analytical methods 12
2.1 Resonator 12
2.1.1 Plasmonic resonators 12
2.1.2 Dielectric resonators 13
2.1.3 Fano resonace 16
2.1.4 High Q-factors 21
2.2 Refractive index sensors 21
2.2.1 Split-ring resonator 21
2.2.2 Asymmetric split ring resonator 24
Chapter 3 Experimental Methods 26
3.1 CST Microwave Studio 26
3.1.1 Finite-Difference Time-Domain 26
3.1.2 Yee Cell 27
3.1.3 CST Microwave Studio 30
3.2 Simulation setup 30
3.2.1 Environment setting 30
3.2.2 Device design 30
3.3 Simulation result 32
3.3.1 Characteristic of Fano-like Resonance 32
3.3.2 Q-factor analysis 33
3.4 Refractive index sensing 34
3.5 The detection length 38
Chapter 4 Experimental Procedure 40
4.1 CST Microwave Studio Simulations Methods 40
4.2 Electron Beam Lithography (EBL) Process 40
4.3 Electron gun (E-gun) Evaporation of Gold & Lift-off 43
4.4 Fourier transform infrared spectroscopy (FTIR) 45
Chapter 5 Experimental results and discussion 46
5.1 EBL result 46
5.2 Discussion 47
Chapter 6 Conclusions and future works 48
6.1 Conclusions 48
6.2 Future works 48
Reference 49

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