摘要
隨著科技發展，人們對加工精度的需求更加嚴苛以適應3C產業、電子通訊、光學零件、醫療器械等產業之次微米加工需求,經常會採用液靜壓系統作為軸承設計。毛細管節流器的研究發展已經趨於成熟，本研究設計一孔口節流器補償之液靜壓旋轉平台，以應用於高精密磨床工具機，提升國內工具機產業的競爭力。
本計畫透過雷諾方程式搭配有限差分法之概念，建立理論模型，以分析液靜壓軸承工作流膜的壓力分佈狀況。經模擬程式計算，比較油膜性能後，採用封閉式的液靜壓止推軸承搭配液靜壓軸頸軸承來抵抗軸向與徑向的外部負載。在此基礎上，透過程式模擬比較毛細管節流器與孔口節流器性能。最後完成液靜壓旋轉平台的加工製作，並將旋轉平台實驗量測到的結果與模擬值進行比對，來驗證模擬分析的結果。



關鍵字：旋轉工作平台、液靜壓軸承、雷諾方程式、節流器性能比較

Abstract
With the need of high accuracy, hydrostatic bearing is often used in rotary table because of its high capacity, high stiffness and high damping. The research of capillary restrictor has developed for a long time. In this thesis, i will design a Orifice-compensated hydrostatic rotary table for high precision circular grinding machine.
In this thesis, the pressure distribution and hydrostatic bearing performance are obtained by solving the Reynolds equation with Finite difference method. After simulation, we designed an opposed hydrostatic thrust bearing and a hydrostatic journal bearing for the rotary table. Through the program simulation, we can find different performance between capillary restrictor and orifice restrictor. Finally, complete the process of hydrostatic rotary table and compare the different between experimental results and simulated results.

Keywords: Rotary table , Hydrostatic bearing , Reynolds equation , Performance comparison of restrictor.

目錄
摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章 序論 1
1-1. 研究背景 1
1-2. 研究動機 2
1-3. 研究目的 3
第二章 文獻回顧 4
2-1. 液靜壓軸承的研究 4
2-2壓力調節機制 8
2-3. 軸頸式液靜壓軸承之研究 11
2-4. 圓形墊止推式液靜壓軸承之研究 16
第三章 研究方法與步驟 20
3-1. 研究步驟 20
3-2. 理論分析 21
3-3. 模擬方法 27
3-3-1. 有限差分法-液靜壓軸頸軸承 28
3-3-2. 邊界條件與求解 34
3-3-4. 有限差分法-液靜壓止推軸承 38
3-4 程式計算流程 42
第四章 旋轉平台設計與模擬性能分析 44
4-1. 液靜壓旋轉平台設計 44
4-2.封閉式液靜壓止推軸承性能分析 47
4-2-1.封閉式液靜壓止推軸承性能分析（毛細管節流器） 47
4-2-2.封閉式液靜壓止推軸承性能分析（使用孔口節流器） 50
4-2-3. 液靜壓軸頸軸承（使用毛細管節流器） 54
4-2-4. 液靜壓軸頸軸承（使用孔口節流器） 58
4-3.旋轉平台及軸承變形模擬結果 60
4-4. 節流器設計與檢測 62
4-4-1.毛細管節流器設計與檢測 62
4-4-2.孔口節流器設計與檢測 66
第五章 實驗規劃與結果 69
5-1.軸向油膜剛性量測 70
5-2.回轉精度量測 78
5-3.旋轉平台溫度與流量變化量測 84
第六章 結論 92
6-1 結論 92
6-2 未來展望 93
參考文獻 95

參考文獻
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