矽基體奈米線(以下簡稱奈米線)乃ㄧ有趣並經過充分研究的一維 奈米結構物。自從於 2001 年該元件被引入生物量測領域，奈米線就被 賦予高度期望，能成為具有高靈敏度、即時性和不需生物標記等優勢 的生物分子感測元件。雖然如此，目前仍有有物性和化性上的因素， 限制了奈米線的良率和實用性。如今，許多研究採用了積體電路的技 術，設計出在概念上和目的上不同的電路，來解決奈米線所遇到的問 題和應付特定的需求。
我們使用由交大楊裕雄老師的奈米線元件和一部分量測資料，設計 出一套元件訊號讀取電路。本篇研究首先進行生物實驗和電性量測的 數據分析，接著根據分析結果來訂出電路的規格和進行電路設計。
我們的電路可以進行直流掃描量測(DC-sweep)和暫態量測(Transient measurement)。並且，藉由結合此二量測，我們提出一套元件量測方 式。這個量測方式被認為具有減輕因製程變異性而導致的元件差異問 題(Device Variability)的能力。目前，該量測方式多採用手動操作，我 們希望日後能引入數位電路於系統性架構，使量測能夠自動化。

Poly-silicon nanowire (SiNW) is a well-studied and interesting one-dimensional nanostructure. Since it was introduced to the biosensor field in 2001, it has become a promising candidate for ultra-sensitive, real-time and label-free sensor device. Nevertheless, many physical and chemical challenges constrain nanowire from being robust and practical. Nowadays, many studies adopt the integrated-circuit techniques to solve the problems. Circuits with different design concepts and purposes are proposed to meet practical needs.

In this thesis, based on the nanowire designed by Prof.Yang (National Chiao Tong University), we design our own read-out circuit. This research first analyzes biological experiments results (From Prof.Yang) and the electrical characteristics of the nanowires. The circuit specification and design are then based on these data analysis.

The circuit is capable of performing both DC-sweep ($I_D$-$V_G$ sweep) and transient measurement. Moreover, we proposed a measurement method a combining of these two functions. We believe this method mitigates the device variability induced by the fabrication process. Currently, most operations in this method are manual. We hope to make them automatic in the future by inducing digital circuits and constructing a system-level structure.

Abstract ......... i
中文 ......... ii
List of Figures ......... vii
List of Tables ......... xiii
1 Introduction ......... 1
2 Literature Review & Theory Description ......... 4
3 Nanowire Structure and Measurement ......... 18
4 Discrete Circuitry Design ......... 34
5 Integrated Circuitry Design ......... 40
6 Circuit Results Discussion and Summary ......... 65
7 Conclusion and Future Work ......... 90
Bibliography ......... 93

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