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作者(中文):張力中
作者(外文):Chang, Li-Chung
論文名稱(中文):以連續下料及多點下料優化刮刀製程 大尺寸有機發光二極體之穩定性
論文名稱(外文):Improved Stability of Large-area Blade Coating Processed Organic Light-emitting Diodes by Continuous Delivery and Multi-delivery
指導教授(中文):洪勝富
指導教授(外文):Horng, Sheng-Fu
口試委員(中文):孟心飛
趙宇強
學位類別:碩士
校院名稱:國立清華大學
系所名稱:電子工程研究所
學號:104063514
出版年(民國):106
畢業學年度:105
語文別:中文
論文頁數:84
中文關鍵詞:大尺寸有機發光二極體連續下料多點下料刮刀液態製程技術刮刀塗佈均勻性有機發光二極體之穩定性
外文關鍵詞:Large-area Organic Light-emitting DiodesContinuous DeliveryMulti-deliveryBlade Coating Processed
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製作有機發光二極體(Organic Light Emitting Diode, OLED)常見的方式是利用真空蒸鍍的製程方法,但由於製程環境條件要求嚴苛、材料利用率低及製程設備昂貴等缺點,未來要大量生產大面積OLED想必是更為困難。為了克服此議題,本研究團隊自行研發了連續下料及多點下料刮刀塗佈液態製程技術,此技術不需嚴苛的製程環境且材料使用率較高,使得生產成本下降許多。本論文研究目的是利用此技術製作發光面積約"62×110 " 〖"mm" 〗^"2" 和"57×105 " 〖"mm" 〗^"2" 之大尺寸OLED元件,藉由調變製程參數,提高元件薄膜均勻性及穩定度。
本論文藉由調變刮刀塗佈技術其塗佈速度與利用不同有機層材料及有機溶劑優化薄膜之均勻性;並於單層結構中使用電子傳輸材料EPH409、改變陰極CsF/Al之蒸鍍條件、增加電洞注入層及發光層厚度與蒸鍍絕緣材料SiO材料,進而提升元件穩定性,目前元件測試最佳穩定性已持續點亮約400個小時。而此大面積OLED元件發光面積為"57×105 " 〖"mm" 〗^"2" 。
Organic Light Emitting Diodes(OLEDs) are usually fabricated by vacuum deposition. The vacuum deposition need strict process environmental conditions. This process needs expensive equipment, and the low utilization ratio of material. It is difficult to mass-fabric -ate large-area OLEDs in the future. Our lab developed the liquid process of continuous delivery blade coating and multi-delivery blade coating. This solution-processable blade coating don’t need strict process environmental conditions, and have high utilization ratio of material. The production cost of the OLEDs will be significantly reduced. The main objective of this thesis was using this blade coating to fabricate large-area OLEDs with a size of "62×110 " 〖"mm" 〗^"2" and "57×105 " 〖"mm" 〗^"2" . The thin film uniformity and stability of devices were improved by optimizing the experimental parameters.
Optimizing thin film uniformity by blade coating speed adjustment and changing sol -vent of the organic material solution. Some experimental method can improve devices st -ability include the following: replacing electron transport material of the single layer stru -cture with EPH409, adjusting CsF/Al electrode deposition conditions, hole injection layer and emission layer increase thickness, evaporating SiO on base. ,Devices operated is up to 400 hours.
摘要 III
ABSTRACT IV
誌謝 V
目錄 VI
圖目錄 VIII
表目錄 X
第一章 緒論 1
1.1 前言 1
1.2 有機發光二極體歷史簡介 2
1.3 研究動機與方向 3
1.4論文架構 5
第二章 有機發光二極體基礎理論及有機材料介紹 6
2.1有機材料之能量轉移機制 6
2.1.1螢光與磷光理論 6
2.1.2主客發光體之能量轉換機制 10
2.2 有機發光二極體元件結構與發光原理 12
2.2.1 元件結構 12
2.2.2 元件發光原理 14
2.2.3元件操作電壓與電流機制 15
2.2.4 元件發光效率 17
2.3 有機材料介紹 18
2.3.1 電洞注入材料(Hole injection material) 18
2.3.2 電洞傳輸材料(Hole transport material) 19
2.3.3 主客體發光體材料(Host material and guest material) 20
2.3.4 電子傳輸材料(Electron transport material) 22
第三章 有機發光二極體製作流程 24
3.1 ITO基板蝕刻流程 24
3.2 有機層塗佈-刮刀塗佈技術 29
3.3 蒸鍍陰極金屬 35
3.4 元件封裝 37
3.5 元件量測 39
3.5.1電性量測 39
3.5.2 壽命量測 40
第四章 大面積有機發光二極體製程介紹 42
4.1 連續下料刮刀塗佈液態製程 42
4.1.1 連續下料裝置系統介紹 42
4.1.2 連續下料刮刀塗佈液態製程之流程 45
4.2 多點下料刮刀塗佈液態製程 48
4.2.1 多點下料刮刀塗佈用具介紹 48
4.2.2 多點下料刮刀塗佈液態製程之流程 50
4.3 連續下料及多點下料刮刀塗佈製程之比較 52
第五章 實驗設計與結果討論 53
5.1 大面積OLED元件膜面改善 53
5.1.1 降低刮刀速度 54
5.1.2 有機層材料溶液之混和溶劑 56
5.1.3 有機層材料溶液改以低沸點之溶劑 58
5.2 提升大面積OLED元件穩定性 60
5.2.1單層結構中之電子傳輸材料改換成EPH409 61
5.2.2 改變陰極CsF/Al之蒸鍍條件 63
5.2.3增加電洞注入層與發光層厚度 69
5.2.4 元件周圍蒸鍍SiO材料 73
第六章 結果與未來展望 77
第七章 參考文獻 80

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