|
[1] S.Fujita, “Wide-bandgap semiconductor materials: For their full bloom,” Jpn. J. Appl. Phys., vol. 54, no. 3, p. 030101, Mar.2015, doi: 10.7567/JJAP.54.030101. [2] P.Pust, P. J.Schmidt, andW.Schnick, “A revolution in lighting,” Nat. Mater., vol. 14, no. 5, pp. 454–458, May2015, doi: 10.1038/nmat4270. [3] R. X. G.Ferreira et al., “High Bandwidth GaN-Based Micro-LEDs for Multi-Gb/s Visible Light Communications,” IEEE Photonics Technol. Lett., vol. 28, no. 19, pp. 2023–2026, Oct.2016, doi: 10.1109/LPT.2016.2581318. [4] T.Takano, T.Mino, J.Sakai, N.Noguchi, K.Tsubaki, andH.Hirayama, “Deep-ultraviolet light-emitting diodes with external quantum efficiency higher than 20% at 275 nm achieved by improving light-extraction efficiency,” Appl. Phys. Express, vol. 10, no. 3, p. 031002, Mar.2017, doi: 10.7567/APEX.10.031002. [5] T. H.Gfroerer, “Photoluminescence in Analysis of Surfaces and Interfaces,” in Encyclopedia of Analytical Chemistry, Chichester, UK: John Wiley & Sons, Ltd, 2006, pp. 9209–9231. [6] N.Yoshimoto, T.Matsuoka, T.Sasaki, andA.Katsui, “Photoluminescence of InGaN films grown at high temperature by metalorganic vapor phase epitaxy,” Appl. Phys. Lett., vol. 59, no. 18, pp. 2251–2253, Oct.1991, doi: 10.1063/1.106086. [7] D. S.Lee, D.Byrnes, A.Parekh, S.Ting, andW.Quinn, “Carrier injection efficiency in nitride LEDs,” J. Cryst. Growth, 2008, doi: 10.1016/j.jcrysgro.2008.06.041. [8] M. I.Nathan, G.Burns, S. E.Blum, andJ. C.Marinace, “Electroluminescence and Photoluminescence of GaAs at 77°K,” Phys. Rev., vol. 132, no. 4, pp. 1482–1485, Nov.1963, doi: 10.1103/PhysRev.132.1482. [9] Y.Li et al., “Loss of Quantum Efficiency in Green Light Emitting Diode Dies at Low Temperature,” MRS Proc., vol. 955, pp. 0955-I15-12, Jan.2006, doi: 10.1557/PROC-0955-I15-12. [10] H.Reichl, D.Huber, andJ.Müler, “Photoluminescence investigations of diffused GaAs light emitting diodes,” Phys. Status Solidi, vol. 47, no. 2, pp. 489–495, Jun.1978, doi: 10.1002/pssa.2210470219. [11] E.Peiner, K.Hansen, M.Lübbe, andA.Schlachetzki, “Unintentional Redistribution of Zn in InGaAsP/InP Heterostructures,” Jpn. J. Appl. Phys., vol. 35, no. Part 1, No. 2A, pp. 557–563, Feb.1996, doi: 10.1143/JJAP.35.557. [12] I.Fujimoto, H.Asamizu, M.Shimada, M.Moriyama, N.Shibata, andM.Murakami, “Effects of vacuum annealing on electrical properties of GaN contacts,” J. Electron. Mater., vol. 32, no. 9, pp. 957–963, Sep.2003, doi: 10.1007/s11664-003-0230-z. [13] J.-S.Jang, S.-J.Park, andT.-Y.Seong, “Formation of low resistance Pt ohmic contacts to p-type GaN using two-step surface treatment,” J. Vac. Sci. Technol. B Microelectron. Nanom. Struct., vol. 17, no. 6, p. 2667, 1999, doi: 10.1116/1.591045. [14] T.Gessmann, J. W.Graff, Y.-L.Li, E. L.Waldron, andE. F.Schubert, “Ohmic contact technology in III nitrides using polarization effects of cap layers,” J. Appl. Phys., vol. 92, no. 7, pp. 3740–3744, Oct.2002, doi: 10.1063/1.1504169. [15] C.Pan, G.Chen, W.Hsu, C.Lin, andJ.Chyi, “Thermal stability improvement by using Pd∕NiO∕Al∕Ti∕Au reflective ohmic contacts to p-GaN for flip-chip ultraviolet light-emitting diodes,” Appl. Phys. Lett., vol. 88, no. 6, p. 062113, Feb.2006, doi: 10.1063/1.2173245. [16] G.Li et al., “GaN-based light-emitting diodes on various substrates: A critical review,” Reports Prog. Phys., vol. 79, no. 5, 2016, doi: 10.1088/0034-4885/79/5/056501. [17] S. L.Rhode et al., “Dislocation core structures in (0001) InGaN,” J. Appl. Phys., vol. 119, no. 10, 2016, doi: 10.1063/1.4942847. [18] K.Koike et al., “Improvement of light extraction efficiency and reduction of leakage current in GaN-based LED via V-pit formation,” IEEE Photonics Technol. Lett., vol. 24, no. 6, pp. 449–451, 2012, doi: 10.1109/LPT.2011.2180523. [19] Z.Liliental-Weber, J.Jasinski, J.Washburn, andM. A.O’Keefe, “Screw Dislocations in GaN,” Microsc. Microanal., vol. 8, no. S02, pp. 1198–1199, 2002, doi: 10.1017/s1431927602107860. [20] A.Hangleiter et al., “Suppression of nonradiative recombination by V-shaped pits in GaInN/GaN quantum wells produces a large increase in the light emission efficiency,” Phys. Rev. Lett., vol. 95, no. 12, pp. 1–4, 2005, doi: 10.1103/PhysRevLett.95.127402. [21] T.Hamachi, T.Tohei, M.Imanishi, Y.Mori, andA.Sakai, “Correlation between current leakage and structural properties of threading dislocations in GaN bulk single crystals grown using a Na-flux method,” Jpn. J. Appl. Phys., vol. 58, no. SC, 2019, doi: 10.7567/1347-4065/ab1392. [22] S.Usami et al., “Correlation between dislocations and leakage current of p-n diodes on a free-standing GaN substrate,” Appl. Phys. Lett., vol. 112, no. 18, 2018, doi: 10.1063/1.5024704. [23] D. S.Li, H.Chen, H. B.Yu, H. Q.Jia, Q.Huang, andJ. M.Zhou, “Dependence of leakage current on dislocations in GaN-based light-emitting diodes,” J. Appl. Phys., vol. 96, no. 2, pp. 1111–1114, 2004, doi: 10.1063/1.1763234. [24] H.Kum et al., “Dependence of reverse bias leakage on depletion width and V-pit size in InGaN/GaN light-emitting diodes grown on silicon,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Mater. Process. Meas. Phenom., vol. 33, no. 6, p. 060602, 2015, doi: 10.1116/1.4933039. [25] M.Moseley, A.Allerman, M.Crawford, J. J.Wierer, M.Smith, andL.Biedermann, “Electrical current leakage and open-core threading dislocations in AlGaN-based deep ultraviolet light-emitting diodes,” J. Appl. Phys., vol. 116, no. 5, 2014, doi: 10.1063/1.4891830. [26] B.Kim et al., “Investigation of leakage current paths in n-GaN by conductive atomic force microscopy,” Appl. Phys. Lett., vol. 104, no. 10, pp. 1–5, 2014, doi: 10.1063/1.4868127. [27] J.Chen et al., “Measurement of threading dislocation densities in GaN by wet chemical etching,” Semicond. Sci. Technol., vol. 21, no. 9, pp. 1229–1235, 2006, doi: 10.1088/0268-1242/21/9/004. [28] D. K.Schroder, Semiconductor Material and Device Characterization, vol. 44, no. 4. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2005. [29] S. N.Bystrova et al., “Dealing with leakage current in TLM and CTLM structures with vertical junction isolation,” IEEE Int. Conf. Microelectron. Test Struct., pp. 1–6, 2017, doi: 10.1109/ICMTS.2017.7954257. [30] R. D.Larrabee andW. R.Thurber, “Theory and application of a two-layer Hall technique,” IEEE Trans. Electron Devices, vol. 27, no. 1, pp. 32–36, Jan.1980, doi: 10.1109/T-ED.1980.19815. [31] I.Vurgaftman et al., “Improved quantitative mobility spectrum analysis for hall characterization,” J. Appl. Phys., vol. 84, no. 9, pp. 4966–4973, 1998, doi: 10.1063/1.368741. [32] K.Sato andY.Yasumura, “Study of forward I-V plot for Schottky diodes with high series resistance,” Journal of Applied Physics, vol. 58, no. 9. pp. 3655–3657, 1985, doi: 10.1063/1.335750. [33] C. M.Hsiung, C. S.Chou, andT. L.Chiang, “A generalized Norde plot for reverse biased Schottky contacts,” Int. J. Miner. Metall. Mater., vol. 19, no. 1, pp. 54–58, 2012, doi: 10.1007/s12613-012-0514-5. [34] H.Norde, “A modified forward I-V plot for Schottky diodes with high series resistance,” J. Appl. Phys., vol. 50, no. 7, pp. 5052–5053, 1979, doi: 10.1063/1.325607. [35] S. K.Cheung andN. W.Cheung, “Extraction of Schottky diode parameters from forward current-voltage characteristics,” Appl. Phys. Lett., vol. 49, no. 2, pp. 85–87, 1986, doi: 10.1063/1.97359. [36] R. M.Cibils andR. H.Buitrago, “Forward I-V plot for nonideal Schottky diodes with high series resistance,” Journal of Applied Physics, vol. 58, no. 2. pp. 1075–1077, 1985, doi: 10.1063/1.336222. [37] K. E.Bohlin, “Generalized Norde plot including determination of the ideality factor,” J. Appl. Phys., vol. 60, no. 3, pp. 1223–1224, 1986, doi: 10.1063/1.337372. [38] W. F.Wang, K. Y.Cheng, M. C.Wu, andK. C.Hsieh, “Analyses of current-voltage characteristics using derivative methodology,” Solid. State. Electron., vol. 149, no. July, pp. 15–22, 2018, doi: 10.1016/j.sse.2018.08.002. [39] Z. L.Wang, “Dislocation contrast in high-angle hollow-cone dark-field TEM,” Ultramicroscopy, vol. 53, no. 1, pp. 73–90, 1994, doi: 10.1016/0304-3991(94)90106-6. [40] S. D.Findlay, N.Shibata, H.Sawada, E.Okunishi, Y.Kondo, andY.Ikuhara, “Dynamics of annular bright field imaging in scanning transmission electron microscopy,” Ultramicroscopy, vol. 110, no. 7, pp. 903–923, 2010, doi: 10.1016/j.ultramic.2010.04.004. [41] H.Norde, “A modified forward I ‐ V plot for Schottky diodes with high series resistance,” J. Appl. Phys., vol. 50, no. 7, pp. 5052–5053, Jul.1979, doi: 10.1063/1.325607. [42] D.Yan, H.Lu, D.Chen, R.Zhang, andY.Zheng, “Forward tunneling current in GaN-based blue light-emitting diodes,” Appl. Phys. Lett., vol. 96, no. 8, pp. 94–97, 2010, doi: 10.1063/1.3327332. [43] J.Xu et al., “The origin of the high diode-ideality factors in GaInN/GaN multiple quantum well light-emitting diodes,” Appl. Phys. Lett., vol. 94, no. 8, p. 081113, 2009, doi: 10.1063/1.3089687. [44] J. M.Shah, Y. L.Li, T.Gessmann, andE. F.Schubert, “Experimental analysis and theoretical model for anomalously high ideality factors (n≫2.0) in AlGaN/GaN p-n junction diodes,” J. Appl. Phys., vol. 94, no. 4, pp. 2627–2630, 2003, doi: 10.1063/1.1593218. [45] M.Meneghini et al., “Analysis of defect-related localized emission processes in InGaN/GaN-based LEDs,” IEEE Trans. Electron Devices, vol. 59, no. 5, pp. 1416–1422, 2012, doi: 10.1109/TED.2012.2186970. [46] Z. Q.Fang, D. C.Reynolds, andD. C.Look, “Changes in electrical characteristics associated with degradation of InGaN blue light-emitting diodes,” J. Electron. Mater., vol. 29, no. 4, pp. 448–451, 2000, doi: 10.1007/s11664-000-0159-4. [47] J. B.Fedison, T. P.Chow, H.Lu, andI. B.Bhat, “Electrical characteristics of magnesium-doped gallium nitride junction diodes,” Appl. Phys. Lett., vol. 72, no. 22, pp. 2841–2843, 1998, doi: 10.1063/1.121475. [48] P.Kozodoy et al., “Electrical characterization of GaN p-n junctions with and without threading dislocations,” Appl. Phys. Lett., vol. 73, no. 7, pp. 975–977, 1998, doi: 10.1063/1.122057. [49] E. F.Chor andJ.Lerdworatawee, “Quasi-two-dimensional transmission line model (QTD-TLM) for planar ohmic contact studies,” IEEE Trans. Electron Devices, vol. 49, no. 1, pp. 105–111, 2002, doi: 10.1109/16.974756. [50] R. M.Swanson, K. C.Saraswat, S. E.Swirhun, andW. M.Loh, “Current Crowding Effects and Determination of Specific Contact Resistivity from Contact End Resistance (CER) Measurements,” IEEE Electron Device Lett., 1985, doi: 10.1109/EDL.1985.26259.
|