在轉軸系統中往往因為轉軸本身的偏擺而造成整個系統產生振動問題。實際加工時，轉軸本身可能因為加工件所產生之反作用力或是加熱時所產生之高熱而造成變形及位移，此位移及振動問題將對加工精度產生很大的影響。目前大部分的轉軸動態量測方法使用如加速規、電容感測器以及渦電流探頭等感測器來量測出轉軸的加速度、角速度或是位移，並回授至系統。
本論文引入來自硬碟量測讀寫頭偏擺位置的編碼技術、以及工業編碼器中技術成熟之增量式編碼技術，將以上量測方法套用在轉軸的動態量測以及分析上。藉由在轉軸徑向周圍進行磁性編碼，透過特殊的解碼方式就能判斷轉軸的軸向位移程度。本文透過一系列的實驗來量測上述特殊編碼方式在轉軸旋轉時的訊號，並驗證其用來判斷位移量的可行性。
本論文目標在於開發適用於超過3000rpm～24000 rpm之高轉速轉軸的軸向位移及時感測器。其中內容包括編碼方式設計、充磁刀及充磁平台設計、量測裝置設計以及訊號處理及分析，並以工業規格之產品開發為目標。

Vibration issue in rotating system has existed mostly due to imbalance response of a rotating shaft. During machining, reaction force from workpiece or friction heat may cause deformation or displacement of machine tool spindle. Vibration and displacement problem will have huge impact on the precision of machining. In general, accelerometers, capacity sensors or eddy current probes are commonly used to measure the shaft’s dynamic changes in form of acceleration and displacement.
Two kinds of Magnetic patterns which are originated from coding and operating algorithm of hard disk drive and industrial magnetic encoder are compared and applied on measuring and analyzing dynamic response of rotating shaft system. By magnetizing the pattern on magnetic medium surrounded on the rotating shaft, analog signal can be acquired to determine the shaft’s axial and displacement.
In this paper, a method of dynamic measuring on rotating shaft is proposed by using magnetic pattern and validated through calibrated experiments.
The purpose of this paper is to develop a real-time axial displacement sensor for rotating shaft up to 3000 ~ 24000 rpm. Magnetic pattern, magnetizing head, magnetizing platform, measuring device and signal process and analysis are included. The sensor is developed using specification as an industrial product.

摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章　緒論 1
1.1 前言 1
1.2 技術背景與產品現況 2
1.3 文獻回顧 4
1.4 動機與目的 17
1.5 研究方法 18
第二章　PES編碼及實驗 19
2.1　PES感測原理 19
2.2　PES充磁 21
2.3　PES線性實驗 24
2.4　PES環形實驗 25
2.5　PES實驗結果 28
第三章　增量式編碼感測原理 30
3.1 前言 30
3.2 Lissajous Curve 32
3.3 磁阻感測器 34
3.4 量測高度（Flying Height） 35
3.5 線性磁條應用至轉軸 36
第四章 連續增量式編碼充磁 38
4.1 充磁原理 38
4.2 充磁刀設計 39
4.3 永久磁鐵模擬 40
4.4 線性充磁平台設計 42
4.5 環形充磁平台設計 46
4.6 充磁驗證 48
第五章　實驗量測與驗證 49
5.1 實驗架設 49
5.2 訊號處理與分析 56
5.3 實驗結果 63
第六章　結論與未來工作 65
6.1 現階段實驗結論 65
6.2 未來工作 66
參考文獻 68

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