本研究之主要目的為提升偏移電容式觸覺感測器之空間解析度(Spatial Resolution)與靈敏度(Sensitivity)，藉此提升感測器之性能。
近年來，隨著物聯網的推動與實行，感測器在其中的感知層扮演著收集資訊的重要角色，為物聯網的基礎，為了迎合市場與日俱增的需求，感測技術的開發儼然成為研究重點。本研究藉由下述幾項對觸覺感測器性能進行改善：(1) 透過共用電極對的方式，組成新的感測單元，在不損失感測靈敏度的情況下提升元件的空間解析度；(2) 在固定元件面積的前提下，利用田口法更改中間結構層各項參數，支撐層高度、厚度、PDMS的楊氏係數、電極面積、凸塊尺寸，以提升感測靈敏度。
本研究結果顯示，空間解析度透過共用電極對的方式會隨著應用面積不同而有所提升，最低由2.25倍提升到最高可達4倍。而透過田口法對元件進行最佳化設計，有效地增加正向力與剪力之靈敏度，分別提升1.43及1.31倍。

This research aims to enhance spatial resolution and sensitivity for capacitive tactile sensors.
In recent years, with the promotion and implementation of the Internet of Things, the sensor plays an important role in the perception layer to collect information for the Internet of Things. In order to meet the growing market demand, sensing technology development has become a important point for research. In this study, the performance of the tactile sensor is improved by: (1) the new sensing element is formed by the common electrode pair, and the spatial resolution of the element is improved without loss of sensing sensitivity. (2) Under the same area of the element, the parameters (,including the height of the spacer layer, the thickness of the PDMS, the electrode area and the bump size) were changed by Taguchi method to improve the sensitivity.
In this work, the spatial resolution was improved from 2.25 times to upgrade up to 4 times. And by using the Taguchi method to optimize the design of components, increase the normal force and shear force sensitivity by 1.43 and 1.31 times respectively.

摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
表目錄 XI
第一章 緒論 1
1.1 前言 1
1.2 研究動機 3
1.3 文獻回顧 5
1.3.1 感測機制 5
1.3.2 觸覺感測器之發展 10
1.4 本文架構 19
第二章 觸覺感測器之設計與模擬分析 20
2.1 平行板電容值之推導 20
2.1.1 單一介電材質之電容值推導 20
2.1.2 多介電材質之電容值推導 21
2.2 觸覺感測器之設計 22
2.2.1 電極設計 23
2.2.2 感測靈敏度 25
2.2.3 空間解析度 25
2.2.4 降低扭矩造成之角度量測誤差 26
2.2.5 重複利用電極對組成新的感測單元 29
2.3 角度演算法 32
2.4 電極配置優化 36
2.5 模擬分析 38
2.5.1 不同尺寸下感測器之靈敏度 39
2.5.2 正向力模擬結果 40
2.5.3 剪力模擬結果 42
2.5.4 剪力角度模擬結果分析 50
2.5.5 電極配置優化模擬結果 50
第三章 田口法實驗設計 53
3.1 實驗設計簡介 53
3.2 田口法實驗規劃設計 54
3.3 田口法之模擬分析 58
第四章 元件製作流程 63
4.1 元件製程說明 63
4.2 元件製程步驟 64
4.2.1 電極製作 66
4.2.2 PDMS支撐層結構製作 67
4.2.3 多層結構對準與黏合 69
4.2.4 製程所遭遇困難 71
第五章 研究結果與討論 74
5.1 實驗平台介紹 74
5.2 提升空間解析度設計之量測結果 76
5.2.1 正向力量測結果 76
5.2.2 剪力量測結果 78
5.3 田口法實驗設計之量測結果 86
5.3.1 正向力量測結果 87
5.3.2 剪力量測結果 88
第六章 結論與未來展望 90
6.1 結論 90
6.2 未來展望 91
參考文獻 92

[1] "https://www.census.gov/popclock/," August, 2017.
[2] C. R. Wottawa, B. Genovese, B. N. Nowroozi, S. D. Hart, J. W. Bisley, W. S. Grundfest, et al., "Evaluating tactile feedback in robotic surgery for potential clinical application using an animal model," Surgical Endoscopy, vol. 30, pp. 3198-3209, 2016.
[3] N. Luo, J. Ding, N. Zhao, B. H. K. Leung, and C. C. Y. Poon, "Mobile Health: Design of Flexible and Stretchable Electrophysiological Sensors for Wearable Healthcare Systems " in International Conference on Wearable and Implantable Body Sensor Networks, 2014, pp. 87-91.
[4] Y. Huang, H. Yuan, W. Kan, X. Guo, C. Liu, and P. Liu, "A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications," Microsystem Technologies, vol. 23, pp. 1847-1852, 2017.
[5] "http://www.pressureprofile.com," June, 2017.
[6] "http://weiss-robotics.com," June, 2017.
[7] "http://syntouchllc.com," June, 2017.
[8] 鍾易宸, "偏移電容式觸覺感測器之誤差分析與電極設計改良," 國立清華大學動力機械工程系碩士論文, 2013.
[9] M. Takasaki, Y. Fujii, H. Kotani, T. Mizuno, and T. Nara, "Proposal of Tele-touch Using Active Type SAW Tactile Display," Intelligent Robots and Systems, Beijing, China, 9-15 October, 2006.
[10] E.-S. Hwang, J.-h. Seo, and Y.-J. Kim, "A Polymer-Based Flexible Tactile Sensor for Both Normal and Shear Load Detections and Its Application for Robotics," Journal of Microelectromechanical Systems, vol. 16, pp. 556-563, 2007.
[11] H.-J. Kwon and W.-C. Choi, "Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining," Microsystem Technologies, vol. 16, pp. 2029-2035, 2010.
[12] Y. Jung, D.-G. Lee, J. Park, H. Ko, and H. Lim, "Piezoresistive Tactile Sensor Discriminating Multidirectional Forces," sensors, vol. 15, pp. 25463-25473, 2015.
[13] A. Manbachi, "Development and application of piezoelectric materials for ultrasound generation and detection," Ultrasound, vol. 19, pp. 187-196, 2011.
[14] M.-S. Kim, H.-R. Ahn, S. Lee, C. Kim, and Y.-J. Kim, "A dome-shaped piezoelectric tactile sensor arrays fabricated by an airinflation technique," Sensors and Actuators A: Physical, vol. 212, pp. 151-158, 2014.
[15] H. B. Muhammad, C. Recchiuto, C. M. Oddo, L. Beccai, C. J. Anthony, M. J. Adams, et al., "A capacitive tactile sensor array for surface texture discrimination," Microelectronic Engineering, vol. 88, pp. 1811-1813, 2011.
[16] "http://www.a-touch.com.tw/c_product-saw.htm," August, 2017.
[17] "http://www.gtouch.com.tw/main-tw.html," August, 2017.
[18] H.-K. Lee, J. Chung, S.-I. Chang, and E. Yoon, "Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor," Journal of Micromechanics and Microengineering, vol. 21, pp. 1-9, 2011.
[19] G. Liang, Y. Wang, D. Mei, K. Xi, and Z. Chen, "An analytical model for studying the structural effects and optimization of a capacitive tactile sensor array," Journal of Micromechanics and Microengineering, vol. 26, pp. 1-13, 2016.
[20] W.-Y. Chang, T.-H. Fang, H.-J. Lin, Y.-T. Shen, and Y.-C. Lin, "A Large Area Flexible Array Sensors Using Screen Printing Technology," Journal of display technology, vol. 5, pp. 178-183, 2009.
[21] P. Peng, R. Rajamani, and A. G. Erdman, "Flexible Tactile Sensor for Tissue Elasticity Measurements," Journal of Microelectromechanical Systems, vol. 18, pp. 1226-1233, 2009.
[22] J. G. V. d. Rocha, P. F. A. d. Rocha, and S. Lanceros-Mendez, "Capacitive Sensor for Three-Axis Force Measurements and Its Readout Electronics," IEEE Transactions on Instrumentation and Measurement, vol. 58, pp. 2830-2836, 2009.
[23] Y.-C. Wang, T.-Y. Chen, R. Chen, and C.-Y. Lo, "Mutual Capacitive Flexible Tactile Sensor for 3-D Image Control," Journal of Microelectromechanical Systems, vol. 22, pp. 804-814, 2013.
[24] 張崇豪, "應用田口方法於撲翼機之設計," 國立成功大學航空太空工程研究所碩士論文, 2010.
[25] 簡于涵, "於曲面下操作之軟性觸覺感測器特分析," 國立清華大學動力機械工程學系碩士論文, 2013.
[26] Z. Wang, "Polydimethylsiloxane Mechanical Properties Measured by Macroscopic Compression and Nanoindentation Techniques," Master Thesis, University of South Florida, 2011.
[27] Y.-C. Chen, T.-Y. Ko, and D.-S. Wang, "Simultaneous Optimisation of Multiple Quality Characteristics Combining Taguchi and TOPSIS Method," International Symposium of Quality Management, Kaohsiung, Taiwan 8 November, 2008.
[28] B. N. J. Persson, "Adhesion between Elastic Bodies with Randomly Rough Surfaces," Physical review letters, vol. 89, 2002.
[29] M.-Y. Cheng, C.-L. Lin, Y.-T. Lai, and Y.-J. Yang, "A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement," Sensors, vol. 10, pp. 10211-10225, 2010.
[30] K. YC1, H. KW, F. YJ, and C. PY, "Fabrication of 3D high aspect ratio PDMS microfluidic networks with a hybrid stamp," Lab on a Chip, vol. 15, pp. 1861-1868, 2015.
[31] K. D. Vora, B. Lochel, E. C. Harvey, J. P. Hayes, and A. G. Peele, "AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography," Journal of Micromechanics and Microengineering, vol. 16, pp. 1975-1983, 2006.