為了因應多功能機器手臂，夾取不同物件之需求，觸覺感測器是機器手臂中關鍵之零組件，而面對不同的應用也會需要相對應之觸覺感測器規格，為此傳統方式需要透過修改光罩來改變元件之規格，或是在製程中事先透過調整某層材料之參數，來改變元件之特性。當元件製作完成後，可以透過放大電路等方式調整元件之輸出之靈敏度，但該方法往往無法調整元件之感測範圍。
為了解決上述之問題，本研究希望可以設計出以電訊號來調變之觸覺感測元件。其元件之設計概念如下：在觸覺感測元件中，設計一個可填充不同材料的腔體，並以該腔體以及內部之填充材料作為元件之受力薄膜。並透過電場來調整填入觸覺感測元件之材料的等效剛性，進而調整感測元件之特性。在設計規畫上．使用微機電MEMS技術來減小施加電場所要提供的間距，將調變所需的輸入電壓從千伏特降至個位數伏特。本研究所提出之電調變觸覺感測器(Electrically Modulable Tactile Sensor (EMTS))，主要透過填入矽膠單體(Silicon Monomer)(矽油)、奈米顆粒(Nanoparticles)、矽膠固化劑(Curing Agent)的不同材料組成，來形成電流變體(ER-fluid)、PDMS(矽膠)介電高分子、PDMS高分子奈米複合材料，並以該材料作為填充材料，來形成三種可電調變之觸覺感測器(ER-fluid EMTS，PDMS EMTS，PDMS Nanoparticle Composite EMTS)，並且透過上述這些不同的填充材料以及結構設計，來實現1. 兩階段感測能力，藉此延伸感測範圍；2. 使用中調變，使得元件可以在使用中透過施加之驅動電壓，進行特性調變；3. 製程中調變，在製程中透過施加不同電場，來調變元件之輸出特性。而本研究可含括的元件之靈敏度為3 fF/N~1.65 fF/mN，感測範圍為20 mN~2.5 N。其中調變靈敏度變化最大約為23倍，感測範圍可調變為原先之10%。

The tactile sensor is a vital technology to the multi-functional robot. For fitting different grasping applications, the tactile sensors also require corresponding specifications for different objects. To change the sensor's specification, in traditional methods, the sensor needs to modify the mask to change the device's performance or adjust the fabrication parameters of the device's material in advance. After the device is manufactured, the sensitivity can be adjusted using an amplifying circuit, but this method cannot change the sensing range.
For solving these problems, this study proposed electrically modulable tactile sensors (EMTS). The design concept is shown in the following: A force loading membrane, which has a material fill-in channel, was designed with different fill-in materials. Applied voltages can further modify the equivalent stiffness of fillers. Therefore, the sensitivity and sensing range can be modified. Besides, the CMOS-MEMS technology was be implemented to reduce the modulation voltage from kV to digital V by the sub-micro tiny gaps, thereby realizing an electrically adjustable device. In this study, three different materials are used as the modulation structure to realize the electrically modulable tactile senor: 1. Electrorheological fluid EMTS; 2. PDMS Polymer material EMTS; 3. Polymer nanoparticles composites (electrorheological elastomer) EMTS. Through these different filling materials and structural design, to achieve 1. Two-stage sensing capabilities, thereby extending the sensing range; 2. In-use modulation allows the device to modify the performance during use; 3. In-process modulation modulates the characteristics of the device during the process. The sensitivity that can be demonstrated in this study is 3 fF/N~1.65 fF/mN, and the sensing range is 20 mN~2.5 N. The maximum modulation in sensitivity is about 23 times, and the sensing range is reduced to 10%.

目 錄
中文摘要 i
Abstract ii
致謝 iii
目 錄 iv
圖目錄 vi
表目錄 x
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 2
1-3 研究動機 5
1-4 研究目標與架構 7
第二章 可調變觸覺感測器原理與分析 19
2-1 電容式觸覺感測器原理 19
2-2 可調變之觸覺感測器原理 21
2-3 可應用於電調變剛性之填充材料 22
2-4 小結 26
第三章 電流變體電調變觸覺感測器 36
3-1 元件設計概念 36
3-2 電流變體電調變觸覺感測器之後製程與封裝 39
3-3 觸覺感測器量測架設 41
3-4 電流變體電調變觸覺感測器量測結果分析與討論 43
3-5 小結 44
第四章 PDMS電調變觸覺感測器 56
4-1 元件設計概念 56
4-2 元件製程與結果 58
4-3 實驗結果分析與討論 59
4-4 小結 63
第五章 高分子奈米顆粒複合材料電調變觸覺感測器 76
5-1 元件設計概念 76
5-2 元件製程流程與結果 77
5-3 實驗結果分析與討論 79
5-4 小結 82
第六章 結論與未來展望 98
6-1 結論 98
6-2 未來展望 99
參考文獻 105
附錄A 觸覺感測器量測系統架設與驗證 114

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