肝臟是人體新陳代謝主要的器官之一，其相關疾病是國人十分重視的問題。本文以超薄10奈米氮化銦作為感測材料，設計成氣體感測器偵測人體呼氣中sub-ppm等級的揮發性氣體濃度，將取代傳統侵入式抽血分析應用於檢測肝臟相關疾病。由於半導體材料製成的感測晶片，其優異的電性使得微量濃度的氣體也能夠容易被偵測到，薄膜與氣體間電子交換的感測機制皆會產生電訊號，也因為晶片的靈敏度極佳，故此感測器的應用對氣體的選擇性十分重要，若是能提升對氣體的選擇性，特定氣體訊號的可信度也會大幅提升。
目前來說，氨氣為本氣體感測器預期測得的目標氣體，人體呼氣中超過兩百多種氣體，這些氣體的量足夠影響主訊號氨氣，尤其又以丙酮為首要量多，且氮化銦感測器對氨氣與丙酮的反應訊號比為1：0.95，故雜訊氣體丙酮是首要濾除的目標。研究結果顯示，使用10cc非極性矽油當作吸收劑，於衝擊瓶模擬丙酮混合氣體實驗中，發現可有效地吸收約40%的丙酮雜訊。
為了提升丙酮氣體吸收效率，除了找出對雜訊氣體選擇性最好的吸收劑外，找出參數能夠提升濾除丙酮氣體的能力，並於實驗中，證明設計方法可讓10cc矽油的丙酮吸收效率達到80%，並完成一3cm*1.5cm*5cm過濾器成品，可獨立使用，並在不影響原有的晶片高靈敏特性下，將其應用於肝病呼氣檢測。

Liver is one of the main organs of the body metabolism, and its related diseases are very important issues. In this paper, ultra-thin 10 nm indium nitride as a sensing material, designed as a gas sensor to detect the human body exhalation in the sub-ppm grade of volatile gas concentration, will replace the traditional invasive blood analysis used to detect liver-related disease. As a result of the semiconductor material made of the sensing chip, its excellent electrical properties allow the concentration of the gas can also be easily detected, the membrane and the gas exchange between the electronic sensing mechanism will produce electrical signals, but also due to the chip sensitivity. Therefore, the application of the sensor is very important for the gas selectivity, if it can improve the selectivity of the gas, the specific gas signal credibility will be greatly improved.
At present, the ammonia gas is which expected to measure, the body exhalation got more than two hundred kinds of gases, and indium nitride sensor for ammonia and acetone reaction signal ratio is about 1: 0.95 , So the noise gas acetone is the primary target. The results show that the use of 10cc non-polar silicone oil as absorbent in the acetone mixed gas simulation experiment found that it is effective to absorb about 40% of the acetone noise.
In order to improve the acetone gas absorption, in addition to finding the best absorbent for the specific gas, we have identified several parameters to enhance the ability to filter out acetone noise. In the simulation experiment, proved that the design method can enhance the 10cc silicone oil absorbent 80% acetone noise gas absorption efficiency. And we finish a 5cm*1.5cm*3cm filter, which could be used independently without affecting the chips high sensitivity characteristics, it is used in liver malfunction breath examination.

目錄
致謝 ii
中文摘要 iii
Abstract iv
目錄 v
圖目錄 vii
表目錄 xi
第1章 :序論 1
1.1研究背景 1
1.2肝臟疾病概述 2
1.3肝病檢測技術-引用自Canadian Liver Foundation 2
1.3.1肝活檢 3
1.3.2肝纖維化掃描器 5
1.3.3呼氣檢測 5
1.4氣體感測器 8
1.4.1電阻式氣體感測器 8
1.4.2場效電晶體式氣體感測器 10
1.4.3氮化銦氣體感測器 11
1.5分析儀 13
1.5.1氣相層析儀(Gas Chromatograph Mass Spectrometer) 13
1.5.2 氨氣分析儀(Ammonia Analyzer, T201) 16
1.6研究動機與目的 19
第2章 :文獻回顧 21
2.1 吸收劑 21
2.2 表面改質 22
2.3 溫度調變 25
2.4 感測器陣列 27
2.5設計理論模型 28
第3章 :實驗方法 34
3.1 氣體實驗系統 34
3.2 實驗分析儀器與操作條件設定 36
3.3 實驗設置 40
3.3.1 氣體濃度調配 40
3.3.2 實驗器材 41
3.3.3 實驗流程 42
3.4 量測計算 43
第4章 :工程設計 44
4.1設計想法 44
4.2第一階段：參數驗證 46
4.3參數一：流量閥設計(Controlling velocity) 49
4.4參數二：細泡器設計(Increasing absorbing area) 51
4.5參數三：內部結構設計(Extending flow distance) 55
第5章 :實驗分析與討論 60
5.1實驗設計驗證 60
5.2吸收劑飽和程度 72
5.3矽油黏性討論 74
5.4過濾裝置設計圖 78
第6章 ：成品驗證 79
6.1過濾裝置 79
6.2過濾測試 80
第7章：結論 86
第8章：未來工作 87
參考文獻 88
圖目錄
Fig. 1.1肝的狀態-擷取自加拿大肝臟基金會 2
Fig. 1.2肝活檢(Liver Biopsy)示意圖-擷取自中國脂肪肝防護網 4
Fig. 1.3 Disorders relative to VOCs detected study[2]. 6
Fig. 1.4肝狀態與呼出氨氣濃度範圍相關表 6
Fig. 1.5氣體感測器分類 8
Fig. 1.6高分子材料應用於感測器特性比較[14] 9
Fig. 1.7場效電晶體式氣體感測器[15] 10
Fig. 1.8 MOSFET感測機制示意圖 10
Fig. 1.9 CuO nanowire FET氣體感測器 11
Fig. 1.10氮化銦表面距離與其電子濃度關係圖[18] 11
Fig. 1.11氮化銦厚度與片電荷密度關係圖[18] 12
Fig. 1.12 氣相層析儀分析示意圖 14
Fig. 1.13氨氣分析儀(T201) 16
Fig. 1.14激發反應室(reaction cell) 18
Fig. 1.15 PMT(photo multiplier tube)光電倍增管 18
Fig. 1.16反應光譜圖 19
Fig. 1.17氮化銦感測器對氨氣與丙酮的響應比較圖[21] 20
Fig. 2.1 paratherm oil對氣體的吸收效率[24] 21
Fig. 2.2分子篩示意圖 22
Fig. 2.3使用分子篩前後響應比較[29] 22
Fig. 2.4降低乙醇靈敏度[33] 23
Fig. 2.5催化塗層厚度與靈敏度實驗分析[33] 23
Fig. 2.6摻雜前後(0.48 at.%)對混和氣體1000ppm靈敏度關係[34] 24
Fig. 2.7摻雜前後對不同濃度氨氣的響應[14] 24
Fig. 2.8響應時間與回覆時間比較[14] 24
Fig. 2.9 5ppm氨氣隨溫度階梯改變時的電流變化率[36] 25
Fig. 2.10 voltage=7V，方波且頻率20MHz，氣體濃度為0.5ppm[37] 26
Fig. 2.11利用陣列計算各種氣體的權重[38] 27
Fig. 2.12氣泡縱向或橫向流動模型[39] 29
Fig. 2.13氣泡大小與孔隙率之關係[39] 30
Fig. 2.14 表面持續擴張的氣泡[40] 30
Fig. 2.15管徑(D)與氣泡大小之關係[41] 31
Fig. 2.16氣體與液體接觸質量轉移[42] 32
Fig. 3.1氣體感測實驗系統 34
Fig. 3.2程式編碼控制介面 35
Fig. 3.3高解析氣相層析質譜儀HRGC-MS(擷取自國立交通大學貴儀中心) 36
Fig. 3.4丙酮特徵峰(43, 58) 38
Fig. 3.5丙酮氣體特徵峰Retention Time 38
Fig. 3.6 NIST及WILEY資料庫比對確認 39
Fig. 3.7實驗器材 41
Fig. 3.8實驗流程 42
Fig. 3.9 GC-MS定量與氣體滯留時間分析圖 43
Fig. 4.1設計流程 44
Fig. 4.2呼氣濃度分析 45
Fig. 4.3過濾裝置概念圖 48
Fig. 4.4過濾裝置應用於呼吸檢測示意圖 49
Fig. 4.5流量閥 49
Fig. 4.6控制流速設計模型 50
Fig. 4.7細泡器示意圖 51
Fig. 4.8流量與氣泡形成的大小[41] 52
Fig. 4.9丙酮分子與矽油分子接觸示意圖 53
Fig. 4.10 大小氣泡反應表面積示意圖 53
Fig. 4.11控制氣泡設計模型 53
Fig. 4.12各種不同的氣液相流動[45] 55
Fig. 4.13氣泡於不同管徑下的管內流動情形[45] 56
Fig. 4.14穩定流體遇到不可壓縮之固體所受到的形狀阻力與摩擦力 57
Fig. 4.15內部結構示意圖 57
Fig. 4.16內部結構分析 58
Fig. 4.17控制路徑設計模型 59
Fig. 5.1 (a)5ppm丙酮峰面積值，0.2×0.2尼龍網 (b)5.2m/min (c)13.1m/min (d)26.3m/min 峰面積值 60
Fig. 5.2 (a)5ppm丙酮峰面積值，0.1×0.1尼龍網 (b)5.2m/min (c)13.1m/min (d)26.3m/min 峰面積值 61
Fig. 5.3 測量氣泡大小實驗圖 62
Fig. 5.4 量測管直徑0.5cm的氣泡大小，氣泡半徑R大約為=0.68cm 62
Fig. 5.5量測接上細網0.1cm*0.1cm的氣泡大小，氣泡半徑R大約為=0.43cm 63
Fig. 5.6量測接上細網0.2cm*0.2cm的氣泡大小，氣泡半徑R大約為=0.5cm 63
Fig. 5.7量測接上氣泡石孔徑0.03cm的氣泡大小，氣泡半徑R大約為=0.1cm 64
Fig. 5.8流速26.3m/min下，不同氣泡半徑與吸收率之關係 66
Fig. 5.9流速13.1m/min下，不同氣泡半徑與吸收率之關係 66
Fig. 5.10流速5.2m/min下，不同氣泡半徑與吸收率之關係 66
Fig. 5.11 (a)5ppm丙酮與26.3m/min流速通過管長(b)4.5cm (c)7cm (d)9cm峰面積 67
Fig. 5.12 (a)5ppm丙酮與13.1m/min流速通過管長(b)4.5cm (c)7cm (d)9cm峰面積 68
Fig. 5.13 (a)5ppm丙酮與5.2m/min流速通過管長(b)4.5cm (c)7cm (d)9cm峰面積 68
Fig. 5.14量測不同流速下，通過4.5cm矽油液面高所需時間(second) 69
Fig. 5.15量測不同流速下，通過7cm矽油液面高所需時間(second) 70
Fig. 5.16量測不同流速下，通過9cm矽油液面高所需時間(second) 70
Fig. 5.17不同流速下，氣泡經過不同路徑長的矽油與吸收率之趨勢 71
Fig. 5.18 10cc矽油重複使用10次吸收效果 73
Fig. 5.19 水(黏度最小▓)與不同黏度甘油(黏度最大◆)在不同流量下氣泡的大小 75
Fig. 5.20 實心圖標為直徑0.36cm管產出的氣泡；空心圖標為直徑0.6cm管產出的氣泡 76
Fig. 5.21 質量傳遞係數v.s液體黏性[54] 76
Fig. 5.22 設計圖含尺寸及材質 78
Fig. 6.1 過濾器照片 79
Fig. 6.2 氣袋連接過濾器之實驗圖 79
Fig. 6.3 分析儀直接接上氣袋v.s接上過濾器之氣體濃度分析比較 80
Fig. 6.4 氣體濃度分析差值 80
Fig. 6.5 以標準氨氣通入10cc矽油之氨氣分析儀濃度分析數據 81
Fig. 6.6以標準氨氣通入8cc矽油之氨氣分析儀濃度分析數據 82
Fig. 6.7 丙酮5ppm定量，5ppm_AA=11122714，RT=8.19 83
Fig. 6.8丙酮5ppm通入8cc矽油，8cc_1_AA=2024647, 8cc_2_AA=2119832, 8cc_3_AA=1939572 84
Fig. 6.9丙酮5ppm 通入10cc矽油的峰面積值，10cc_1_AA=1848982, 10cc_2_AA=2260977, 10cc_3_AA=1982926 84
表目錄
Table 1. 濃度試算表 40
Table 2. 5ppm丙酮氣體吸收效率隨流量變化 46
Table 3. 5ppm丙酮氣體吸收效率隨溫度變化 47
Table 4. 5ppm丙酮氣體吸收效率隨矽油體積變化 47
Table 5. 不同尺寸氣泡與吸收率之分析結果 64
Table 6. 氣泡通過不同路徑矽油與吸收率之分析結果 69
Table 7. 矽油連續使用之吸收效率對應值 74
Table 8. 不同流速下，不同黏度矽油之氣體吸收效率 77
Table 9 標準氨氣通入10cc矽油之吸收效率 81
Table 10 標準氨氣通入8cc矽油之吸收效率 82
Table 11 丙酮通入8cc與10cc矽油之吸收效率 85
Table 12 氨氣與丙酮通過8cc矽油與10cc矽油的吸收比 85

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