在切削工業中，添加一個柔軟的金屬介層已經成為一道標準程序來解決附著性的問題。本研究的目的在探討鈦介層厚度對氮化鈦鋯薄膜之各層殘留應力、附著力及耐磨性的影響，儲存能對薄膜耐磨性的影響也一併被探討。介層的影響藉由比較單層氮化鈦鋯及雙層氮化鈦鋯薄膜之機械性質來評估，結果顯示添加250奈米鈦介層可以略為降低上層氮化鈦鋯薄膜之殘留應力，及稍微提升耐磨性，但是會降低薄膜附著力，而氮化鈦鋯薄膜之磨耗率隨儲存能上升而線性增加。儲存能結合了薄膜殘留應力及膜厚的效應，故在相同材料中可以比H/E比更加精準的預測耐磨性。在本研究中，添加鈦介層效益不明顯的原因可以被歸咎於上層氮化鈦鋯薄膜的殘留應力太大，因此降低上層薄膜的殘留應力應該會是比添加介層更好的方法。

In the tooling industry, adding a soft metallic interlayer was a standard procedure to solve the adhesive problem. This study investigated the effect of Ti interlayer thickness on the residual stress of both layers, adhesion strength and wear resistance of TiZrN films. The applicability of stored energy on wear resistance of the coatings was also investigated. The effect of Ti interlayer thickness was evaluated by comparing the mechanical properties of TiZrN films with different Ti interlayer thickness. Introducing 250 nm Ti interlayer slightly reduced the residual stress of TiZrN top layer and the wear resistance slightly increased but lowered the adhesion strength. The wear rate of the TiZrN coatings linearly increased with stored energy. Stored energy combined effects of residual stress and thickness of the coatings and provided more accurate prediction of wear resistance than H/E ratio for the same kind of films materials. In our study, the insignificant benefits of Ti interlayer deposition were discussed and can be attributed to high level residual stress of TiZrN top layer. Therefore, instead of adding Ti interlayer, the decrease of residual stress of TiZrN top layer may be a better approach.

致謝 I
摘要 III
Abstract IV
Contents V
List of Figures VIII
List of Tables X
Chapter 1 Introduction 1
Chapter 2 Literature review 3
2.1. Characteristic of transition metal nitride coatings (binary metal nitride) 3
2.2. Characteristic of TiZrN coatings 6
2.2.1. Microstructure of TiZrN coatings 6
2.2.2. Properties of TiZrN coatings 7
2.3. Effect of metallic interlayer 8
2.3.1. Effect of metallic interlayer on microstructure 9
2.3.2. Effect of metallic interlayer on residual stress of coating 9
2.3.3. Effect of metallic interlayer on Adhesion improvement of coating 10
2.3.4. Effect of metallic interlayer on wear resistance of coating 11
2.4. Mechanical properties of coating 12
2.4.1. Adhesion strength of coating 12
2.4.2. Wear behavior of coating 12
Chapter 3 Experimental details 15
3.1. Substrate preparation 15
3.2. Deposition procedures 15
3.3. Analytical methods for composition and structure 19
3.3.1. Composition 19
3.3.2. Crystal structure 20
3.3.3. Microstructure 21
3.3.4. Surface morphology and roughness 22
3.3.5. Wettability 23
3.4. Characterization methods for properties 25
3.4.1. Hardness and Young’s modulus 25
3.4.2. Residual stress: AXS method 25
3.4.3. Adhesion 27
3.4.4. Wear resistance 28
Chapter 4 Results 31
4.1. Structures 34
4.1.1. Chemical composition 34
4.1.2. Crystal structure 34
4.1.3. Microstructure 38
4.1.4. Surface morphology and roughness 41
4.1.5. Wettability 43
4.2. Properties 45
4.2.1. Hardness and Young’s modulus 45
4.2.2. Residual stress 46
4.2.3. Adhesion 48
4.2.4. Wear resistance 52
Chapter 5 Discussion 60
5.1. Effect of Ti interlayer on coating 60
5.1.1. Effect of Ti interlayer on residual stress of coating 60
5.1.2. Effect of Ti interlayer on adhesion of coating 65
5.2. Wear resistance of coating 67
5.2.1. Stored energy of coating 68
5.2.2. Effect of stored energy and H/E ratio on wear resistance of coating 69
5.3. Effect Ti interlayer on wear resistance of coating 71
Chapter 6 Conclusions 72
Reference 73
Appendix A 80
Appendix B 82

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