觸覺感測器用途廣泛，常用於可撓式觸控面板、人工電子皮膚、機器手臂、及人工義肢等應用上，使得可撓性觸覺感測器漸漸地備受矚目。可撓性觸覺感測器具有容易彎曲之基底、製程容易且可以大面積製造及成本較低等優點，透過觸覺感測器可模擬人類皮膚，藉以感測各種不同之物理量。
本論文研究兩種不同感測機制之新型可撓性觸覺感測器。第一部分是利用氧化鋅奈米柱陣列設計之複合功能觸覺感測器，藉由水溶液法成長氧化鋅奈米柱陣列，進而模仿人體皮膚之感覺受器。將兩片成長完成一維氧化鋅奈米柱陣列之PDMS基板相互結合，使上下兩片氧化鋅奈米柱陣列形成交互鏈鎖結構，藉由施加壓力使奈米柱間之接觸電阻改變，感測動態與靜態力之外部刺激反應。同時利用ZnO之半導體熱阻特性以量測外部之環境溫度，製作可撓性複合功能之壓阻式觸覺及溫度感測器。再將交互鏈鎖結構做成3 × 3觸覺感測陣列與LabVIEW人機界面結合，證實達到多點觸控之功能。第二部分則是研發新型電容式觸覺感測器，設計概念是使用五個同心形狀電極作為一個感測單元，使正向力和剪切力解耦合，量測時不受兩者互相影響，可以正確的量測到正向力或是剪切力，減少因受到合成力所導致的測量誤差，同時，因為此電容感測器具有特殊電極形狀的設計，可檢測扭轉的力矩角度，期待未來可用於手機、平板上，做為旋轉搖桿或是機器手臂上扭力檢測。

Due to their low cost, bendable and stretchable characteristics, flexible tactile sensors are widely used in touch panel, prostheses, robots, and artificial electronic skin (e-skin) to mimic the sensing capabilities of human skin.
In this thesis, two kinds of novel flexible tactile sensors with different sensing mechanisms, piezoresistivity and capacitance, are developed. In the first part, the proposed piezoresistive tactile sensor is investigated. It utilizes the interlocked structures with high-aspect-ratio ZnO nanorod arrays to increase the available conducting paths and thus to increase the contact areas for electrical conduction between two electrodes. As a result, the sensitivity is significantly improved. To become a multifunctional tactile sensor, except for measuring the static and dynamic forces, the developed tactile sensor can be employed to detect the environmental temperature using the characteristics of the thermal resistance of ZnO nanorods. Furthermore, with 3 × 3 sensor units, the piezoresistive tactile sensor can provide high resolution and identify the difference in the strengths of multiple-touch forces applied. In the second part, a novel capacitive tactile sensor has been proposed. The perceptive unit of tactile sensor consists of five sensing electrodes to detect three-axial force. Each capacitive sensing unit comprises a pair of the same shape but different size electrodes (top electrode and bottom electrode). By the unique design of electrode shapes, the developed tactile sensor is able to detect the applied normal force and the shear force, to have the capability of decoupling the applied normal and shear force and the torsion sensing. In the future, the proposed tactile sensor with the ability of sensing torque can be utilized in the wearable devices, flexible interface in the touch panel, and bionic robotic skins.

中文摘要 I
ABSTRACT II
致謝 III
目錄 IV
圖目錄 VII
表目錄 XIII
第一章 緒論 1
1.1 前言 1
1.2 研究背景與動機 2
1.3 文獻回顧 4
1.3.1 壓阻式感測器 6
1.3.2 壓電式感測器 13
1.3.3 電容式感測器 16
1.4 論文架構 22
第二章 理論基礎與原理 24
2.1 氧化鋅奈米柱交互鏈鎖結構之觸覺感測器 24
2.1.1 氧化鋅基本結構與特性 24
2.1.2 氧化鋅摻雜鋁薄膜特性 28
2.1.3 壓阻感測原理 28
2.1.4 溫度感測原理 29
2.1.5 鍍膜製程方法 30
2.1.6 水溶液法合成一維氧化鋅奈米柱 31
2.2 電容式觸覺感測器之基礎理論 33
2.2.1 二平行板單一介電材料之電容值 33
2.2.2 多層介電層之電容值推導 34
2.2.3 觸覺感測器之設計架構 35
2.2.4 電極設計 36
2.2.5 電容靈敏度 38
2.2.6 觸覺感測器之工作原理與理論推導 38
第三章 元件製程與實驗 42
3.1 氧化鋅奈米柱交互鏈鎖結構之觸覺感測器 42
3.1.1 氧化鋅奈米柱元件製作流程 42
3.1.2 製作PDMS基板 43
3.1.3 ZnO/AZO晶種層鍍膜 44
3.1.4 水溶液法成長氧化鋅奈米柱 45
3.2 電容式觸覺感測器 49
3.2.1 感測元件製作流程 49
3.2.2 上下電極製作 50
3.2.3 絕緣層與側壁層製作 52
3.2.4 黏合感測元件 52
第四章 實驗結果討論與分析 54
4.1 壓阻式觸覺感測器實驗結果討論與分析 54
4.1.1 水溶液法成長溫度與反應時間參數最佳化 54
4.1.2 成長溫度對氧化鋅奈米柱成長之影響 56
4.1.3 反應時間對氧化鋅奈米柱成長之影響 69
4.1.4 氧化鋅奈米柱結構之晶體分析 80
4.1.5 氧化鋅奈米柱結構之材料分析 82
4.2 觸覺感測元件實驗量測結果 84
4.2.1 觸覺感測元件之設計與製作 84
4.2.2 電流-電壓特性曲線量測 86
4.2.3 靜態壓力量測結果與討論 88
4.2.4 動態壓力量測結果與討論 90
4.2.4.1 不同頻率下動態壓力量測 91
4.2.4.2 即時脈搏訊號監測 95
4.2.4.3 動態施力之波形辨識 98
4.2.5 感測器之延遲與回復時間量測 99
4.2.6 感測元件之強健性 100
4.2.7 外部環境溫度量測 101
4.2.8 3 × 3觸覺感測陣列 103
4.3 電容式觸覺感測器 106
4.3.1 實驗架構 106
4.3.2 正向力量測 108
4.3.3 側向力量測 109
4.3.4 轉矩量測 111
第五章 結論與未來工作 113
5.1 結論 113
5.2 未來工作 114
參考文獻 116

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