業界對於精密加工技術的需求愈加增長，液靜壓技術以其高精密度成爲備受矚目的解決之道。軸頸式液靜壓線性滑軌系統以其相對簡單的設計，良好的方向性抵抗力以及平滑的加工精度曲線成爲滿足需求之現實可行的系統。液靜壓系統需要節流器來調節油腔壓力，以往系統中一般使用毛細管節流器，而研究發現在相近的成本和製作複雜度情況下，使用孔口節流器性能較毛細管節流器有所提升，故本研究使用帶毛細管節流器以及孔口節流器的軸頸式液靜壓線性滑軌平臺作為研究對象討論性能表現。
本研究完成了軸頸式液靜壓線性滑軌的性能模擬、機台設計改良、原型機台實驗。模擬的部分有滑軌的幾何尺寸與變形量的關係，毛細管節流器與孔口節流器的性能對比；設計部份則是在先前結果基礎之上，以模擬的方式判斷所設定參數所產生之性能，決定參數後，再進行軸承之設計，設計時也將業界需求考慮進去；實驗的部分則是判斷模擬與真實狀況的差異，並討論造成與模擬結果存在差異的可能原因。驗證試驗數據體現了原型機臺的性能預期接受範圍內。

The requirement of high precision manufacture is increasing, the Hydro-static technology is attracted much attention as an solution. The Linear guide way system is as an easily design for its advantage of low friction, directional resistance and higher precision control capability, which is realistic and feasible. The restrictor is used for the regulation of Hydro-static system, the capillary is usually used in common, we found that in the same level of cost and complex manufacture, some research shows that the orifice gives a promotion for the system. This study is based on the Linear guide way system prototype within capillary regulation and orifice regulation, for performance discussion.
This study shows that the simulation results of performance of linear guide way, some design improvement, and the experiment of prototype. In the simulation part, the geometric dimensioning has a tight relationship with deformation of fuild-film, the comparative study between capillary and orifice is also done. In the Design part, based on the previous lab research, we determine the optimized parameters to design, when the industry standard was also taking into account. In the experiment part, the results is made comparison with the simulation, and the difference is discussed. The study finally shows that the performance of prototype is acceptable.

摘要 1
Abstract 2
致謝 3
文章目錄 4
圖表目錄 8
Figure 8
Table 12
第1章. 緒論 1
1.1 研究背景 1
1.2 研究動機 6
1.3 研究目的 7
第2章. 文獻回顧 9
2.1 液靜壓軸承的工作原理 9
2.2 液靜壓軸承的相關研究與應用 11
2.3 軸頸式液靜壓軸承類型及研究 13
2.3.1類型 14
2.3.2相關參數研究 16
2.4 壓力調節機制分類 20
2.4.1毛細管與孔口調節 22
2.4.2 滑閥調節 24
2.4.3 薄膜調節 25
2.4.4 常流調節 29
2.4.5 本質調節 30
2.5 液靜壓軸承的節流器 31
2.6 本章結論 34
第3章. 研究方法與步驟 36
3.1 研究方法 36
3.2 理論基礎及模擬方法 37
雷諾方程式差分公式 40
3.3 節流器比較 47
第4章. 性能類比及結果討論 51
4.1 參數說明 51
4.2.1 初始狀態 52
4.2.2 承重狀態 52
4.2 參數之數值設置說明 54
4.3 偏心率（Eccentricity，ε） 55
4.4 倾斜角（Misalignment, γ1&γ2） 58
傾斜角γ1 59
傾斜角γ2 62
4.5 封油面寬度（Land Width, s） 65
4.6 油腔間夾角（Sill angle, α） 68
4.7 姿態角（Attitude Angle, φ） 72
4.8 各油腔初始腔壓比相異性能模擬 74
4.9 軸承形變模擬測試 76
第5章. 驗證實驗 78
5.1 實驗架構 78
供油系統 81
渦電流感測器 82
流量感測器 82
壓力感測器 83
毛細管節流器模組 84
孔口節流器模組 84
冷卻系統 85
5.2 初始間隙量測 86
三次元量床量測 86
位移計量測 88
粘度量測 89
5.3 節流器流阻量測 91
5.4 實驗步驟 93
5.5 實驗結果 95
5.6 誤差與分析 103
第6章. 結論及未來建議 104
6.1 結論 104
6.2 未來建議 105
參考文獻 107

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