鑽石薄膜具有優異的機械性質，而且可以透過調整成長參數提升薄膜透光度。本研究使用市售的康寧玻璃為基板，利用超音波聲震法在基板上孕核，之後再以微波電漿輔助化學氣相沉積法(MPECVD)沉積鑽石薄膜。研究中將探討成長時間及成長氣氛對於鑽石薄膜微結構及光學性質、機械性質之影響。
經實驗後發現30 %氫氣成長之奈米鑽石薄膜抗磨耗表現最佳，且確實大幅提升玻璃基材抗磨耗程度，且發現其薄膜脫落狀況為整片脫落，此因碳/碳間的鍵結力遠超過鑽石薄膜和基板間的附著力。接著分析鑽石薄膜透光度，在固定厚度的情形下，光穿透率最高者是以30 %氫氣成分所成長的奈米鑽石薄膜，可以達到接近75%的可見光穿透率。此外，本研究亦發現以98 %氫氣成分所成長的微米鑽石薄膜穿透率遠小於奈米鑽石薄膜，推測因為微米鑽石的表面粗糙度較大，使光產生散射所致。最後本研究亦以旋轉塗佈法將聚醯亞胺(PI)塗於玻璃基板背面，其可以進一步大幅降低光波長為350 nm的穿透率。綜合以上結論，將鑽石薄膜成長在玻璃基板且背面塗佈適當的材料，將可應用在高光穿透率且抗特定短波長的手機保護膜。

Diamond has attracted tremendous attention owing to its outstanding mechanical and optical properties. This work reports preparation of diamond films on commercial glass substrates to enhance their wear resistance. In order to increase nucleation sites for promoting growth of diamond films, pretreatment of the glass substrates is carried out by ultrasonication. Two types of diamond films, including microcrystalline diamond (MCD) and nanocrystalline diamond (NCD), are prepared on the pretreated glass substrates by microwave plasma-enhanced chemical vapor deposition. The study on abrasion test reveals that NCD sample grown under the hydrogen atmosphere with a concentration of 30 % (assigned as NCD30) possesses strongest wear resistance.
Ultraviolet visible (UV-Vis) spectroscopy measurement indicates the NCD30 sample with a thickness of 600 nm exhibits highest transmittance of ~75% in visible region. It is also found that transmittance of the MCD is much lower than that of NCD under the same thickness, possibly attributing to rough surfaces of MCD causing a strong light scattering.
Moreover, we find that an additional spin-coated polyimide (PI) thin film on the opposite side of the glass substrate results in significant reduction in transmittance of the sample at a wavelength of 350 nm. Our study therefore demonstrates that the NCD films not only provide extra wear resistance to glass substrate but also possess high potential for applications in anti-UV and blue light 3C screen protector when collaborate with PI coating.

摘要 I
Abstract II
致謝 III
第一章 緒論 1
第二章　文獻回顧 2
2.1 鑽石的基本性質及應用 2
2.2 鑽石膜的簡介 3
2.2.1 人工鑽石的演進 3
2.2.2 鑽石薄膜的分類 4
2.3 鑽石膜的成長機制 5
2.3.1 基板成核的前處理 5
2.3.2 基板的選擇 7
2.3.3 基板和鑽石膜的附著性 8
2.3.4 以化學氣相沉積鑽石薄膜 10
2.3.5 鑑定鑽石薄膜 12
2.4 鑽石膜的機械性質 14
2.4.1磨耗之定義與分類 14
2.4.2 磨耗機台分類 16
2.4.3 材料的硬度 17
2.5 鑽石膜的光學性質 18
2.5.1 光的介紹 18
2.5.2 光穿透率的介紹 20
2.5.3 高分子之能階躍遷 20
第三章　實驗分析及方法 28
3.1 鑽石薄膜的成長 28
3.1.1 基板的成核前處理 28
3.1.2 沉積奈米鑽石薄膜 29
3.1.3 沉積微米鑽石薄膜 30
3.2 線性磨耗機的使用 30
3.3 鉛筆硬度測試機的使用 32
3.4 桌上型旋轉塗佈機的使用 32
3.5 材料特性分析工具 33
3.5.1 微波電漿輔助化學氣相沉積系統 34
3.5.2 超音波震盪器 34
3.5.3 場發射掃描式電子顯微鏡 34
3.5.4 拉曼光譜儀 35
3.5.5 薄膜厚度輪廓測量儀 35
3.5.6 原子力顯微鏡 36
3.5.7 光學顯微鏡 36
3.5.8 可見光紫外光分光光譜儀 36
第四章　結果與討論 42
4.1 鑽石薄膜的成長與鑑定 42
4.1.1 表面形貌分析 42
4.1.2 拉曼光譜儀的分析 43
4.2 鑽石薄膜的磨耗 45
4.2.1光學顯微鏡和掃描式電子顯微鏡表面形貌分析 45
4.2.2 薄膜厚度輪廓量測儀的分析 48
4.2.3拉曼光譜儀的差別 49
4.2.4紫外光可見光分光光譜儀之磨耗試片光穿透率比較 49
4.2.5磨耗試驗前後表面粗糙度比較 50
4.2.6磨耗指數和磨耗量 50
4.3 鉛筆刮痕硬度試驗 51
4.4 鑽石薄膜對光穿透率之討論與比較 51
4.4.1 基板對穿透度的影響 52
4.4.2 奈米鑽石薄膜的透光度比較 52
4.4.3 微米鑽石薄膜的透光度比較 53
4.4.4 奈米鑽石薄膜和微米鑽石薄膜的穿透率比較 54
4.4.5 表面粗糙度對穿透率的影響討論 55
4.4.6 聚酰亞胺薄膜旋塗於玻璃基板之透光度比較 56
第五章 結論 79
參考文獻 81

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