本研究主旨在於開發在塑膠基板上製作週期性排列的金屬奈米結構之製程，並透過對基板施以等向性拉伸的方式改變奈米金屬結構的排列週期、調變奈米金屬的表面電漿共振，達成單一初始表面電漿子共振(Surface Plasmon Resonance, SPR)濾光設計卻支援多種濾光效果的目標。本研究基於前期研究之設計基礎，開發電子束微影、真空鍍膜、熱壓轉印及彈性形變等製程，驗證以應變切換SPR 濾光效果的可行性。結果證明在5%應變下，小週期的藍色SPR 逐漸切換成綠色SPR，證實提案設計使用於濾光片及顯示系統之應用。
此外，本研究亦詳細評估了等向應變於有機材料在非等向拉伸時之範圍，並以決定係數觀察SPR 之週期變化，最終量化等向應變之區域，除了說明SPR 的應用範圍之外，亦暗示了應變對SPR 濾光色純度之貢獻。

This research presents a method for transferring nanostructures to
plastic substrate via thermal imprint, and by providing isotropic strain on the plastic substrate to modify the patterning pitch of the periodic nanostructures on top, switching of SPR color performance with a single initial structure design was successfully demonstrated. This research inherits the design basis from previous works, and developed the complete process of e-beam lithography, vacuum metal deposition, thermal imprinting, and isotropic deformation technique. Finally proving the possibility of tunable SPR color filtering, by demonstrating the switching of the initial periodical structure that shows blue SPR, into green SPR with 5% strain, hinting at the application for color filters and display systems.
Additional analysis of isotropic strain boundary when a plastic substrate is under anisotropic strain is also investigated. The coefficient of determination was used to observe the patterning period of SPR structures, defining the outermost location of isotropic strain region and providing the IV application area limit of SPR color filter. This analysis also hints at the effects of strain on SPR color purity.

摘要........................................I
Abstract .................................III
致謝 .......................................V
目錄 .....................................VII
圖目錄 ....................................XI
符號表 ....................................XV
第一章 緒論 ................................1
1.1 前言 ...................................1
1.2 電漿子濾色 .............................2
1.3 等向性拉伸技術 .........................3
1.4 研究動機 ...............................4
1.5 文獻探討 ...............................5
1.5.1 電漿子濾色研究 .......................5
1.5.2 平面等向拉伸研究 .....................6
第二章 理論與設計 .........................21
2.1 表面電漿子 ............................21
2.1.1 表面電漿子理論 ......................21
2.1.2 金屬結構設計 ........................23
2.2 電漿子材料分析 ........................24
2.2.1 德汝德金屬模型(Drude Model) .........24
2.2.2 電漿子頻率與頻寬 ....................25
2.3 奈米轉印 ..............................26
2.4 二維拉伸分析 ..........................27
2.4.1 力學分析模型 ........................27
2.4.2 等向環狀拉伸邊界 ....................28
第三章 實驗製程 ...........................47
3.1 電子束微影 ............................47
3.1.1 電子束光阻 ..........................48
3.1.2 電子散射 (Electron Scattering) ......50
3.2 金屬鍍膜 ..............................51
3.2.1 射頻濺鍍系統 ........................51
3.2.2 電子槍蒸鍍 ..........................51
3.3 熱壓轉印 ..............................52
3.4 拉伸系統 ..............................53
第四章 量測結果與分析 .....................73
4.1 量測系統 ..............................73
4.1.1 掃描式電子顯微鏡 ....................73
4.1.2 顯微鏡光譜儀 ........................74
4.2 熱壓轉印結果 ..........................74
4.3 濾光顏色效果 ..........................75
4.3.1 轉印前之電漿子顏色 ..................75
4.3.2 拉伸前後之電漿子顏色 ................76
第五章 結論與未來展望 .....................89
5.1 結論 ..................................89
5.2 未來展望 ..............................90
參考文獻 ..................................91
發表清單 ..................................95

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